Method for manufacturing polishing pad

• US 8,398,794 B2
• Filed: 11/11/2011
• Issued: 03/19/2013
• Est. Priority Date: 04/19/2006
• Status: Expired due to Fees

• Current Assignee: ROHM and HAAS Electronic Materials CMP Holdings Incorporated (DuPont de Nemours, Inc.)
• Original Assignee: TOYO Tire & Rubber Company Limited (Toyo Tire Corporation)
• Inventors: Fukuda, Takeshi, Watanabe, Tsuguo, Hirose, Junji, Nakamura, Kenji, Doura, Masato
• Primary Examiner(s): TOLIN, MICHAEL A
• Application Number:
  US13/294,811
• Publication Number:
  US 20120108149A1
• Time in Patent Office: 494 Days
• Field of Search: 156/78, 156/246, 156/254, 156/267, 156/289, 156/324, 264/46.2, 451/533, 451/538
• US Class Current: 156/78
• CPC Class Codes: B24B 37/205 provided with a window for inspecting the surface of the work being lapped
• CPC Class Codes: B24B 37/22 characterised by a multi-layered structure
• CPC Class Codes: B24B 37/24 characterised by the composition or properties of the pad materials
• CPC Class Codes: B24B 37/26 characterised by the shape of the lapping pad surface, e.g. grooved
• CPC Class Codes: B24D 11/003 without embedded abrasive particles B24D11/005 takes precedence
• CPC Class Codes: B24D 18/00 Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
• CPC Class Codes: B24D 3/32 for porous or cellular structure
• CPC Class Codes: B29C 44/24 Making multilayered articles
• CPC Class Codes: B29C 44/308 Thickness separators and side seals
• CPC Class Codes: B29C 44/32 Incorporating or moulding on preformed parts, e.g. linings, inserts or reinforcements
• CPC Class Codes: B29C 44/322 the preformed parts being elongated inserts, e.g. cables
• CPC Class Codes: B29C 44/326 Joining the preformed parts, e.g. to make flat or profiled sandwich laminates
• CPC Class Codes: B29C 44/5654 Subdividing foamed articles to obtain particular surface properties, e.g. on multiple modules
• CPC Class Codes: C08J 2375/08 from polyethers
• CPC Class Codes: C08J 9/30 by mixing gases into liquid compositions or plastisols, e.g. frothing with air
• CPC Class Codes: Y10T 156/1052 with cutting, punching, tearing or severing
• CPC Class Codes: Y10T 156/1059 Splitting sheet lamina in plane intermediate of faces

Abstract

A method for manufacturing a polishing pad, which may be laminated, with a small number of manufacturing steps, high productivity and no peeling between a polishing layer and a cushion layer includes preparing a cell-dispersed urethane composition by a mechanical foaming method; continuously discharging the cell-dispersed urethane composition onto a face material, while feeding the face material; laminating another face material on the cell-dispersed urethane composition; curing the cell-dispersed urethane composition, while controlling its thickness to be uniform, so that a polishing layer including a polyurethane foam is formed; cutting the polishing layer parallel to the face into two pieces so that two long polishing layers each including the polishing layer and the face material are simultaneously formed; and cutting the long polishing layers to produce the polishing pad.

Claims

1. A method for manufacturing a polishing pad, comprising the steps of:

preparing a cell-dispersed urethane composition by a mechanical foaming method;

continuously or intermittently discharging a light transmitting region-forming material onto a prescribed site of a face material, while feeding the face material;

continuously discharging said cell-dispersed urethane composition onto a part of said face material where the light transmitting region-forming material is not provided;

laminating another face material on said discharged light transmitting region-forming material and cell-dispersed urethane composition;

curing the light transmitting region-forming material and the cell-dispersed urethane composition, while controlling their thickness to be uniform, so that a long polishing layer comprising a light transmitting region and a polishing region integrated therewith is formed; and

cutting the long polishing layer.

2. The method according to claim 1, wherein said light transmitting region-forming material has a viscosity of 1 to 30 Pa·

s when discharged.

3. The method according to claim 1, wherein said cell-dispersed urethane composition has a viscosity of 1 to 20 Pa·

s when discharged.

4. The method according to claim 1, wherein said light transmitting region comprises a thermosetting resin.

5. The method according to claim 4, wherein said thermosetting resin is a polyurethane resin.

6. A method for manufacturing a laminated polishing pad, comprising the steps of:

preparing a cell-dispersed urethane composition by a mechanical foaming method;

discharging a light transmitting region-forming material such that the material is deposited in and on through holes, while feeding a cushion layer having continuously or intermittently provided through holes;

continuously discharging said cell-dispersed urethane composition onto a part of said cushion layer where the light transmitting region-forming material is not provided;

laminating a face material on the discharged light transmitting region-forming material and cell-dispersed urethane composition;

curing the light transmitting region-forming material and the cell-dispersed urethane composition, while controlling their thickness to be uniform, so that a long laminated sheet comprising a light transmitting region and a polishing region integrated therewith is formed; and

cutting the long laminated sheet.

7. The method according to claim 6, wherein said light transmitting region-forming material has a viscosity of 1 to 30 Pa·

s when discharged.

8. The method according to claim 6, wherein said cell-dispersed urethane composition has a viscosity of 1 to 20 Pa·

s when discharged.

9. The method according to claim 6, wherein said light transmitting region comprises a thermosetting resin.

10. The method according to claim 9, wherein said thermosetting resin is a polyurethane resin.