Fabrication of enclosed nanochannels using silica nanoparticles

• US 8,404,123 B2
• Filed: 09/28/2010
• Issued: 03/26/2013
• Est. Priority Date: 10/17/2005
• Status: Active Grant

• Current Assignee: UNM Rainforest Innovations (f/k/a STC.UNM) (The University of New Mexico)
• Original Assignee: UNM Rainforest Innovations (f/k/a STC.UNM) (The University of New Mexico)
• Inventors: Brueck, Steven R. J., Xia, Deying
• Primary Examiner(s): WILCZEWSKI, MARY A
• Application Number:
  US12/892,427
• Publication Number:
  US 20110011794A1
• Time in Patent Office: 910 Days
• Field of Search: 977/773, 977/780, 977/840, 977/880, 977/902, 210/767, 210/500.23, 137/2, 137/172, 137/561.R
• US Class Current: 210/767
• CPC Class Codes: B81C 1/00071 Channels
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: Y10S 977/78 Possessing fully enclosed nanosized voids or physical holes
• CPC Class Codes: Y10S 977/84 Manufacture, treatment, or detection of nanostructure
• CPC Class Codes: Y10T 137/0324 With control of flow by a condition or characteristic of a fluid
• CPC Class Codes: Y10T 137/3006 Liquids separated from liquid
• CPC Class Codes: Y10T 137/8593 Systems

Abstract

In accordance with the invention, there is a method of forming a nanochannel including depositing a photosensitive film stack over a substrate and forming a pattern on the film stack using interferometric lithography. The method can further include depositing a plurality of silica nanoparticles to form a structure over the pattern and removing the pattern while retaining the structure formed by the plurality of silica nanoparticles, wherein the structure comprises an enclosed nanochannel.

Claims

1. A nanochannel device for selectively separating components of a fluid comprising:

at least one first nanochannel having a first opening;

at least one second nanochannel having a second opening; and

at least one porous divider having a plurality of pores between the first and the second nanochannel, wherein the first nanochannel, the second nanochannel, and the at least one porous divider are disposed such that the fluid enters through the first opening of the first nanochannel, percolates through the plurality of pores of the porous divider and exits through the second opening of the second nanochannel.

2. The nanochannel device of claim 1, further comprising functionalized silica nanoparticles to selectively transport at least one component of the fluid.

3. A method of diagnosing nanochannel formation for nanofluidic applications comprising:

depositing a drop of a suspension comprising silica nanoparticles on a surface having a hydrophobic pattern;

determining that a nanochannel is not completely formed if the suspension of silica nanoparticles forms an elongated drop along a direction of the pattern due to the hydrophobic property of the surface; and

determining that a top of the nanochannel is formed if the suspension of silica nanoparticles shows at least partial isotropic wetting due to a hydrophilicity of the silica nanoparticles,

wherein the surface includes both a hydrophobic silicon substrate and hydrophobic photoresist in which the pattern is formed.

4. The method according to claim 3, wherein the determining is performed before spinning the surface.