Method for adjusting an acceleration sensor
First Claim
1. A method for adjusting an acceleration sensor which has a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor including further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, said method for adjusting comprising:
- applying an essentially equal first excitation voltage to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, and compensating the first deflection in a second step by applying a first compensation voltage to the further second and the further fourth electrodes.
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Abstract
A method for adjusting an acceleration sensor which includes a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor having further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, an essentially equal first excitation voltage being applied to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, the first deflection being compensated in a second step by applying a first compensation voltage to the further second and further fourth electrodes.
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Citations
17 Claims
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1. A method for adjusting an acceleration sensor which has a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor including further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, said method for adjusting comprising:
applying an essentially equal first excitation voltage to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, and compensating the first deflection in a second step by applying a first compensation voltage to the further second and the further fourth electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
Specification