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Sealed cavity

  • US 8,395,249 B2
  • Filed: 08/01/2011
  • Issued: 03/12/2013
  • Est. Priority Date: 02/22/2008
  • Status: Active Grant
First Claim
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1. A device structure, comprising:

  • a substrate;

    one or more layers coupled to and disposed over the substrate such that a cavity is embedded between the substrate and the one or more layers, the device structure having a first passage that extends from the cavity; and

    material sealing the first passage, wherein the material comprises material that has been removed from one or more of the substrate and the one or more layers and redeposited in the first passage.

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