Battery cell for MEMS device and related methods
First Claim
1. A micro electrical-mechanical systems (MEMS) device comprising:
- a substrate;
at least one MEMS structure on said substrate; and
at least one battery cell on said substrate coupled to said at least one MEMS structure and comprising a support fin extending vertically upward from said substrate and having has a height greater than a width, a first electrode layer on said support fin, an electrolyte layer on said first electrode layer, and a second electrode layer on said electrolyte layer.
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Abstract
A micro electrical-mechanical systems (MEMS) device INCLUDES a MEMS substrate and at least one MEMS structure on the MEMS substrate. In addition, there is at least one battery cell on the MEMS substrate coupled to the at least one MEMS structure. The at least one battery cell includes a support fin extending vertically upward from the MEMS substrate and a first electrode layer on the support fin. In addition, there is an electrolyte layer on the cathode layer, and a second electrode layer on the electrolyte layer. The support fin may have a height greater than a width. The first electrode layer may have a processing temperature associated therewith that exceeds a stability temperature associated with the second electrode layer.
16 Citations
26 Claims
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1. A micro electrical-mechanical systems (MEMS) device comprising:
- a substrate;
at least one MEMS structure on said substrate; and
at least one battery cell on said substrate coupled to said at least one MEMS structure and comprising a support fin extending vertically upward from said substrate and having has a height greater than a width, a first electrode layer on said support fin, an electrolyte layer on said first electrode layer, and a second electrode layer on said electrolyte layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 25)
- a substrate;
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14. A micro electrical-mechanical systems (MEMS) device comprising:
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a substrate; at least one MEMS structure on said substrate; a plurality of battery cells on said substrate coupled to said at least one HEMS structure, each comprising a support fin extending vertically upward from said substrate and having a height greater than a width, a first electrode layer on said support fin, an electrolyte layer on said first electrode layer, and a second electrode layer on said electrolyte layer; and a pattern of electrically conductive traces coupling said plurality of battery cells in series. - View Dependent Claims (15, 16, 17)
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18. A method of making a micro electrical-mechanical systems (MEMS) device comprising:
- forming at least one MEMS structure on a substrate; and
forming at least one battery cell on the substrate to be coupled to the at least one MEMS structure by at least forming a support fin extending vertically upward from the substrate and having a height greater than a width, forming a first electrode layer on the support fin, forming an electrolyte layer on the first electrode layer, and forming a second electrode layer on the electrolyte layer. - View Dependent Claims (19, 20, 21, 22, 23, 24, 26)
- forming at least one MEMS structure on a substrate; and
Specification