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Orientation of electronic devices on mis-cut substrates

  • US 8,378,463 B2
  • Filed: 12/21/2010
  • Issued: 02/19/2013
  • Est. Priority Date: 07/11/2005
  • Status: Active Grant
First Claim
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1. A III-V nitride substrate having an (Al,Ga,In)N off-cut surface with a plurality of parallel steps, each step of the plurality of parallel steps having a first step face and a second step face meeting along a crest, wherein each first step face and each second step face is orthogonal to a cleavage plane, and wherein the off-cut surface is off-cut from a <

  • 0001>

    direction and has a tilt direction oriented to within ±

    15 degrees of the <

    11 20>

    direction.

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