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Compact pressure-sensing device

  • US 8,397,579 B2
  • Filed: 06/03/2009
  • Issued: 03/19/2013
  • Est. Priority Date: 04/08/2005
  • Status: Active Grant
First Claim
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1. A sensing device comprising:

  • a planar substrate characterized by a plane;

    a beam formed on the substrate, the beam being capable of deflecting in the plane of the substrate into a cavity of the substrate in response to different pressures applied to the beam, wherein the beam deflects according to a difference between a first pressure on a first side of the beam inside the cavity and second pressure on a second side of the beam outside the cavity in a space outside the sensing device; and

    a piezo-resistive sensing element coupled to the beam, wherein the piezo-resistive sensing element detects beam deflection responsive to a gas flow outside the cavity adjacent the second side and generates an electrical signal as a function of beam deflection;

    wherein the sensing device has a thickness of less than about 100 μ

    m.

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