CMOS image sensors including backside illumination structure and method of manufacturing image sensor
First Claim
Patent Images
1. An image sensor comprising:
- a photo diode unit including a first wafer, the photo diode unit comprising photo diodes including a first photo diode and transfer gate transistors including a first transfer gate transistor having a first gate, the transfer gate transistors coupled to respective ones of the photo diodes, and the photo diode unit configured to be positioned in an incident light path;
a second wafer positioned downstream from the first wafer with respect to the incident light path, the second wafer including additional transistors including a second transistor having a second gate,wherein the first gate is positioned on a downstream surface of the first wafer with respect to the incident light path, andwherein the second gate is positioned on a downstream surface of the second wafer with respect to the incident light path.
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Abstract
An image sensor having a backside illumination structure can include a photo diode unit in a first wafer, where the photo diode unit includes photo diodes and transfer gate transistors coupled to respective ones of the photo diodes. A wiring line unit can be included on a second wafer that is bonded to the photo diode unit, where the wiring line unit includes wiring lines and transistors configured to process signals provided by the photo diode unit and configured to control the photo diode unit. A supporting substrate is bonded to the wiring line unit and a filter unit is located under the first wafer.
11 Citations
20 Claims
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1. An image sensor comprising:
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a photo diode unit including a first wafer, the photo diode unit comprising photo diodes including a first photo diode and transfer gate transistors including a first transfer gate transistor having a first gate, the transfer gate transistors coupled to respective ones of the photo diodes, and the photo diode unit configured to be positioned in an incident light path; a second wafer positioned downstream from the first wafer with respect to the incident light path, the second wafer including additional transistors including a second transistor having a second gate, wherein the first gate is positioned on a downstream surface of the first wafer with respect to the incident light path, and wherein the second gate is positioned on a downstream surface of the second wafer with respect to the incident light path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. An image sensor comprising:
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a photo diode unit in a first wafer, the photo diode unit comprising photo diodes including a first photo diode and transfer gate transistors including a first transfer gate transistor having a first gate, the transfer gate transistors coupled to respective ones of the photo diodes, and the photo diode unit configured to be positioned in an incident light path; and a second wafer positioned downstream from the first wafer with respect to the incident light path, the second wafer including additional transistors including at least a second transistor having a second gate, wherein the first photo diode, the first gate, and the second gate are positioned to overlap in a direction of the incident light path. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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17. An image sensor comprising:
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a filter unit including an array of filters extending in a first direction, the filter array including a first filter; a photo diode unit in a first wafer, the photo diode unit comprising photo diodes including a first photo diode and transfer gate transistors including a first transfer gate transistor having a first gate, the transfer gate transistors coupled to respective ones of the photo diodes, wherein the first photo diode is positioned between the first filter and the first gate in a second direction perpendicular to the first direction; and a second wafer including additional transistors including at least a second transistor having a second gate, wherein the first gate is positioned between the second gate and the first photo diode in the second direction. - View Dependent Claims (18, 19, 20)
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Specification