MEMS safety valve for batteries
First Claim
1. A battery, comprising:
- a battery case having a hole;
a battery cell in the battery case, the battery cell comprising an anode and a cathode in an electrolyte;
a battery terminal;
a micro-electro-mechanical system (MEMS) safety valve mounted to the battery case over the hole, the MEMS safety valve comprising;
a silicon spacer defining an opening;
a silicon membrane layer forming a diaphragm opposite the opening and a stationary perimeter mounted above the silicon spacer; and
a silicon electrode layer comprising a movable electrode mounted above the diaphragm, a stationary electrode mounted above the stationary perimeter, and one or more links connecting the movable and the stationary electrodes; and
wherein the stationary electrode, the links, and the movable electrode form part of an electrical path between the battery cell and the battery terminal, the links break to open the electrical path between the battery cell and the battery terminal when the pressure in the battery case pushes the diaphragm and the links past a first limit, and the diaphragm breaks to release fluid from the battery case when the pressure in the battery case pushes the diaphragm past a second limit.
1 Assignment
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Accused Products
Abstract
A battery has a battery case with a hole, and a micro-electro-mechanical system (MEMS) safety valve mounted to the battery case over the hole. The MEMS safety valve includes a silicon diaphragm and a silicon electrode layer with a movable electrode mounted above the diaphragm, a stationary electrode around the movable electrode, and one or more links electrically connecting the movable and the stationary electrodes. The stationary electrode, the links, and the movable electrode form part of an electrical path between one or more battery cells and a battery terminal. The links break to open the electrical path when the pressure in the battery case pushes the diaphragm and the links past a first limit. The diaphragm breaks to release fluid from the battery case when the pressure pushes the diaphragm past a second limit. The first limit may be smaller, larger, or the same as the second limit.
7 Citations
10 Claims
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1. A battery, comprising:
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a battery case having a hole; a battery cell in the battery case, the battery cell comprising an anode and a cathode in an electrolyte; a battery terminal; a micro-electro-mechanical system (MEMS) safety valve mounted to the battery case over the hole, the MEMS safety valve comprising; a silicon spacer defining an opening; a silicon membrane layer forming a diaphragm opposite the opening and a stationary perimeter mounted above the silicon spacer; and a silicon electrode layer comprising a movable electrode mounted above the diaphragm, a stationary electrode mounted above the stationary perimeter, and one or more links connecting the movable and the stationary electrodes; and wherein the stationary electrode, the links, and the movable electrode form part of an electrical path between the battery cell and the battery terminal, the links break to open the electrical path between the battery cell and the battery terminal when the pressure in the battery case pushes the diaphragm and the links past a first limit, and the diaphragm breaks to release fluid from the battery case when the pressure in the battery case pushes the diaphragm past a second limit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification