Carbon nanotube films, layers, fabrics, ribbons, elements and articles

• US 8,400,053 B2
• Filed: 06/10/2008
• Issued: 03/19/2013
• Est. Priority Date: 07/25/2001
• Status: Expired due to Term

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Ward, Jonathan W., Rueckes, Thomas, Segal, Brent M.
• Primary Examiner(s): Mai, Anh
• Assistant Examiner(s): FEATHERLY, HANA SANEI
• Application Number:
  US12/136,624
• Publication Number:
  US 20090087630A1
• Time in Patent Office: 1,743 Days
• Field of Search: 313495-497, 313309-310
• US Class Current: 313/495
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/16 Memory cell being a nanotube, e.g. suspended nanotube
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 21/76838 characterised by the formation and the after-treatment of the conductors etching for patterning the conductors H01L21/3213
• CPC Class Codes: H10B 69/00 Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
• CPC Class Codes: Y10S 977/724 Devices having flexible or movable element
• CPC Class Codes: Y10S 977/742 Carbon nanotubes, CNTs
• CPC Class Codes: Y10S 977/796 for electrical or electronic purpose
• CPC Class Codes: Y10S 977/856 including etching/cutting
• CPC Class Codes: Y10S 977/888 Shaping or removal of materials, e.g. etching
• CPC Class Codes: Y10S 977/943 Information storage or retrieval using nanostructure
• CPC Class Codes: Y10T 428/24893 including particulate material
• CPC Class Codes: Y10T 428/24917 including metal layer

Abstract

Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles are disclosed. To make various articles, certain embodiments provide a substrate. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. To make a nanofabric, a substrate is provided. Preformed nanotubes are applied to a surface of the substrate to create a non-woven fabric of carbon nanotubes wherein the non-woven fabric is substantially uniform density. The nanofabrics and articles have characteristics desirable for various electrical systems such as memory circuits and conductive traces and pads.

Claims

1. A structure for a nanotube switching device, comprising:

a substrate having a plurality of electrical contacts defined therein, the substrate having an upper surface; and

a non-woven nanotube fabric layer disposed over the upper surface of the substrate.

2. The structure of claim 1, further comprising a photolithographic mask disposed over the nanotube fabric layer, defining a pattern thereon, wherein the photolithographic mask comprises a layer of photoresist disposed over the nanotube fabric layer.

3. The structure of claim 2, wherein the layer of photoresist has been reacted using radiation.

4. The structure of claim 1, wherein the nanotube fabric layer includes at least one of single-walled nanotubes and multi-walled nanotubes.

5. The structure of claim 1, wherein the nanotube fabric layer includes at least one of metallic nanotubes and semiconducting nanotubes.

6. The structure of claim 1, wherein the substrate includes at least one of a via and a plug.

7. The structure of claim 1, wherein the substrate comprises defined regions of sacrificial material and defined support regions.

8. The structure of claim 7, wherein the defined regions of sacrificial material form at least a portion of the upper surface of the substrate.

9. The structure of claim 8, wherein the plurality of electrical contacts form at least a portion of the upper surface of the substrate and wherein regions of sacrificial material define a spacing between regions of the nanotube fabric layer and the electrical contacts.

10. The structure of claim 9, wherein the nanotube fabric layer is partially suspended.

11. The structure of claim 1, wherein the nanotube fabric layer comprises substantially a monolayer of nanotubes.

12. The structure of claim 1, wherein the nanotube fabric layer comprises a multilayer of nanotubes.

13. The structure of claim 1, wherein the nanotube fabric layer has a resistance of less than 1 kΩ

/square.

14. The structure of claim 1, wherein the nanotube fabric layer has a resistance of between 1-1000 kΩ

/square.

15. The structure of claim 1, wherein the nanotube fabric layer has a resistance of between 1-10 MΩ

/square.

16. The structure of claim 1, wherein the nanotube fabric layer comprises carbon nanotubes.

17. A structure for a nanotube switching device, comprising:

a substrate having a plurality of electrical contacts defined below an upper surface of the substrate; and

a patterned region of a non-woven nanotube fabric layer disposed above the upper surface of the substrate and electrically communicable with the plurality of electrical contacts.

18. The structure of claim 17, wherein the patterned region of the non-woven nanotube fabric layer is at least partially suspended.

19. The structure of claim 17, further comprising a photolithographic mask disposed over and substantially aligned with the patterned region of the non-woven nanotube fabric layer.

20. The structure of claim 17, wherein the patterned region of the non-woven nanotube fabric layer comprises substantially a monolayer of nanotubes.

21. The structure of claim 17, wherein the patterned region of the non-woven nanotube fabric layer comprises a multilayer of nanotubes.

22. The structure of claim 17, wherein the non-woven nanotube fabric layer comprises carbon nanotubes.