System and method for scanning of probe arrays
First Claim
1. A system for scanning a probe array, the system comprising:
- one or more optical elements configured to direct an excitation beam at a substrate, wherein the substrate includes the probe array;
one or more detectors configured to receive reflections from the substrate generated by the excitation beam;
an auto-focuser configured to adjust a distance between the one or more optical elements and the probe array based on a determination of a best plane of focus, wherein the auto-focuser is configured to determine the best plane of focus based on the reflections, and wherein the best plane of focus comprises the distance at which the excitation beam produces a minimum spot size on the substrate.
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Abstract
An embodiment of a scanning system is described including optical elements that direct an excitation beam at a probe array, detectors that receive reflected intensity data responsive to the excitation beam, where the reflected intensity data is responsive to a focusing distance between an optical element and the probe array, a transport frame that adjusts the focusing distance in a direction with respect to the probe array, an auto-focuser that determines a best plane of focus based upon characteristics of the reflected intensity data of at least two focusing distances where the detectors further receive pixel intensity values based upon detected emissions from a plurality of probe features disposed on the probe array at the best plane of focus, and an image generator that associates each of the pixel intensity values with at least one image pixel position of a probe array based upon one or more position correction values.
142 Citations
18 Claims
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1. A system for scanning a probe array, the system comprising:
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one or more optical elements configured to direct an excitation beam at a substrate, wherein the substrate includes the probe array; one or more detectors configured to receive reflections from the substrate generated by the excitation beam; an auto-focuser configured to adjust a distance between the one or more optical elements and the probe array based on a determination of a best plane of focus, wherein the auto-focuser is configured to determine the best plane of focus based on the reflections, and wherein the best plane of focus comprises the distance at which the excitation beam produces a minimum spot size on the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for scanning a probe array, the method comprising:
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illuminating a substrate with an excitation beam produced by one or more optical elements of a scanning system, wherein the substrate includes a probe array; detecting reflections from the substrate generated by the excitation beam; adjusting a distance between the one or more optical elements and the probe array based on a determination of a best plane of focus, wherein the best plane of focus is based on the reflections, and wherein the best plane of focus comprises the distance at which the excitation beam produces a minimum spot size on the substrate. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification