Substrate for a probe card assembly
First Claim
1. A substrate for a probe card assembly, comprising:
- an interconnection layer including a first surface having a plurality of first electrode sets and a second surface having a plurality of second electrode sets electrically connected to the plurality of first electrode sets;
a base layer including a first surface having a plurality of third electrode sets electrically connected to the plurality of second electrode sets and a second surface having a plurality of contact terminals electrically connected to the plurality of third electrode sets; and
a resin layer including a plurality of sublayers made of different materials, the resin layer being attached to the first surface of the base layer and the second surface of the interconnection layer,wherein the resin layer includes a first sublayer, a second sublayer, and a third sublayer,wherein a thermal expansion coefficient of the third sublayer is lower than a thermal expansion coefficient of the first sublayer and a thermal expansion coefficient of the second sublayer,wherein the third sublayer is disposed between the first sublayer and the second sublayer,wherein the first surface of the base layer is made of ceramic,wherein the second surface of the interconnection layer is made of resin insulating material,wherein the first sublayer is made of a first thermosetting resin material and attached to the second surface of the interconnection layer, andwherein the second sublayer is made of a second thermosetting resin material different from the first thermosetting resin material and attached to the first surface of the base layer.
1 Assignment
0 Petitions
Accused Products
Abstract
A substrate is provided for a probe card assembly. The substrate includes an interconnection layer including a first surface having a first electrode set and a second surface having a second electrode set electrically connected to the first electrode set. The substrate further includes a base layer including a first surface having a third electrode set electrically connected to the second electrode set and a second surface having a plurality of contact terminals electrically connected to the third electrode set. And the substrate further includes a resin layer including a plurality of sublayers made of different materials. The resin layer is attached to the first surface of the base layer and the second surface of the interconnection layer.
16 Citations
14 Claims
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1. A substrate for a probe card assembly, comprising:
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an interconnection layer including a first surface having a plurality of first electrode sets and a second surface having a plurality of second electrode sets electrically connected to the plurality of first electrode sets; a base layer including a first surface having a plurality of third electrode sets electrically connected to the plurality of second electrode sets and a second surface having a plurality of contact terminals electrically connected to the plurality of third electrode sets; and a resin layer including a plurality of sublayers made of different materials, the resin layer being attached to the first surface of the base layer and the second surface of the interconnection layer, wherein the resin layer includes a first sublayer, a second sublayer, and a third sublayer, wherein a thermal expansion coefficient of the third sublayer is lower than a thermal expansion coefficient of the first sublayer and a thermal expansion coefficient of the second sublayer, wherein the third sublayer is disposed between the first sublayer and the second sublayer, wherein the first surface of the base layer is made of ceramic, wherein the second surface of the interconnection layer is made of resin insulating material, wherein the first sublayer is made of a first thermosetting resin material and attached to the second surface of the interconnection layer, and wherein the second sublayer is made of a second thermosetting resin material different from the first thermosetting resin material and attached to the first surface of the base layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification