Method and apparatuses for reducing porogen accumulation from a UV-cure chamber

• US 8,398,816 B1
• Filed: 06/03/2008
• Issued: 03/19/2013
• Est. Priority Date: 03/28/2006
• Status: Active Grant

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Gytri, Lisa, Lee, James, Gordon, Jeff, Balderrama, Carmen, Harris, Joseph Brett
• Primary Examiner(s): CHEN, KEATH T
• Application Number:
  US12/132,559
• Time in Patent Office: 1,750 Days
• Field of Search: 156/345.5, 118/723.VE
• US Class Current: 156/345.5
• CPC Class Codes: B08B 5/02 Cleaning by the force of jets, e.g. blowing-out cavities airguns or nozzles per se B05B1/005
• CPC Class Codes: B08B 7/00 Cleaning by methods not provided for in a single other subclass or a single group in this subclass
• CPC Class Codes: B08B 7/0035 by radiant energy, e.g. UV, laser, light beam or the like
• CPC Class Codes: B08B 7/0057 by ultraviolet radiation
• CPC Class Codes: B08B 7/0071 by heating B08B7/0035 takes precedence
• CPC Class Codes: H01L 21/02041 Cleaning
• CPC Class Codes: H01L 21/02203 the layer being porous
• CPC Class Codes: H01L 21/02348 treatment by exposure to UV light
• CPC Class Codes: H01L 21/223 using diffusion into or out of a solid from or into a gaseous phase H01L21/221 - H01L21/222 take precedence; diffusion through an applied layer H01L21/225
• CPC Class Codes: H01L 21/26 Bombardment with radiation H01L21/3105 takes precedence
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67115 mainly by radiation

Abstract

Porogen accumulation in a UV-cure chamber is reduced by removing outgassed porogen through a heated outlet while purge gas is flowed across a window through which a wafer is exposed to UV light. A purge ring having specific major and minor exhaust to inlet area ratios may be partially made of flame polished quartz to improve flow dynamics. The reduction in porogen accumulation allows more wafers to be processed between chamber cleans, thus improving throughput and cost.

Claims

1. A UV cure chamber, the chamber comprising one or more cure stations, each station comprising:

a. a window having first and second sides;

b. a UV light source mounted the first side of the window;

c. a wafer support exposed to the UV source disposed on the second side of the window;

d. an inlet for injecting a purge gas, the inlet positioned on the wafer support side of the window and configured to direct the purge gas in a direction non-parallel to and toward the second side of the window; and

,

e. an outlet for exhausting the purge gas, the outlet positioned opposite the inlet on the wafer support side of the window;

wherein a major outlet area is a combined sectional surface area perpendicular to the wafer support plane of all features used for exhausting gases;

wherein a major inlet area is a combined inlet sectional surface area of all features that serve as final restrictions on the inlet path of a gas; and

a major outlet to major inlet surface area ratio is greater than 4 for at least one station and wherein a portion of the inlet unbroken by an outlet spans 75% or more of a perimeter around the wafer support.

2. The chamber of claim 1, where in a minor outlet area is a cross sectional area of a primary gas exhaust opening connected to the outlet;

wherein a minor inlet area is the cross sectional area of a primary gas delivery opening connected to the inlet; and

, wherein a minor outlet to minor inlet area ratio is greater than 2.

3. The chamber of claim 1, wherein one or more stations further comprise a heater configured to heat chamber materials around the outlet.

4. The chamber of claim 3, wherein the heater is configured to heat chamber materials around the outlet to at least about 100°

C.

5. The chamber of claim 3, wherein the chamber materials comprise a baffle.

6. The chamber of claim 3, wherein the chamber materials include chamber walls, a baffle, and an exhaust.

7. The chamber of claim 1, wherein the outlet comprises flame polished quartz.

8. The chamber of claim 1, wherein the outlet has a surface polish Ra of between about 4 and 63 angstroms.

9. The chamber of claim 1, wherein the chamber materials surrounding the outlet is coated with a UV absorbing material.

10. The chamber of claim 1, wherein the chamber includes four stations and the outlet to inlet surface area ratio is greater than about 4 for three stations.

11. The chamber of claim 1, further comprising configured to heat the outlet.