Apparatus for dressing a polishing pad, chemical mechanical polishing apparatus and method
First Claim
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1. An apparatus for dressing a polishing pad, said apparatus comprising:
- a dresser drive shaft which is rotatable and vertically movable;
an upper dresser flange coupled to said dresser drive shaft;
a lower dresser flange to which a dressing member is secured; and
a spherical bearing provided between said upper dresser flange and said lower dresser flange, and configured to transmit thrust load from said dresser drive shaft to said lower dresser flange and said dressing member while allowing said dressing member to tilt with respect to said dresser drive shaft,wherein said upper dresser flange is shaped to serve as a flat spring configured to generate a force against a tilting motion of said dressing member.
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Abstract
An apparatus dresses a polishing pad. The apparatus includes a dresser drive shaft which is rotatable and vertically movable, a dresser flange coupled to the dresser drive shaft and configured to secure a dressing member thereto, a spherical bearing provided in the dresser flange and configured to allow the dressing member to tilt with respect to the dresser drive shaft, and a spring mechanism configured to generate a force against a tilting motion of the dressing member.
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Citations
10 Claims
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1. An apparatus for dressing a polishing pad, said apparatus comprising:
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a dresser drive shaft which is rotatable and vertically movable; an upper dresser flange coupled to said dresser drive shaft; a lower dresser flange to which a dressing member is secured; and a spherical bearing provided between said upper dresser flange and said lower dresser flange, and configured to transmit thrust load from said dresser drive shaft to said lower dresser flange and said dressing member while allowing said dressing member to tilt with respect to said dresser drive shaft, wherein said upper dresser flange is shaped to serve as a flat spring configured to generate a force against a tilting motion of said dressing member. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification