Pattern formation method and pattern formation apparatus, exposure method and exposure apparatus, and device manufacturing method

• US 8,400,614 B2
• Filed: 06/23/2008
• Issued: 03/19/2013
• Est. Priority Date: 12/28/2005
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shibazaki, Yuichi
• Primary Examiner(s): Kim, Peter B
• Application Number:
  US12/144,226
• Publication Number:
  US 20080291415A1
• Time in Patent Office: 1,730 Days
• Field of Search: 355/53, 355/72, 355/77
• US Class Current: 355/53
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment
• CPC Class Codes: G03F 9/7088 Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Abstract

In a measurement zone that is spaced apart in a Y-axis direction from an exposure zone that is located immediately below a projection unit, a detection area of an alignment system is moved in the Y-axis direction and a plurality of marks are sequentially detected, and therefore a movement distance of wafer stages in the Y-axis direction when performing the mark detection can be decreased compared with the case where only the wafer stages are moved while fixing the alignment system and mark detection is performed as in the conventional cases. Accordingly, a width of the measurement zone in the Y-axis direction can be reduced, which allows the apparatus to be downsized.

Claims

1. A pattern formation method of forming a pattern on an object in a predetermined pattern formation zone, the method comprising:

a mark detection process of, in a mark detection zone that is spaced apart from the pattern formation zone in at least a predetermined direction within a two-dimensional plane, moving a detection area of a mark detection system in at least the predetermined direction and detecting a mark placed on the object, the mark detection system performing mark detection of the mark on the object; and

a pattern formation process of moving the object in the pattern formation zone based on a mark detection result in the mark detection process and forming a pattern on the object, wherein

in the mark detection process, the detection area of the mark detection system is moved in the predetermined direction.

2. The pattern formation method according to claim 1, wherein

the movement of the object is performed by movement of a movable body that holds the object.

3. The pattern formation method according to claim 2, wherein

two of the movable bodies are used, and

in parallel with the mark detection process being performed to an object held by one of the movable bodies, the pattern formation process is performed to an object held by the other of the movable bodies.

4. The pattern formation method according to claim 2, wherein two of the movable bodies are used, and also the mark detection zone includes a first mark detection zone that is spaced apart from the pattern formation zone to at least one side of the predetermined direction and a second mark detection zone that is spaced apart from the pattern formation zone to at least the other side of the predetermined direction,

in parallel with the mark detection process being performed to an object held by one of the movable bodies in the first mark detection zone, the pattern formation process is performed to an object held by the other of the movable bodies in the pattern formation zone, and

in parallel with the mark detection process being performed to an object held by the other of the movable bodies in the second mark detection zone, the pattern formation process is performed to an object held by the one of the movable bodies in the pattern formation zone.

5. The pattern formation method according to claim 4, further comprising:

a movement process of moving at least part of the mark detection system between the first and second mark detection zones, the movement process being performed between a mark detection process in one of the mark detection zones and a mark detection process in the other of the mark detection zones.

6. The pattern formation method according to claim 1, wherein

the mark detection process includes:

detecting a mark on the object by the mark detection system before the movement of the detection area; and

detecting another mark whose position is different from the detected mark in the predetermined direction on the object by the mark detection system after the movement of the detection area.

7. The pattern formation method according to claim 1, wherein

in the mark detection process, the object is moved in a direction intersecting the predetermined direction.

8. The pattern formation method according to claim 1, wherein

in the pattern formation process, a pattern is formed by exposing the object.

9. A device manufacturing method, including

a process of forming a pattern on an object using the pattern formation method according to claim 1.

10. An exposure method of exposing an object, the method comprising:

detecting a mark on the object by a mark detection system, in a measurement zone whose position in at least a first direction is different from an exposure zone where exposure of the object is performed;

moving a detection area of the mark detection system in the first direction;

detecting another mark whose position is different from the detected mark in the first direction on the object by the mark detection system of which the detection area has been moved; and

moving the object in the exposure zone using a detection result of the marks, wherein

a plurality of marks that include marks whose positions are different in the first direction on the object are detected by the mark detection system.

