Tilting actuator with close-gap electrodes

• US 8,378,434 B2
• Filed: 06/15/2009
• Issued: 02/19/2013
• Est. Priority Date: 12/14/2006
• Status: Expired due to Fees

• Current Assignee: Ramot at Tel Aviv University Limited (Tel Aviv University)
• Original Assignee: Ramot at Tel Aviv University Limited (Tel Aviv University)
• Inventors: Krylov, Slava, Shmilovich, Tsvi
• Primary Examiner(s): WILCZEWSKI, MARY A
• Application Number:
  US12/484,338
• Publication Number:
  US 20100006958A1
• Time in Patent Office: 1,345 Days
• Field of Search: 310/309, 359/199.2, 359/200.6, 359/212.1, 359/212.2, 359/223.1, 359/226.1, 257/415
• US Class Current: 257/415
• CPC Class Codes: B81B 3/0018 Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

An electromechanical tilting device including a first and a second electrode structures, shaped, positioned and oriented to define at least partially interdigitated electrodes, and a suspension defining a tilt-containing motion path for the second structure with respect to the first structure. The motion path is selected to cause changes in overlapping regions and overlapping regions'"'"' gaps of the interdigitated electrodes. The device is configured such that an increase in one or more voltage bias applied to interdigitated driving electrodes makes a decrease in a total area of overlapping regions of the driving electrodes electrically energetically favorable.

Claims

1. An electromechanical tilting device comprising

a first electrode structure comprising substantially mutually parallel electrodes,

a second electrode structure comprising substantially mutually parallel electrodes,

wherein the electrodes of the first electrode structure are at least partially interdigitated with the electrodes of the second electrode structure to form overlapping regions defining gaps between the electrodes of the first electrode structure and the electrodes of the second electrode structure within the overlapping regions, and

a suspension associated with the second electrode structure configured to define a tilt-containing motion path for rotating the second electrode structure with respect to the first electrode structure about a rotation axis substantially parallel to the electrodes of the first electrode structure and to the electrode the second electrode structure,

wherein the rotation axis is positioned so that the rotating changes angles and distances between the electrodes of the first structure within the overlaps and the electrodes of the second structure within the overlaps, and

wherein the tilt-containing motion path changes dimensions of the overlapping regions and of the gaps between the interdigitated electrodes.

2. The device of claim 1, said interdigitated electrodes having a common material layer.

3. The device of claim 1, connectable to one or more voltage source applying a voltage bias between the electrodes by providing at least one of the following:

an ac voltage and a sum of the dc and ac voltages, the device thereby being usable as an actuator.

4. The device of claim 1, wherein the suspension has at least one of the following features:

comprises a torsion axis;

comprises a bending flexure;

is electrically conductive.

5. The device of claim 1, wherein the suspension comprises a torsion axis having a common material layer with said interdigitated electrodes.

6. The device of claim 5, the common material layer being thinner in a region of the torsion axis than within electrodes of the second structure.

7. The device of claim 1, the suspension comprising a torsion axis being offset from an interdigitation axial center line of the second electrode structure.

8. The device of the claim 1, the device being configured to have an equilibrium while one or more voltage bias between the electrodes is zero and the electrodes of the first and second electrode structures are in at least one of the following configurations;

(i) substantially parallel to each other;

(ii) overlap for more than one half of their area;

(iii) overlap for more than two thirds of their area.

9. The device of claim 1, the electrodes having a rectangular shape in at least one cross-section.

10. The device of claim 1, comprising a silicon layer, said silicon layer being either a common material layer of said interdigitated electrodes or the layer of the second electrode structure.

11. The device of claim 1, wherein at least one of said electrode structures is in the form of a comb structure and wherein at least two of the electrodes of the comb structure are connected to different voltage sources.

12. The device of claim 1, the motion path of the second electrode structure being geometrically limited by the first electrode structure.

13. The device of claim 1, comprising a layer of a silicon-on-insulator (SOI) wafer.

14. The device of claim 1, having an optically reflective region tilting in the course of the motion of the second structure, the region thereby being capable of serving as a scanning mirror.

15. A gyroscope comprising the device of claim 1.

16. The device of claim 1, fabricated as a MEMS device.

17. The device of claim 1, configured to have three stable states of equilibrium with no contact between the first and the second electrode structures or contact between the electrode structures and a mechanical constraining structure.

18. The device of claim 1, configured to have, for electrodes biased with a constant voltage, at least two positions of electrical equilibrium within said motion path.

19. The device of claim 18, wherein each of said first and second electrode structures defines at least one electrode.

20. The device of claim 1, being configured to define the motion path having at least a portion thereof, within which one or more voltage bias applied to the interdigitated driving electrodes causes a decrease in a total area of the overlapping regions of the driving electrodes electrically energetically favorable.

21. The device of claim 20 comprising an excitation unit configured to excite the device at a parametric resonance frequency.

22. An electromechanical tilting device comprising

a first and a second electrode structures and a suspension for rotating the second structure with respect to the first structure about a rotation axis substantially parallel to the electrodes of the first electrode structure and of the second electrode structure,

wherein the rotation axis is positioned so that the rotating changes angles and distances between the electrodes of the first structure and the second structure within overlaps between the first structure and the second structure,

at least one of the structures comprising two electrically isolated electrodes,

the device being configured to have in at least a portion of said rotation an electrically energetically favorable direction of motion being dependent on selection of whichever one of said two electrically isolated electrodes is biased.

23. A tunable tilting device comprising

a holding element (152),

a tilting element (154) and

a suspension structure (156A and 156B) coupling the holding element and the tilting element and defining a tilt-containing motion path for the tilting element with respect to the holding element,

the tilting element being substantially responsive to an actuating field of a type acting to cause a motion of the element along said motion path,

the suspension structure being configured to bend with a certain bending stiffness to provide the tilting element said motion path,

said suspension structure being substantially responsive to a tuning force acting to change an extension or compressive stress or the structure and thereby to change the bending stiffness of the suspension structure,

wherein the force is delivered by:

a first electrode structure comprising substantially mutually parallel electrodes coupled to the holding element (152), and

a second electrode structure comprising substantially mutually parallel electrodes coupled to the tilting element (154),

wherein the electrodes of the first structure are at least partially interdigitated with the electrodes of the second structure to form overlaps,

wherein the suspension structure is associated with the second electrode structure for tilting the second electrode structure with respect to the first electrode structure about a rotation axis substantially parallel to the electrodes of the first electrode structure and to the electrodes of the second electrode structure, and

wherein the rotation axis is positioned so that the rotating changes angles and distances between the electrodes of the first structure within the overlaps and the electrodes of the second structure within the overlaps.

24. The device of claim 23 fabricated as a MEMS device.

25. The device of claim 23 comprising a mirror carried by the tilting element.

26. The device of claim 23, the tilt-containing motion path comprising a rotation around a virtual axis.

27. The device of claim 23, wherein at least one of the actuation field and the tuning field is electrostatic.