Sensor

• US 8,393,211 B2
• Filed: 04/16/2008
• Issued: 03/12/2013
• Est. Priority Date: 04/27/2007
• Status: Expired due to Fees

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Kandori, Atsushi, Majima, Masao, Nagae, Kenichi
• Primary Examiner(s): CHAPMAN JR, JOHN E
• Application Number:
  US12/104,356
• Publication Number:
  US 20080264167A1
• Time in Patent Office: 1,791 Days
• Field of Search: 735/041.2, 735/143.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/097 by vibratory elements

Abstract

A sensor includes a detecting oscillator supported in such a manner that the detecting oscillator is allowed to oscillate; first and second electrodes; a detecting electrode facing the first and second electrodes; and signal supplying units configured to supply first and second AC signals respectively to the first and second electrodes. Either the first and second electrodes or the detecting electrode is provided on the detecting oscillator. The first and second AC signals respectively supplied to the first and second electrodes by the signal supplying units cause the detecting oscillator to be maintained at a neutral position for detection without being displaced when no physical quantity is input. When the detecting oscillator is displaced, an input physical quantity is detected on the basis of a signal corresponding to charges induced at the detecting electrode by the first and second AC signals supplied respectively to the first and second electrodes.

Claims

1. An angular velocity sensor comprising:

a reference oscillator;

a reference oscillation generating unit configured to cause the reference oscillator to generate reference oscillation;

a detecting oscillator supported by the reference oscillator in such a manner that the detecting oscillator is able to rotationally oscillate about a first rotation axis;

first and second electrodes configured to receive application of alternating-current signals, wherein the first and second electrodes are provided on the reference oscillator;

a first detecting electrode facing the first and second electrodes, wherein the first detecting electrode is provided on the detecting oscillator;

third and fourth electrodes;

a second detecting electrode facing the third and fourth electrodes; and

a signal supplying unit configured to supply first and second alternating-current signals respectively to the first and second electrodes,

wherein the reference oscillation generating unit causes the reference oscillator to rotationally oscillate about a second rotation axis,

wherein the reference oscillation generating unit, the first and second electrodes and the first detecting electrode are electrically separated from each other,

wherein the first and second alternating-current signals respectively supplied to the first and second electrodes cause the detecting oscillator to be maintained at a neutral position for detection without being displaced when no angular velocity is input, and when the detecting oscillator is displaced, an input angular velocity is detected on the basis of a signal corresponding to charges induced at the first detecting electrode by the first and second alternating-current signals supplied respectively to the first and second electrodes,

wherein the first and third electrodes are disposed plane-symmetrically with respect to the detecting oscillator, and the second and fourth electrodes are disposed plane-symmetrically with respect to the detecting oscillator,

wherein the signal supplying unit further supplies the second alternating-current signal to the third electrode and the first alternating-current signal to the fourth electrode, and

wherein when the detecting oscillator is displaced, the physical quantity is detected on the basis of the signal corresponding to the charges induced at the first detecting electrode by the first and second alternating-current signals supplied respectively to the first and second electrodes and on the basis of a signal corresponding to charges induced at the second detecting electrode by the first and second alternating-current signals supplied respectively to the fourth and third electrodes.

2. The angular velocity sensor according to claim 1, further comprising an amount-of-charges measurement unit configured to assign a reference potential to the first detecting electrode and to detect the angular velocity on the basis of the signal corresponding to the induced charges, wherein the first and second alternating-current signals are alternating-current signals that alternate with reference to the reference potential and that have a same frequency and mutually opposite phases.

3. The angular velocity sensor according to claim 1, wherein the first detecting electrode is formed of segments individually corresponding to the first and second electrodes.

4. The angular velocity sensor according to claim 1, wherein the first detecting electrode is formed within a portion of the detecting oscillator, the portion of the detecting oscillator being insulated by an insulator from another portion of the detecting oscillator.

5. The angular velocity sensor according to claim 1, further comprising an electrostatic shield provided between the first and second electrodes.