11. The exposure method according to claim 10, wherein

the plurality of marks include marks whose positions are different in a second direction orthogonal to the first direction on the object, and the object is moved in the second direction in order to detect the marks whose positions are different in the second direction in the measurement zone.

12. The exposure method according to claim 10, wherein

during exposure of the object in the exposure zone, a plurality of marks on an object that is to be exposed next are detected in the measurement zone.

13. The exposure method according to claim 10, wherein

the measurement zone is respectively placed on both sides of the exposure zone in the first direction, and an object to which the detection of the marks has been performed in each of the two measurement zones is alternately carried in the exposure zone.

14. The exposure method according to claim 10, wherein

information on a surface shape of the object is detected in the measurement zone.

15. A device manufacturing method, including:

a process of forming a pattern on a sensitive object using the exposure method according to claim 10.

16. An exposure method of exposing an object, the method comprising:

detecting a plurality of marks on the object by a mark detection system that has a plurality of detection areas whose positions are different in a first direction, in a measurement zone whose position in at least the first direction is different from an exposure zone where exposure of the object is performed; and

moving the object in the exposure zone using a detection result of the marks, wherein

the plurality of marks include marks whose positions are different in a second direction orthogonal to the first direction on the object, and the object is moved in the second direction in order to detect the marks whose positions are different in the second direction in the measurement zone.

17. The exposure method according to claim 16, wherein

prior to the detection of the marks, a position in the first direction of at least one of the plurality of detection areas is adjusted in accordance with alignment information of the plurality of marks.

18. The exposure method according to claim 16, wherein

marks whose positions are different in the first direction on the object are substantially simultaneously detected by the mark detection system.

19. The exposure method according to claim 16, wherein

during exposure of the object in the exposure zone, a plurality of marks on an object that is to be exposed next are detected in the measurement zone.

20. The exposure method according to claim 16, wherein

the measurement zone is respectively placed on both sides of the exposure zone in the first direction, and an object to which the detection of the marks has been performed in each of the two measurement zones is alternately carried in the exposure zone.

21. The exposure method according to claim 16, wherein

information on a surface shape of the object is detected in the measurement zone.

22. A device manufacturing method, including:

a process of forming a pattern on a sensitive object using the exposure method according to claim 16.

23. A pattern formation apparatus that forms a pattern on an object in a predetermined pattern formation zone, the apparatus comprising:

a movable body that moves holding the object;

a mark detection system that detects a plurality of marks on the object in a mark detection zone that is spaced apart from the pattern formation zone in at least a predetermined direction within a two-dimensional plane; and

a controller that moves a detection area of the mark detection system in at least the predetermined direction and sequentially detects the plurality of marks, and moves the movable body in the pattern formation zone based on a result of the detection and forms a pattern on the object, wherein

the mark detection by the mark detection system is performed before the movement of the detection area and after the movement of the detection area.

24. The pattern formation apparatus according to claim 23, wherein

two of the movable bodies are provided, and

the controller, in parallel with forming a pattern on the object at one of the movable bodies, detects the marks on the object at the other of the movable bodies.

25. The pattern formation apparatus according to claim 23, wherein

two of the movable bodies are provided, and also the mark detection zone includes a first mark detection zone that is spaced apart from the pattern formation zone to at least one side of the predetermined direction and a second mark detection zone that is spaced apart from the pattern formation zone to at least the other side of the predetermined direction, which correspond to the two movable bodies respectively, and

the controller

in parallel with performing the mark detection at the one of the movable bodies in the first mark detection zone, forms a pattern on the object at the other of the movable bodies in the pattern formation zone, and

in parallel with performing the mark detection at the other of the movable bodies in the second mark detection zone, forms a pattern on the object at the one of the movable bodies in the pattern formation zone.

26. The pattern formation apparatus according to claim 25, wherein

the controller moves at least part of the mark detection system between the first and second mark detection zones, between when the mark detection is performed in one of the mark detection zones and when the mark detection is performed in the other of the mark detection zones.

