Bias measurement for MEMS gyroscopes and accelerometers

• US 8,397,568 B2
• Filed: 04/24/2007
• Issued: 03/19/2013
• Est. Priority Date: 04/24/2006
• Status: Expired due to Fees

• Current Assignee: Milli Sensor Systems & Actuators, Inc.
• Original Assignee: Milli Sensor Systems & Actuators, Inc.
• Inventors: Cardarelli, Donato
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US11/739,485
• Publication Number:
  US 20120198934A1
• Time in Patent Office: 2,156 Days
• Field of Search: 735/040.3, 735/040.2, 735/040.8, 735/040.9, 735/040.4, 735/10, 735/11, 735/041.2
• US Class Current: 73/504.12
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

A system and method for separating bias instability of MEMS inertial instruments such as gyroscopes or accelerometers from the instrument signal, in which the inertial measurement instrument has an input axis and an output signal, and the bias instability has a frequency. The instrument is rotated about a rotation axis that is orthogonal to the input axis, at a frequency that is greater than the bias instability frequency. The instrument output signal is detected, and demodulated with a phase-sensitive detection method referenced to the instrument rotation.

Claims

1. A MEMS integrated inertial measurement unit (IMU) for a vehicle that has body X and Y axes, comprising:

a) a substrate;

b) at least two, coplanar, inertial measurement instruments, both coupled to the substrate, the inertial measurement instruments comprising a generally planar single degree of freedom (DOF) MEMS gyroscope and a generally planar single DOF MEMS accelerometer, each inertial measurement instrument comprising a planar sensing member, wherein each inertial measurement instrument exhibits a bias instability that has a frequency, and wherein each inertial measurement instrument defines an input axis that is in the plane of the sensing member and is aligned with either the body X axis or the body Y axis;

c) wherein the gyroscope is adapted to sense rotations of the substrate about the gyroscope input axis and is essentially insensitive to rotations about two axes that are each orthogonal to the gyroscope input axis, to accomplish a single DOF gyroscope, the gyroscope having a gyroscope output signal that is related to the rate of rotation about the gyroscope input axis;

d) wherein the accelerometer is adapted to sense accelerations of the substrate along the accelerometer input axis and is essentially insensitive to accelerations about two axes that are each orthogonal to the accelerometer input axis, to accomplish a single DOF accelerometer, the accelerometer having an accelerometer output signal that is related to the rate of acceleration along the accelerometer input axis;

e) a planar platform that carries the substrate and that defines a platform plane that is essentially parallel to the planes of the planar sensing members, such that the input axes of the gyroscope and the accelerometer are essentially parallel to the platform plane;

f) a system that rotates the platform through 360 degrees at a constant rotation rate about a platform rotation axis that is orthogonal to the platform plane, the rotation at a frequency that is greater than the bias instability frequency;

g) a pick-off that is used to measure the rotation angle of the platform and generate a reference waveform; and

h) a phase-sensitive detection system that;

i) mixes the reference waveform with the gyroscope output signal to obtain the rotation rate about the gyroscope input axis;

ii) mixes the reference waveform with the accelerometer output signal to obtain the acceleration rate about the accelerometer input axis;

iii) phase shifts the reference waveform by 90 degrees;

iv) mixes the phase-shifted waveform with the gyroscope output signal to obtain the rotation rate about an axis in the plane of the sensing member and orthogonal to the gyroscope input axis; and

v) mixes the phase-shifted waveform with the accelerometer output signal to obtain the acceleration rate about an axis in the plane of the sensing member and orthogonal to the accelerometer input axis.

2. A bias-stabilized planar MEMS integrated inertial measurement sensor unit for a vehicle that has orthogonal vehicle body X, Y and Z axes, comprising:

a) a planar substrate that defines a substrate plane that is parallel to the body X and Y axes, wherein the substrate plane is orthogonal to a substrate Z axis that is itself parallel to the body Z axis and where the substrate has orthogonal substrate X and Y axes;

b) one or more planar inertial measurement sensors coupled to the substrate, each sensor comprising a planar sensing member that defines a plane that is parallel to the plane of the substrate, wherein each sensor defines an input axis that is in the plane of the sensing member and is aligned with either the substrate X axis or the substrate Y axis;

c) wherein each sensor is adapted to sense either rotations of the substrate about the sensor input axis or accelerations of the substrate along the sensor input axis, wherein each sensor is essentially insensitive to rotations or accelerations about or along two axes that are each orthogonal to the sensor input axis;

d) wherein each sensor has a sensor output signal that is related to either a rotation rate about the sensor input axis or an acceleration along the sensor input axis;

e) a planar platform that carries the substrate and that defines a platform plane that is parallel to the planes of the planar sensing members, such that the input axes of the sensing members are parallel to the platform plane;

f) a system that rotates the platform through 360 degrees at a constant spin rate about a platform rotation axis that is orthogonal to the platform plane;

g) a resolver that is used to measure a rotation angle of the platform relative to the vehicle body Z axis and generate a reference waveform; and

h) a phase-sensitive detection system that for each sensor;

(i) mixes the reference waveform with a sensor output signal to obtain either the rotation rate about the sensor input axis or the acceleration along the sensor input axis;

(ii) aligns the reference waveform with either the vehicle X or Y body axis to obtain either the rotation rate about the body X or Y axis or the acceleration along the body X or Y axis;

(iii) phase shifts the reference waveform by 90 degrees to align with either the vehicle Y or X body axis, to obtain either the rotation rate about the body Y or X axis or acceleration along the body Y or X axis; and

(iv) low pass filters the rotation rate and the acceleration outputs obtained by phase sensitive detection to filter unwanted high frequency instability, at least some of which is caused by the mixing process.

3. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 2 comprising two inertial sensors.

4. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 3 wherein a first sensor is a gyroscope with its input axis in the plane of the substrate and a second sensor is an accelerometer with its input axis in the plane of the substrate, the two sensors making up a first sensing unit.

5. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 4 comprising four inertial sensors.

6. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 5 wherein a third sensor is a gyroscope with its input axis orthogonal to the plane of the substrate, and the fourth sensor is an accelerometer with its input axis orthogonal to the plane of the substrate, the third and fourth sensors making up a second sensing unit.

7. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 6 wherein the third sensor is used to measure the spin rate of the platform and the fourth sensor is used to measure the acceleration of the vehicle along the Z body axis.

8. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 2 wherein each sensor exhibits a bias instability extending from and including DC that occupies a bias instability frequency band, and wherein the platform is spun at a rotation frequency that is greater than the bias instability frequency band.

9. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 2 wherein the reference waveform is either sinusoidal or square shaped at the spin frequency.

10. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 2 wherein the sensors are single degree of freedom designs and are thus insensitive to cross-axis vehicle motion.

11. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 2 further comprising slip rings that are used to provide power to the sensors and to convey signals from the sensors on the platform.

12. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 2 further comprising wireless devices that are used to provide power to the sensors and to convey signals from the platform.

13. A bias-stabilized planar MEMS integrated inertial measurement sensor unit for a vehicle that has orthogonal body X, Y and Z axes, comprising:

a) a planar substrate that defines a substrate plane that is parallel to the body X and Y axes, wherein the substrate plane is orthogonal to a substrate Z axis that is itself parallel to the body Z axis and wherein the substrate has orthogonal substrate X and Y axes;

b) one or more single degree of freedom planar inertial measurement sensors coupled to the substrate, each sensor comprising a planar sensing member that is insensitive to cross-axis vehicle motion and defines a plane that is parallel to the plane of the substrate, wherein each sensor defines an input axis that is in the plane of the sensing member and is aligned with either the substrate X axis or the substrate Y axis;

c) wherein each sensor is adapted to sense either rotations of the substrate about the sensor input axis or accelerations of the substrate along the sensor input axis, wherein each sensor is essentially insensitive to rotations or accelerations about or along two axes that are each orthogonal to the sensor input axis;

d) wherein each sensor has a sensor output signal that is related to either a rotation rate about the sensor input axis or an acceleration along the sensor input axis;

e) a planar platform that carries the substrate and that defines a platform plane that is parallel to the planes of the planar sensing members, such that the input axes of the sensing members are parallel to the platform plane;

f) wherein each sensor exhibits a bias instability extending from and including DC that occupies a bias instability frequency band, and wherein the platform is spun at a rotation frequency that is greater than the bias instability frequency band

g) a system that rotates the platform through 360 degrees at a constant spin rate about a platform rotation axis that is orthogonal to the platform plane;

h) a resolver that is used to measure a rotation angle of the platform relative to the vehicle body Z axis and generate a sinusoidal or square wave reference waveform at the spin frequency; and

i) a phase-sensitive detection system that for each sensor;

(i) mixes the reference waveform with a modulated sensor output signal to obtain either the rotation rate about the sensor input axis or the acceleration along the sensor input axis;

(ii) aligns the reference waveform with either the vehicle X or Y body axis to obtain either the rotation rate about the body X or Y axis or the acceleration along the body X or Y axis;

(iii) phase shifts the reference waveform by 90 degrees to align with either the vehicle Y or X body axis, to obtain either the rotation rate about the body Y or X axis or acceleration along the body Y or X axis; and

(iv) low pass filters the rotation rate and the acceleration outputs obtained by phase sensitive detection, to filter unwanted high frequency instability, at least some of which is caused by the mixing process.

14. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 13 comprising two inertial sensors, wherein a first sensor is a gyroscope with its input axis in the plane of the substrate and a second sensor is an accelerometer with its input axis in the plane of the substrate, the two sensors making up a first sensing unit.

15. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 14 comprising four inertial sensors, wherein a third sensor is a gyroscope with its input axis orthogonal to the plane of the substrate, and the fourth sensor is an accelerometer with its input axis orthogonal to the plane of the substrate, the third and fourth sensors making up a second sensing unit.

16. The bias-stabilized planar MEMS integrated inertial measurement sensor unit of claim 15 wherein the third sensor is used to measure the spin rate of the platform and the fourth sensor is used to measure the acceleration of the vehicle along the Z body axis.