System and method for false-color sensing and display

• US 8,390,916 B2
• Filed: 06/29/2010
• Issued: 03/05/2013
• Est. Priority Date: 06/29/2010
• Status: Expired due to Fees

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Sampsell, Jeffrey B.
• Primary Examiner(s): Jones, James
• Application Number:
  US12/826,494
• Publication Number:
  US 20110317245A1
• Time in Patent Office: 980 Days
• Field of Search: 359/290, 359/291
• US Class Current: 359/290
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G01L 13/025 using diaphragms
• CPC Class Codes: G01L 9/0079 with Fabry-Perot arrangements
• CPC Class Codes: G01P 15/093 by photoelectric pick-up

Abstract

A system and method for determining humidity based on determination of an offset voltage shift are disclosed. In one embodiment, a system for determining humidity comprises an electromechanical device comprising a first layer, a second layer, and a dielectric between the two layers, wherein the dielectric is spaced apart from at least one of the first and second layers in an unactuated state of the electromechanical device, and wherein the dielectric contacts both the first and second layers in an actuated state of the electromechanical device, a voltage source configured to apply, between the first and second layers, one or more voltages, and a processor configured to control the voltage source, to determine an offset voltage shift based on the applied voltages, and to determine information regarding humidity about the device based on the offset voltage shift.

Claims

1. A sensor, comprising:

a substrate;

a hermetically sealed cell formed on the substrate, wherein the hermetically sealed cell is at least partially defined by a first layer which is at least partially reflective and a second layer which is at least partially reflective and is positioned apart from the first layer and substantially parallel to the first layer; and

a backplate, wherein the substrate and the backplate are part of a non-hermetically sealed package housing the hermetically sealed cell,

the hermetically sealed cell organized into an array of hermetically sealed cells, each cell at least partially defined by a first layer which is at least partially reflective and a second layer which is at least partially reflective and is positioned apart from the first layer and substantially parallel to the first layer.

2. The sensor of claim 1, wherein the cell reflects a wavelength of light which is based on the pressure about the cell.

3. The sensor of claim 1, wherein the second layer moves towards or away from the first layer based on the pressure about the cell.

4. The sensor of claim 1, wherein the first layer and second layer are connected via an adjustable spacer, wherein adjusting the size of spacer increases or decreases an internal pressure of the cell.

5. The sensor of claim 1, further comprising an adjacent hermetically sealed cell at least partially defined by the second layer and a third layer which is at least partially reflective and is positioned apart from the second layer.

6. The sensor of claim 1, wherein the first layer and second layer are positioned apart by a gap distance so as to interferometrically modulate at least one wavelength of visible light.

7. The sensor of claim 6, wherein the gap distance is less than a millimeter.

8. The sensor of claim 1, further comprising an optical imaging system configured to focus an infrared radiation image onto the first layers of the array.

9. The sensor of claim 8, further comprising one or more thermally conductive heat removal channels.

10. The sensor of claim 8, wherein each cell reflects a wavelength of light which is based on the amount of infrared radiation impinging on the first layer of the cell.

11. The sensor of claim 8, wherein the second layer of each cell moves towards or away from the first layer of the cell based on the amount of infrared radiation impinging on the first layer of the cell.

12. A sensor comprising:

a substrate;

a first layer which is at least partially reflective formed on the substrate;

a second layer which is at least partially reflective and is positioned apart from the first layer and substantially parallel to the first layer; and

a scaling material between the first and second layers, wherein the distance between the first and second layers is dependent on the size of the scaling material, and wherein the size of the scaling material is dependent on the concentration of a particular gas about the sensor.

13. The sensor of claim 12, wherein the sensor reflects a wavelength of light which is based on the concentration of the particular gas about the sensor.

14. The sensor of claim 12, wherein the size of the scaling material is dependent on the concentration of water vapor.

15. The sensor of claim 12, wherein the size of the scaling material is dependent on the concentration of at least one of SO, NO₃, or CO₂.

16. The sensor of claim 12, wherein the scaling material is coupled to the first and second layers.

17. The sensor of claim 12, wherein the distance between the first and second layers is continuously dependent on the size of the scaling material.