27. The pattern formation apparatus according to claim 23, wherein

the mark detection system has a light source and an optical system, and

the controller moves the optical system of the mark detection system between the first and second mark detection zones, between when the mark detection is performed in one of the mark detection zones and when the mark detection is performed in the other of the mark detection zones.

28. The pattern formation apparatus according to claim 27, wherein

the light source of the mark detection system includes a first light source arranged on a side of one of the mark detection zones and a second light source arranged on a side of the other of the mark detection zones, and

the controller performs the mark detection using any one of the first and second light sources, depending on which mark detection zone the optical system of the mark detection system is located in.

29. The pattern formation apparatus according to claim 23, further comprising:

a position measurement device that measures a position of the detection area of the mark detection system.

30. The pattern formation apparatus according to claim 29, wherein

the position measurement device includes an interferometer.

31. An exposure apparatus that exposes an object, the apparatus comprising:

a movable body that moves holding the object;

a mark detection system that detects a plurality of marks on the object in a measurement zone whose position in at least a first direction is different from an exposure zone where exposure of the object is performed; and

a controller that moves a detection area of the mark detection system in the first direction and detects the plurality of marks on the object using the mark detection system, and also controls movement of the movable body holding the object in the exposure zone using a detection result of the marks by the mark detection system, wherein

the mark detection by the mark detection system is performed before the movement of the detection area and after the movement of the detection area.

32. The exposure apparatus according to claim 31, wherein

the plurality of marks include marks whose positions are different in a second direction orthogonal to the first direction on the object, and

the controller moves the movable body holding the object in the second direction in order to detect the marks whose positions are different in the second direction using the mark detection system in the measurement zone.

33. The exposure apparatus according to claim 31, wherein

during exposure of the object in the exposure zone, the controller detects a plurality of marks on an object that is to be exposed next using the mark detection system in the measurement zone.

34. The exposure apparatus according to claim 31, wherein

two of the movable bodies are provided, and also the measurement zone is respectively placed on both sides of the exposure zone in the first direction, and

the controller controls movement of the two movable bodies so that an object to which the detection of the marks has been performed in each of the two measurement zones is alternately carried in the exposure zone.

35. The exposure apparatus according to claim 31, further comprising:

a detection device that detects information on a surface shape of the object in the measurement zone.

36. An exposure apparatus that exposes an object, the apparatus comprising:

a movable body that moves holding the object;

a mark detection system that has a plurality of detection areas whose positions are different in a first direction and detects a plurality of marks on the object in a measurement zone whose position in at least the first direction is different from an exposure zone where exposure of the object is performed; and

a controller that controls movement of the movable body holding the object in the exposure zone using a detection result of the marks, wherein

the plurality of marks include marks whose positions are different in a second direction orthogonal to the first direction on the object, and

the controller moves the movable body holding the object in the second direction in order to detect the marks whose positions are different in the second direction using the mark detection system in the measurement zone.

37. The exposure apparatus according to claim 36, further comprising:

an adjustment device that adjusts a position in the first direction of at least one of the plurality of detection areas in accordance with alignment information of the plurality of marks, prior to the detection of the marks.

38. The exposure apparatus according to claim 36, wherein

the mark detection system is capable of substantially simultaneously detecting marks whose positions are different in the first direction on the object.

39. The exposure apparatus according to claim 36, wherein

during exposure of the object in the exposure zone, the controller detects a plurality of marks on an object that is to be exposed next using the mark detection system in the measurement zone.

40. The exposure apparatus according to claim 36, wherein

two of the movable bodies are provided, and also the measurement zone is respectively placed on both sides of the exposure zone in the first direction, and

the controller controls movement of the two movable bodies so that an object to which the detection of the marks has been performed in each of the two measurement zones is alternately carried in the exposure zone.

41. The exposure apparatus according to claim 36, further comprising:

a detection device that detects information on a surface shape of the object in the measurement zone.