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Method and apparatus for the selective separation of two layers of material using an ultrashort pulse source of electromagnetic radiation

  • US 8,382,943 B2
  • Filed: 10/23/2009
  • Issued: 02/26/2013
  • Est. Priority Date: 10/23/2009
  • Status: Expired due to Fees
First Claim
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1. A method of separating two layers of material on a substrate in at least a portion of an interface between them comprising:

  • thinning at least a portion of one of the layers of material on the substrate by ablation with electromagnetic radiation; and

    directing an evanescent wave of electromagnetic radiation into the interface.

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