Delta TCC for fast sensitivity model computation
First Claim
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1. A method for determining a difference between a reference image and a further image of a pattern, the method comprising:
- determining a reference imaging function;
determining parameters of a difference function representative of a difference between the reference imaging function and a further imaging function;
calculating a difference between the reference image and the further image of the pattern based on the difference function and the determined parameters; and
determining the further imaging function based upon the reference imaging function and the difference function,wherein the further imaging function is determined by concatenating the reference imaging function and the difference function.
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Abstract
A method for determining a difference between a reference image and a further image of a pattern, the method including determining a reference imaging function; determining parameters of a difference function representative of a difference between the reference imaging function and a further imaging function; calculating a difference between the reference image and the further image of the pattern based on the difference function and the determined parameters.
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Citations
18 Claims
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1. A method for determining a difference between a reference image and a further image of a pattern, the method comprising:
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determining a reference imaging function; determining parameters of a difference function representative of a difference between the reference imaging function and a further imaging function; calculating a difference between the reference image and the further image of the pattern based on the difference function and the determined parameters; and determining the further imaging function based upon the reference imaging function and the difference function, wherein the further imaging function is determined by concatenating the reference imaging function and the difference function. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for determining a difference between a reference image and a further image of a pattern, the method comprising:
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determining a reference imaging function associated with a base set of optical settings of a first lithographic apparatus; determining a difference function associated with a difference between a perturbed state of optical settings of a second lithographic apparatus and the base set of optical settings of the first lithographic apparatus; determining a further imaging function based upon the reference imaging function and the difference function; and calculating the difference between the reference image and the further image using the reference imaging function and the further imaging function, wherein the further imaging function is determined by concatenating the reference imaging function and the difference function. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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Specification