Display device

• US 8,405,092 B2
• Filed: 09/09/2011
• Issued: 03/26/2013
• Est. Priority Date: 09/15/2010
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Inoue, Seiko, Miyake, Hiroyuki, Toyotaka, Kouhei
• Primary Examiner(s): Soward, Ida M
• Application Number:
  US13/228,495
• Publication Number:
  US 20120061666A1
• Time in Patent Office: 564 Days
• Field of Search: 257/59, 257/72, 257/222, 257/291, 257/E31.079, 257/E31.082
• US Class Current: 257/72
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 27/1251 comprising TFTs having a different architecture, e.g. top- and bottom gate TFTs
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

A semiconductor device including a first gate electrode and a second gate electrode formed apart from each other over an insulating surface, an oxide semiconductor film including a region overlapping with the first gate electrode with a gate insulating film interposed therebetween, a region overlapping with the second gate electrode with the gate insulating film interposed therebetween, and a region overlapping with neither the first gate electrode nor the second gate electrode, and an insulating film covering the gate insulating film, the first gate electrode, the second gate electrode, and the oxide semiconductor film, and being in direct contact with the oxide semiconductor film is provided.

Claims

1. A display device comprising:

a pixel portion comprising a plurality of pixels over an insulating surface, each of the plurality of pixels comprising;

a light-emitting element;

a switching element for controlling on/off of a current control element; and

the current control element for controlling a current of the light-emitting element, the current control element comprising;

a first gate electrode and a second gate electrode formed apart from each other over the insulating surface;

a first oxide semiconductor film comprising a region overlapping with the first gate electrode with a gate insulating film interposed therebetween, a region overlapping with the second gate electrode with the gate insulating film interposed therebetween, and a region overlapping with neither the first gate electrode nor the second gate electrode;

one of a first source electrode and a first drain electrode overlapping with a part of the first gate electrode and a part of the first oxide semiconductor film;

the other of the first source electrode and the first drain electrode overlapping with a part of the second gate electrode and a part of the first oxide semiconductor film; and

an insulating film covering the gate insulating film, the first gate electrode, the second gate electrode, the first oxide semiconductor film, the first source electrode, and the first drain electrode, the insulating film being in direct contact with the first oxide semiconductor film, and

a driver circuit for driving the pixel portion over the insulating surface, the driver circuit comprising a transistor comprising;

a third gate electrode over the insulating surface;

a second oxide semiconductor film overlapping with the third gate electrode with the gate insulating film interposed therebetween;

a second source electrode overlapping with a part of the third gate electrode and a part of the second oxide semiconductor film and a second drain electrode overlapping with a part of the third gate electrode and a part of the second oxide semiconductor film; and

the insulating film covering the gate insulating film, the third gate electrode, the second oxide semiconductor film, the second source electrode, and the second drain electrode, the insulating film being in direct contact with the second oxide semiconductor film.

2. The display device according to claim 1, wherein the first source electrode, the first drain electrode, the second source electrode, and the second drain electrode include a metal selected from aluminum, chromium, tantalum, titanium, molybdenum, and tungsten.

4. The display device according to claim 1, wherein the driver circuit is a source driver or a gate driver.

5. The display device according to claim 1, wherein a surface roughness of at least one of the first oxide semiconductor film and the second oxide semiconductor film is less than or equal to 1 nm.

3. A display device comprising:

a pixel portion comprising a plurality of pixels over an insulating surface, each of the plurality of pixels comprising;

a light-emitting element;

a switching element for controlling on/off of a current control element; and

the current control element for controlling a current of the light-emitting element, the current control element comprising;

a first gate electrode and a second gate electrode formed apart from each other over the insulating surface;

a first oxide semiconductor film comprising indium, gallium, and zinc and comprising a region overlapping with the first gate electrode with a gate insulating film interposed therebetween, a region overlapping with the second gate electrode with the gate insulating film interposed therebetween, and a region overlapping with neither the first gate electrode nor the second gate electrode;

