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MEMS switch and method of manufacturing the MEMS switch

  • US 8,390,173 B2
  • Filed: 03/30/2009
  • Issued: 03/05/2013
  • Est. Priority Date: 03/31/2008
  • Status: Expired due to Fees
First Claim
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1. A MEMS switch comprising:

  • a substrate having an upper surface;

    a pair of signal wires having fixed contacts respectively, said signal wires being located in an upper side of said substrate;

    a movable plate being located in an upper side of said substrate, said movable plate having a movable contact, said movable contact corresponding to said fixed contacts;

    a support member having flexibility, said support member being configured to support said movable plate to be movable upward and downward relative to said substratea static actuator being configured to develop an electrostatic force for displacing said movable plate along a thickness direction of said substrate in order to allow said movable contact to come into contact with said fixed contacts;

    a piezoelectric actuator being configured to develop stress for displacing said movable plate in the thickness direction of said substrate in order to allow said movable contact to come into contact with said fixed contacts,whereinsaid static actuator comprises a pair of static movable electrode plates and a pair of static fixed electrode plates, said static movable electrode plates being disposed on said movable plate, said static fixed electrode plates being disposed in an opposed relation to said static movable electrode plates,said piezoelectric actuator comprising a piezoelectric element having a piezoelectric layer, a first electrode, and a second electrode, said first electrode being disposed on one surface of said piezoelectric layer and said second electrode being disposed on the other surface of said piezoelectric layer, said piezoelectric element being configured to be deformed when voltage is applied between said first electrode and said second electrode, thereby developing said stress,said movable plate having a length and a width, said movable plate is provided at its lengthwise center with said movable contact, said movable plate is provided at its both lengthwise ends with movable electrode holding portions, said static movable electrode plates being disposed on said movable electrode holding portions respectively,said support member comprising four strips, each said strips having the flexibility, said strips being disposed at portions being located at outsides of both width ends of said movable plate and being located at outsides of said movable electrode holding portions,said strips being arranged along a lengthwise direction of said movable plate, each said strip being provided with a first end and a second end, said first end is located at a longitudinal center of the substrate, said second end is opposite of said first end, each said first end being coupled to said movable plate through a coupling plate, said second end being coupled to said substrate,each said piezoelectric element being disposed on an upper surface of each said strip, whereby each said piezoelectric element being located in an outside of the both width ends of said movable plate,said piezoelectric elements applies the stress to coupling portions, defined by said coupling plate, between said strip and said movable plate when said piezoelectric element develops the stress.

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