Micromechanical z-sensor

• US 8,402,826 B2
• Filed: 10/15/2007
• Issued: 03/26/2013
• Est. Priority Date: 12/12/2006
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Classen, Johannes, Tebje, Lars
• Primary Examiner(s): Kwok, Helen C.
• Application Number:
  US12/304,603
• Publication Number:
  US 20100024553A1
• Time in Patent Office: 1,989 Days
• Field of Search: 735/143.2, 735/142.9, 735/143.6, 735/143.8
• US Class Current: 73/514.32
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Abstract

A micromechanical z-sensor includes a sensitivity, a torsion spring, and a seismic additional mass, the torsion spring having a spring width, and the seismic additional mass including webs having a web width. The web width is selected smaller than the spring width.

Claims

1. A micromechanical z-sensor, comprising:

a torsion spring; and

an additional seismic mass;

wherein the torsion spring has a spring width, the additional seismic mass including webs having a web width; and

wherein the web width is smaller than one half of the spring width and greater than one quarter of the spring width.

2. The micromechanical z-sensor according to claim 1, wherein the web width is one third of the spring width.

3. The micromechanical z-sensor according to claim 1, further comprising a mass structure including additional webs having an additional web width, the web width and the additional web width differing from one another.

4. The micromechanical z-sensor according to claim 1, wherein the webs having a different width are provided, the web width being an average width.