Exposure apparatus and device manufacturing method
First Claim
1. An exposure apparatus that exposes an object with an energy beam and forms a pattern on the object, the apparatus comprising:
- an exposure apparatus main body that performs exposure of the object; and
a weight reduction device, a part of which is connected to a supported section that includes at least a part of the exposure apparatus main body, and which generates a lifting force to lift the supported section upward by making use of an empty weight of a heavy load, and reduces a weight acting on a supporting section that supports the supported section from below.
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Accused Products
Abstract
While one ends of ropes are respectively tied to a −Y side leg section and a +Y side leg section of a frame caster, the other ends of the ropes hang down in a −Z direction via a plurality of pulleys fixed to the upper sections of frames that are each separated from an apparatus main body, and a weight having a weight corresponding to a half the weight to be reduced is tied to each of the other ends. In this case, even if the apparatus main body oscillates in vertical or lateral directions (normal directions of the pulleys) owing to the action of a vibration isolation table, the position of the weight only vertically moves by rotation of the pulleys, and the reduced amount of the apparatus weight does not vary. Further, since any coil springs are not used, sympathetic vibration with the apparatus main body and the vibration isolation table does not occur, which allows the attenuation characteristics of the vibration isolation table to be improved. Therefore, the exposure apparatus can be increased in size without inducing the cost rise.
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Citations
27 Claims
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1. An exposure apparatus that exposes an object with an energy beam and forms a pattern on the object, the apparatus comprising:
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an exposure apparatus main body that performs exposure of the object; and a weight reduction device, a part of which is connected to a supported section that includes at least a part of the exposure apparatus main body, and which generates a lifting force to lift the supported section upward by making use of an empty weight of a heavy load, and reduces a weight acting on a supporting section that supports the supported section from below. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification