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MEMS safety valve for batteries

  • US 8,383,256 B1
  • Filed: 11/06/2009
  • Issued: 02/26/2013
  • Est. Priority Date: 11/06/2009
  • Status: Active Grant
First Claim
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1. A battery, comprising:

  • a battery case having a hole;

    a battery cell in the battery case, the battery cell comprising an anode and a cathode in an electrolyte;

    a battery terminal;

    a micro-electro-mechanical system (MEMS) safety valve mounted to the battery case over the hole, the MEMS safety valve comprising;

    a silicon spacer defining an opening;

    a silicon membrane layer forming a diaphragm opposite the opening and a stationary perimeter mounted above the silicon spacer; and

    a silicon electrode layer comprising a movable electrode mounted above the diaphragm, a stationary electrode mounted above the stationary perimeter, and one or more links connecting the movable and the stationary electrodes; and

    wherein the stationary electrode, the links, and the movable electrode form part of an electrical path between the battery cell and the battery terminal, the links break to open the electrical path between the battery cell and the battery terminal when the pressure in the battery case pushes the diaphragm and the links past a first limit, and the diaphragm breaks to release fluid from the battery case when the pressure in the battery case pushes the diaphragm past a second limit.

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