Multi-axial linear and rotational displacement sensor
First Claim
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1. A multiaxial inertial sensor of angular and linear acceleration, the sensor comprising:
- four sensing elements integrated on a planar substrate, each of the sensing elements comprising;
a comb drive in which a capacitance varies based on an applied force, wherein each comb drive comprises comb fingers which are laterally movable and movable deeper into or out of respective slots, the four sensing elements being located at different parts of the planar substrate on both sides of an X axis and a Y axis in the plane of the planar substrate and having the comb fingers oriented in different directions in the plane at a right angle to a direction of comb fingers of either adjacent comb drive, and insulating static fingers disposed between the comb fingers in each comb drive.
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Abstract
A MEMS multiaxial inertial sensor of angular and linear displacements, velocities, or accelerations has four comb drive capacitive sensing elements integrated on a planar substrate, each sensing element having an output responsive to displacement along a Z axis, and responsive to a displacement along X or Y axes. The sensing elements are located at different parts of the substrate on both sides of the X axis and the Y axis, the outputs being suitable for subsequently deriving linear and angular displacements about any of the X, Y or Z axes. Linear or angular movement is determined from combinations of the sensor signals.
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Citations
14 Claims
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1. A multiaxial inertial sensor of angular and linear acceleration, the sensor comprising:
four sensing elements integrated on a planar substrate, each of the sensing elements comprising; a comb drive in which a capacitance varies based on an applied force, wherein each comb drive comprises comb fingers which are laterally movable and movable deeper into or out of respective slots, the four sensing elements being located at different parts of the planar substrate on both sides of an X axis and a Y axis in the plane of the planar substrate and having the comb fingers oriented in different directions in the plane at a right angle to a direction of comb fingers of either adjacent comb drive, and insulating static fingers disposed between the comb fingers in each comb drive. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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