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Pattern drawing method and pattern drawing apparatus

  • US 8,398,227 B2
  • Filed: 12/05/2008
  • Issued: 03/19/2013
  • Est. Priority Date: 12/06/2007
  • Status: Active Grant
First Claim
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1. A pattern drawing method for forming a pattern comprising:

  • preheating an impact scheduled region on a substrate on which the pattern is to be formed by using a heating apparatus that is arranged at a position located on an upstream side of an ink jet head which is moved relative to the substrate and which is separated from the substrate;

    forming liquid droplets, by an inkjet method, of a raw material comprising ink and metallic particles, and making the droplets impact on the substrate;

    wherein the heating apparatus is arranged at the position located on the upstream side of the ink jet head so that the substrate is preheated before the droplets are impacted on the substrate, and a distance between a distance between an inkjet liquid droplet impact scheduled position on the substrate and a center position on the substrate, which center position is heated by heating apparatus, is set in a range of 0.5 mm to 50 mm, and a surface temperature at the inkjet liquid droplet impact scheduled position is in a range of 50 to 200°

    C.

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