Conductive oxynitride and method for manufacturing conductive oxynitride film
First Claim
1. A display device comprising:
- a pixel electrode,wherein the pixel electrode comprises a conductive oxynitride containing indium, gallium, zinc, and hydrogen atoms.
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Abstract
An electrode formed using a transparent conductive oxide is likely to be crystallized by heat treatment performed in the manufacturing process of a semiconductor device. In the case of a thin film element using an electrode having a significantly uneven surface due to crystallization, a short circuit is likely to occur and thus reliability of the element is degraded. An object is to provide a light-transmitting conductive oxynitride which is not crystallized even if subjected to heat treatment and a manufacturing method thereof. It is found that an oxynitride containing indium, gallium, and zinc, to which hydrogen atoms are added as impurities, is a light-transmitting conductive film which is not crystallized even if heated at 350° C. and the object is achieved.
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Citations
25 Claims
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1. A display device comprising:
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a pixel electrode, wherein the pixel electrode comprises a conductive oxynitride containing indium, gallium, zinc, and hydrogen atoms. - View Dependent Claims (2, 9, 12, 15)
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3. A method for manufacturing a conductive oxynitride film, comprising:
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stacking an oxynitride film containing indium, gallium, and zinc over a film serving as a supply source of hydrogen atoms; and performing heat treatment so that hydrogen atoms are diffused into the oxynitride film. - View Dependent Claims (5, 16)
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4. A method for manufacturing a conductive oxynitride film, comprising:
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stacking an oxynitride film containing indium, gallium, and zinc over a film comprising a hydroxyl group such as a —
SiOH group or a —
AlOH group or over a film to which hydrogen is added; andperforming heat treatment so that hydrogen atoms are diffused into the oxynitride film. - View Dependent Claims (6, 17)
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7. A display device comprising:
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a transistor over a substrate; a channel formation layer included in the transistor; and a pixel electrode, wherein the pixel electrode comprises a conductive oxynitride containing indium, gallium, gallium, zinc, and hydrogen atoms, and wherein the pixel electrode is electrically connected to the transistor. - View Dependent Claims (10, 13, 18, 20, 22, 24)
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8. A display device comprising:
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a transistor over a substrate; a channel formation layer included in the transistor; a pixel electrode; and a counter electrode over the substrate, the transistor, and the pixel electrode, wherein the counter electrode comprises a conductive oxynitride containing indium, gallium, zinc, and hydrogen atoms. - View Dependent Claims (11, 14, 19, 21, 23, 25)
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Specification