one of a first source electrode and a first drain electrode overlapping with a part of the first gate electrode and a part of the first oxide semiconductor film;

the other of the first source electrode and the first drain electrode overlapping with a part of the second gate electrode and a part of the first oxide semiconductor film; and

an insulating film covering the gate insulating film, the first gate electrode, the second gate electrode, the first oxide semiconductor film, the first source electrode, and the first drain electrode, the insulating film being in direct contact with the first oxide semiconductor film, and

a driver circuit for driving the pixel portion over the insulating surface, the driver circuit comprising a transistor comprising;

a third gate electrode over the insulating surface;

a second oxide semiconductor film comprising indium, gallium, and zinc and overlapping with the third gate electrode with the gate insulating film interposed therebetween;

a second source electrode overlapping with a part of the third gate electrode and a part of the second oxide semiconductor film and a second drain electrode overlapping with a part of the third gate electrode and a part of the second oxide semiconductor film; and

the insulating film covering the gate insulating film, the third gate electrode, the second oxide semiconductor film, the second source electrode, and the second drain electrode, the insulating film being in direct contact with the second oxide semiconductor film.

6. The display device according to claim 3, wherein the first source electrode, the first drain electrode, the second source electrode, and the second drain electrode include a metal selected from aluminum, chromium, tantalum, titanium, molybdenum, and tungsten.

7. The display device according to claim 3, wherein the driver circuit is a source driver or a gate driver.

8. The display device according to claim 3, wherein a surface roughness of at least one of the first oxide semiconductor film and the second oxide semiconductor film is less than or equal to 1 nm.

9. A display device comprising:

a pixel portion comprising a plurality of pixels over an insulating surface, each of the plurality of pixels comprising;

a light-emitting element;

a switching element for controlling on/off of a current control element; and

the current control element for controlling a current of the light-emitting element, the current control element comprising;

a first gate electrode and a second gate electrode formed apart from each other over the insulating surface;

a first oxide semiconductor film comprising a region overlapping with the first gate electrode with a gate insulating film interposed therebetween, a region overlapping with the second gate electrode with the gate insulating film interposed therebetween, and a region overlapping with neither the first gate electrode nor the second gate electrode;

one of a first source electrode and a first drain electrode overlapping with a part of the first gate electrode and a part of the first oxide semiconductor film;

the other of the first source electrode and the first drain electrode overlapping with a part of the second gate electrode and a part of the first oxide semiconductor film; and

an insulating film covering the gate insulating film, the first gate electrode, the second gate electrode, the first oxide semiconductor film, the first source electrode, and the first drain electrode, the insulating film being in direct contact with the first oxide semiconductor film, and

a driver circuit for driving the pixel portion over the insulating surface, the driver circuit comprising a transistor comprising;

a third gate electrode over the insulating surface;

a second oxide semiconductor film overlapping with the third gate electrode with the gate insulating film interposed therebetween;

a second source electrode overlapping with a part of the third gate electrode and a part of the second oxide semiconductor film and a second drain electrode overlapping with a part of the third gate electrode and a part of the second oxide semiconductor film; and

the insulating film covering the gate insulating film, the third gate electrode, the second oxide semiconductor film, the second source electrode, and the second drain electrode, the insulating film being in direct contact with the second oxide semiconductor film,

wherein each of the first oxide semiconductor film and the second oxide semiconductor film is non-single crystalline and includes a crystalline portion, the crystalline portion including a c-axis aligned in a direction perpendicular to the insulating surface.

10. The display device according to claim 9, wherein the first source electrode, the first drain electrode, the second source electrode, and the second drain electrode include a metal selected from aluminum, chromium, tantalum, titanium, molybdenum, and tungsten.

11. The display device according to claim 9, wherein the driver circuit is a source driver or a gate driver.

12. The display device according to claim 9, wherein a surface roughness of at least one of the first oxide semiconductor film and the second oxide semiconductor film is less than or equal to 1 nm.