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Semiconductor device and method of forming the same

  • US 8,395,197 B2
  • Filed: 12/06/2010
  • Issued: 03/12/2013
  • Est. Priority Date: 12/15/2009
  • Status: Expired due to Fees
First Claim
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1. A semiconductor device comprising:

  • a semiconductor substrate;

    a gate insulating film formed on a surface of the semiconductor substrate;

    a gate electrode formed on the gate insulating film;

    a first sidewall insulating film formed on a side surface of the gate electrode; and

    source and drain regions, each of the source and drain regions comprising;

    a pocket diffusion layer of a first conductivity type in the semiconductor device;

    a first diffusion layer of a second conductivity type extending over the pocket diffusion layer, and the first diffusion layer facing toward the gate electrode through the first sidewall insulating film; and

    a second diffusion layer of the second conductivity type being higher in impurity concentration than the first diffusion layer, the second diffusion layer extending over the first diffusion layer, the second diffusion layer being separated by the first diffusion layer from the pocket diffusion layer, the second diffusion layer having a side surface which faces toward the first sidewall insulating film through the first diffusion layer.

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