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Method for adjusting an acceleration sensor

  • US 8,381,570 B2
  • Filed: 11/12/2010
  • Issued: 02/26/2013
  • Est. Priority Date: 11/23/2009
  • Status: Active Grant
First Claim
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1. A method for adjusting an acceleration sensor which has a substrate and a seismic mass, the acceleration sensor having first and further first electrodes attached to the substrate on a first side, counter-electrodes of the seismic mass being situated between the first and further first electrodes, the acceleration sensor including further second electrodes on a second side and further fourth electrodes on a fourth side opposite the second side, said method for adjusting comprising:

  • applying an essentially equal first excitation voltage to the first and further first electrodes in a first step for exciting a first deflection of the seismic mass along a first direction, and compensating the first deflection in a second step by applying a first compensation voltage to the further second and the further fourth electrodes.

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