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MEMS spectrometer and sensing systems therefrom

  • US 8,390,806 B1
  • Filed: 05/21/2010
  • Issued: 03/05/2013
  • Est. Priority Date: 05/21/2009
  • Status: Active Grant
First Claim
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1. A MEMS spectrometer, comprising:

  • an optical substrate having a first planar face and a second planar face parallel throughout to said first planar face;

    a first semiconductor comprising substrate attached to said first planar face having a slit for passing incident light to said optical substrate, and at least one integrated reflective grating, and at least one integrated detector array, anda second semiconductor comprising substrate attached to said second planar face, including at least a first integrated mirror and a second integrated mirror thereon,wherein said first integrated mirror is positioned to receive said incident light transmitted by said optical substrate and provide reflected light, and said integrated reflective grating, said second integrated mirror and said integrated detector array are positioned so that they are optically coupled to one another by said optical substrate to process said reflected light.

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