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Delta TCC for fast sensitivity model computation

  • US 8,379,991 B2
  • Filed: 11/06/2009
  • Issued: 02/19/2013
  • Est. Priority Date: 11/10/2008
  • Status: Active Grant
First Claim
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1. A method for determining a difference between a reference image and a further image of a pattern, the method comprising:

  • determining a reference imaging function;

    determining parameters of a difference function representative of a difference between the reference imaging function and a further imaging function;

    calculating a difference between the reference image and the further image of the pattern based on the difference function and the determined parameters; and

    determining the further imaging function based upon the reference imaging function and the difference function,wherein the further imaging function is determined by concatenating the reference imaging function and the difference function.

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