Microelectromechanical gyroscope with position control driving and method for controlling a microelectromechanical gyroscope
First Claim
1. A microelectromechanical gyroscope comprising:
- a microstructure including a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a first sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a first sensing axis in response to rotations of the microstructure; and
a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;
a discrete-time sensing interface coupled to the microstructure and configured to sense a discrete-time position of the driving mass with respect to the driving axis, the sensing interface including a discrete-time charge amplifier configured to sense the discrete-time position of the driving mass and provide a discrete-time detection signal that indicates the discrete-time position of the driving mass; and
a controller configured to control an oscillation amplitude of the microelectromechanical loop based on the discrete-time detection signal that indicates the discrete-time position of the driving mass.
1 Assignment
0 Petitions
Accused Products
Abstract
A MEMS gyroscope includes: a microstructure having a fixed structure, a driving mass, movable with respect to the fixed structure according to a driving axis, and a sensing mass, mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass according to a sensing axis, in response to rotations of the microstructure; and a driving device, for keeping the driving mass in oscillation with a driving frequency. The driving device includes a discrete-time sensing interface, for detecting a position of the driving mass with respect to the driving axis and a control stage for controlling the driving frequency on the basis of the position of the driving mass.
78 Citations
35 Claims
-
1. A microelectromechanical gyroscope comprising:
-
a microstructure including a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a first sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a first sensing axis in response to rotations of the microstructure; and a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;a discrete-time sensing interface coupled to the microstructure and configured to sense a discrete-time position of the driving mass with respect to the driving axis, the sensing interface including a discrete-time charge amplifier configured to sense the discrete-time position of the driving mass and provide a discrete-time detection signal that indicates the discrete-time position of the driving mass; and a controller configured to control an oscillation amplitude of the microelectromechanical loop based on the discrete-time detection signal that indicates the discrete-time position of the driving mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
-
-
15. A method, comprising:
controlling a microelectromechanical gyroscope provided with a microstructure that includes a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a sensing axis, in response to rotations of the microstructure, the controlling including; discrete-time sensing a discrete-time position of the driving mass with respect to the driving axis, the discrete-time sensing including producing a discrete-time detection signal that indicates the discrete-time position of the driving mass; converting the discrete-time detection signal to a continuous-time detection signal; and controlling an oscillation amplitude of the driving mass based on the continuous-time detection signal. - View Dependent Claims (16, 17, 18)
-
19. A system comprising:
-
a control unit; and a microelectromechanical gyroscope coupled to the control unit and configured to be controlled by the control unit, the gyroscope including; a microstructure including a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a first sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a first sensing axis in response to rotations of the microstructure; and a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;a discrete-time sensing interface coupled to the microstructure and configured to sense a discrete-time position of the driving mass with respect to the driving axis, the sensing interface including a discrete-time charge amplifier configured to sense the discrete-time position and provide a discrete-time detection signal that indicates the discrete-time position of the driving mass; and a controller configured to control an oscillation amplitude of the microelectromechanical loop based on the discrete-time detection signal that indicates the discrete-time position of the driving mass. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
-
-
27. A sensing device for a microstructure that includes a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a sensing axis in response to rotations of the microstructure, the sensing device comprising:
-
a discrete-time sensing interface configured to sense a discrete-time position of the driving mass with respect to the driving axis and produce a discrete-time detection signal that indicates the discrete-time position of the driving mass; a converter configured to convert the discrete-time detection signal to a continuous-time detection signal; and a driving amplifier coupled to the converter and configured to control an oscillation amplitude of the driving mass based on the continuous-time detection signal. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35)
-
Specification