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System and method for scanning of probe arrays

  • US 8,391,582 B2
  • Filed: 05/25/2012
  • Issued: 03/05/2013
  • Est. Priority Date: 03/15/2002
  • Status: Expired due to Term
First Claim
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1. A system for scanning a probe array, the system comprising:

  • one or more optical elements configured to direct an excitation beam at a substrate, wherein the substrate includes the probe array;

    one or more detectors configured to receive reflections from the substrate generated by the excitation beam;

    an auto-focuser configured to adjust a distance between the one or more optical elements and the probe array based on a determination of a best plane of focus, wherein the auto-focuser is configured to determine the best plane of focus based on the reflections, and wherein the best plane of focus comprises the distance at which the excitation beam produces a minimum spot size on the substrate.

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