Harmonic cMUT devices and fabrication methods

• US 8,398,554 B2
• Filed: 11/01/2009
• Issued: 03/19/2013
• Est. Priority Date: 02/27/2004
• Status: Active Grant

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Degertekin, F. Levent
• Primary Examiner(s): Dougherty, Thomas M
• Application Number:
  US12/610,334
• Publication Number:
  US 20100249605A1
• Time in Patent Office: 1,234 Days
• Field of Search: 310/309, 310/312, 310/322, 310/334, 367/163, 367/174, 367/181, 600/437, 600/459, 600/466, 600/467, 600/468
• US Class Current: 600/467
• CPC Class Codes: B06B 1/0292 Electrostatic transducers, e.g. electret-type

Abstract

Harmonic capacitive micromachined ultrasonic transducer (“cMUT”) devices and fabrication methods are provided. In a preferred embodiment, a harmonic cMUT device generally comprises a membrane having a non-uniform mass distribution. A mass load positioned along the membrane can be utilized to alter the mass distribution of the membrane. The mass load can be a part of the membrane and formed of the same material or a different material as the membrane. The mass load can be positioned to correspond with a vibration mode of the membrane, and also to adjust or shift a vibration mode of the membrane. The mass load can also be positioned at predetermined locations along the membrane to control the harmonic vibrations of the membrane. A cMUT can also comprise a cavity defined by the membrane, a first electrode proximate the membrane, and a second electrode proximate a substrate. Other embodiments are also claimed and described.

Claims

1. In a forward or side looking catheter device having a plurality of cMUT arrays for transmitting and receiving ultrasonic energy, the forward looking intravascular device comprising:

a plurality of cMUT arrays being disposed on a substrate in a spaced apart arrangement so that the cMUT arrays are disposed at differing locations,

the plurality of cMUT arrays each comprising a plurality of cMUT elements, wherein at least some of the plurality of cMUT elements comprise a flexible membrane disposed above the membrane and a membrane frequency adjustor for adjusting a vibration mode of the membrane.

2. The forward or side looking device of claim 1, wherein the cMUT arrays are arranged as concentric annular rings on the surface of the substrate.

3. The forward or side looking device of claim 1, wherein the substrate is disc-shaped and the plurality of cMUT arrays are disposed on the surface of the disc-shaped surface.

4. The forward or side looking device of claim 1, wherein the plurality of cMUT arrays comprises a first cMUT array and a second cMUT array, the first cMUT array being disposed proximate the outer periphery of the substrate, and the second cMUT array being in a position different than the first cMUT array.

5. The forward or side looking device of claim 1, wherein the plurality of cMUT elements further comprise one or more electrode elements configured to receive ultrasonic signals for transmission and to receive bias voltages for positioning the membrane for transmission and reception of ultrasonic waves.

6. The forward or side looking device of claim 1, wherein the plurality of cMUT arrays are distributed at different positions on the substrate.

7. The forward or side looking device of claim 1, wherein a portion of the cMUT elements comprise a plurality of mass loads as the frequency membrane adjustor, the mass loads being disposed proximate the membrane.

8. The forward or side looking device of claim 1, wherein the membrane frequency adjustor is an electrode element enveloped in the membrane.

9. The forward or side looking device of claim 1, wherein the membrane and the membrane frequency adjustor are formed from the same material.

10. The forward or side looking device of claim 1, wherein a portion of the cMUT elements are configured to transmit and receive ultrasonic at differing frequencies so that the cMUT arrays are configured to transmit and receive ultrasonic at differing frequencies.

11. A cMUT-based device configured as a forward or side looking intravascular ultrasonic array device that comprises a plurality of cMUT devices, the forward or side looking ultrasonic array device comprising:

a plurality of cMUT devices formed in a plurality of array portions, the array portions being disposed at differing locations of a substrate that carries the cMUT devices; and

at least a portion of the cMUT devices comprising a membrane that defines a cavity situated between the membrane and the substrate, and wherein a mass load is disposed proximate the membrane, the mass load being configured to adapt the membrane to receive energy at a predetermined frequency.

12. The forward or side looking ultrasonic array device of claim 11, wherein the cMUT devices are configured to transmit and receive ultrasonic waves at separate frequency ranges.

13. The forward or side looking ultrasonic array device of claim 11, further comprising integrated electronics associated with the array portions to enable cMUT devices within the array portion to transmit and receive ultrasonic energy.

14. The forward or side looking ultrasonic array device of claim 11, wherein at least a portion of the cMUT devices comprise electrodes configured to enable the array portions to transmit and receive ultrasonic energy at differing frequencies.

15. The forward or side looking ultrasonic array device of claim 14, wherein the electrodes are configured as multiple element electrodes to enable the cMUT devices to transmit and receive ultrasonic energy.