Gyrometer in surface technology, with out-of-plane detection by strain gauge
First Claim
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1. A device that detects a rotation around a first axis, the device comprising:
- a substrate;
a first zone having a first thickness and includingat least one mass, defining, idle, a plane, arranged at a distance from a second axis of rotation contained in the plane, the mass being able to be caused to vibrate in the plane, perpendicular to the first axis of rotation, andat least two connecting arms that connect said mass to said second axis of rotation;
means for causing said mass to vibrate in the plane;
a second zone, of second thickness forming, for at least one of the two connecting arms, at least one connection with the substrate for a rotation around said second axis of rotation, the second zone having a thickness smaller than or equal to that of the first zone; and
a third zone with a thickness smaller than that of the second zone, including at least one suspended strain gauge that detects rotational movement around said second axis of rotation, the third zoneextends in a plane parallel to the plane of the substrate and does not contain the second axis of rotation,extends in a plane perpendicular to the second axis of rotation, andis connected to one of the first and second zones and to the substrate,wherein the mass moves in a direction out of the plane in response to the device rotating around the first axis of rotation.
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Abstract
A device that detects a rotation around a first axis, the device including: a substrate; a first zone having a first thickness and including at least one mass, defining, idle, a plane, arranged at a distance from a second axis of rotation contained in the plane, the mass being able to be caused to vibrate in the plane, perpendicular to the first axis of rotation, and at least two connecting arms that connect the mass to the second axis of rotation; and a vibration inducing device that causes the mass to vibrate in the plane.
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Citations
19 Claims
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1. A device that detects a rotation around a first axis, the device comprising:
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a substrate; a first zone having a first thickness and including at least one mass, defining, idle, a plane, arranged at a distance from a second axis of rotation contained in the plane, the mass being able to be caused to vibrate in the plane, perpendicular to the first axis of rotation, and at least two connecting arms that connect said mass to said second axis of rotation; means for causing said mass to vibrate in the plane; a second zone, of second thickness forming, for at least one of the two connecting arms, at least one connection with the substrate for a rotation around said second axis of rotation, the second zone having a thickness smaller than or equal to that of the first zone; and a third zone with a thickness smaller than that of the second zone, including at least one suspended strain gauge that detects rotational movement around said second axis of rotation, the third zone extends in a plane parallel to the plane of the substrate and does not contain the second axis of rotation, extends in a plane perpendicular to the second axis of rotation, and is connected to one of the first and second zones and to the substrate, wherein the mass moves in a direction out of the plane in response to the device rotating around the first axis of rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A device that detects a rotation around a first axis, the device comprising:
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a substrate; a first zone having a first thickness and comprising two masses, defining, idle, a plane, each of said two masses being arranged, idle, at a distance from a second axis of rotation, respectively, and contained in said plane, the two distances between each of these two masses and the respective second axes of rotation being equal, each of said two masses being able to be caused to vibrate in the plane, perpendicular to the first axis of rotation, said two masses having a second common axis of rotation, common with the first axis of rotation, two arms, for each of the two masses, that connect a respective one of the two masses to said second common axis of rotation, electrostatic combs that cause said masses to vibrate in the plane, a second zone, of second thickness forming, for at least one of the two arms, at least one connection with the substrate for a rotation around said second axis of rotation, the second zone having a thickness smaller than or equal to that of the first zone; a third zone with a thickness smaller than that of the second zone, forming at least one suspended strain gauge that detects rotational movement around said second axis of rotation, this third zone extends in a plane parallel to the plane of the substrate and does not contain the second axis of rotation, extends in a plane perpendicular to the second axis of rotation, is connected to one of the first and second zones and, on the other hand, to the substrate, wherein the two masses move in a direction out of the plane in response to the device rotating around the first axis of rotation.
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19. A device that detects a rotation around a first axis, the comprising:
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a substrate; a first zone having a first thickness and comprising two masses, defining, idle, a plane, each of said two masses being arranged, idle, at an equal distance from a respective second axis of rotation contained in said plane, each of said two masses being able to be caused to vibrate in the plane, perpendicular to the first axis of rotation, said two masses having second axes of rotation different from each other, parallel to each other and to the first axis of rotation, the first zone including at least four arms, including two arms to connect each mass to the respective second axis of rotation, electrostatic combs that cause said masses to vibrate in the plane, a second zone, of second thickness forming, for at least one of the arms, at least one connection with the substrate for a rotation around said second axis of rotation associated with said at least one of the arms, the second zone having a thickness smaller than or equal to that of the first zone, a third zone with a thickness smaller than that of the second zone, forming at least one suspended strain gauge that detects the rotational movement around said second axis of rotation associated with said at least one of the arms, this third zone extends in a plane parallel to the plane of the substrate and does not contain the second axis of rotation associated with said at least one of the arms, extends in a plane perpendicular to the second axis of rotation associated with said at least one of the arms, and is connected to one of the first and second zones and to the substrate, wherein the two masses move in a direction out of the plane in response to the device rotating around the first axis of rotation.
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Specification
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Current AssigneeCommissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
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Original AssigneeCommissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
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InventorsRobert, Philippe
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Primary Examiner(s)Kwok, Helen C.
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Application NumberUS12/692,032Publication NumberTime in Patent Office1,124 DaysField of Search735/041.2, 735/041.4, 735/040.4, 735/142.9, 735/143.2, 735/041.6, 735/040.2US Class Current73/504.12CPC Class CodesG01C 19/574 the devices having two sens...