18. The sensor of claim 12, further comprising a backplate, wherein the substrate and the backplate are part of a non-hermetically sealed package housing the first layer, second layer, and scaling material.

19. The sensor of claim 12, wherein the first layer and second layer are positioned apart by a gap distance so as to interferometrically modulate at least one wavelength of visible light.

20. A sensor comprising:

a two-dimensional array of modulators, wherein each modulator comprises a first layer which is at least partially reflective and a second layer which is at least partially reflective and spaced apart from the first layer; and

a proof mass attached to the two-dimensional array,

wherein the two-dimensional array reflects light so as to display an image which is based on an acceleration of the sensor.

21. The sensor of claim 20, wherein the two-dimensional array reflects light so as to display an image which is based on an acceleration of the sensor in multiple directions.

22. The sensor of claim 21, wherein the multiple directions comprises at least one of a linear direction or a rotational direction.

23. The sensor of claim 20, wherein the proof mass comprises a plurality of protrusions and wherein each protrusion is attached to one of the first layers.

24. A sensor comprising:

a substrate;

a hermetically sealed cell formed on the substrate, wherein the hermetically sealed cell is at least partially defined by a first layer which is at least partially reflective and a second layer which is at least partially reflective and is positioned apart from the first layer and substantially parallel to the first layer,

wherein the first layer and second layer are connected via an adjustable spacer, and wherein adjusting the size of spacer increases or decreases an internal pressure of the cell.

25. The sensor of claim 24, wherein the cell reflects a wavelength of light which is based on the pressure about the cell.

26. The sensor of claim 24, wherein the second layer moves towards or away from the first layer based on the pressure about the cell.

27. The sensor of claim 24, further comprising an adjacent hermetically sealed cell at least partially defined by the second layer and a third layer which is at least partially reflective and is positioned apart from the second layer.

28. The sensor of claim 24, wherein the first layer and second layer are positioned apart by a gap distance so as to interferometrically modulate at least one wavelength of visible light.

29. The sensor of claim 24, comprising an array of hermetically sealed cells formed on the substrate, wherein each cell is at least partially defined by a first layer which is at least partially reflective and a second layer which is at least partially reflective and is positioned apart from the first layer and substantially parallel to the first layer.

30. A sensor comprising:

a substrate;

an array of hermetically sealed cells formed on the substrate, wherein each cell is at least partially defined by a first layer which is at least partially reflective and a second layer which is at least partially reflective and is positioned apart from the first layer and substantially parallel to the first layer, and

an optical imaging system configured to focus an infrared radiation image onto the first layers of the array.

31. The sensor of claim 30, wherein the first layers and second layers are positioned apart by a gap distance so as to interferometrically modulate at least one wavelength of visible light.

32. The sensor of claim 30, further comprising one or more thermally conductive heat removal channels.

33. The sensor of claim 30, wherein each cell reflects a wavelength of light which is based on the amount of infrared radiation impinging on the first layer of the cell.

34. The sensor of claim 30, wherein the second layer of each cell moves towards or away from the first layer of the cell based on the amount of infrared radiation impinging on the first layer of the cell.

35. A sensor comprising:

a two-dimensional array of modulators, wherein each modulator comprises a first layer which is at least partially reflective and a second layer which is at least partially reflective and spaced apart from the first layer; and

a proof mass attached to the two-dimensional array,

wherein the proof mass comprises a liquid or granular material encased in a case such that the liquid or granular material contacts at least a portion of the array when the sensor accelerates.

36. The sensor of claim 35, wherein the two-dimensional array reflects light so as to display an image which is based on an acceleration of the sensor.

37. The sensor of claim 36, wherein the two-dimensional array reflects light so as to display an image which is based on an acceleration of the sensor in multiple directions.

38. The sensor of claim 37, wherein the multiple directions comprises at least one of a linear direction or a rotational direction.

39. The sensor of claim 35, wherein the proof mass comprises a plurality of protrusions and wherein each protrusion is attached to one of the first layers.