Scrubber brush with sleeve and brush mandrel for use with the scrubber brush

• US 8,407,846 B2
• Filed: 03/07/2007
• Issued: 04/02/2013
• Est. Priority Date: 03/07/2006
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Chen, Hui, Tulshibagwale, Sheshraj L., Tomita, Toshikazu, Fujikawa, Takashi, Takahashi, Hideshi
• Primary Examiner(s): GUIDOTTI, LAURA COLE
• Application Number:
  US11/683,116
• Publication Number:
  US 20070209135A1
• Time in Patent Office: 2,218 Days
• Field of Search: 152/30, 1523016-23019, 152/301.1, 151/79, 15/24, 492/45, 300/21
• US Class Current: 15/179
• CPC Class Codes: H01L 21/67046 using mainly scrubbing means, e.g. brushes
• CPC Class Codes: H03M 13/09 Error detection only, e.g. using cyclic redundancy check [CRC] codes or single parity bit
• CPC Class Codes: H03M 13/3738 with judging correct decoding
• CPC Class Codes: H03M 13/3776 using a re-encoding step during the decoding process
• CPC Class Codes: H03M 13/41 using the Viterbi algorithm or Viterbi processors
• CPC Class Codes: H04L 1/0045 Arrangements at the receiver end
• CPC Class Codes: H04L 1/0059 Convolutional codes
• CPC Class Codes: H04L 1/20 using signal quality detector
• CPC Class Codes: H04L 1/208 involving signal re-encoding

Abstract

In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes (1) a cylindrical brush including exterior and interior surfaces; and (2) a sleeve having an exterior surface coupled to the interior surface of the scrubber brush and an interior surface. The exterior surface of the sleeve includes first coupling features adapted to prevent rotation of the sleeve relative to the brush. The scrubber brush assembly also includes a mandrel coupled to the interior surface of the sleeve. Numerous other aspects are provided.

Claims

1. A method for assembling a scrubber brush assembly, comprising:

providing a scrubber brush formed on a sleeve;

inserting a mandrel into the sleeve to form the scrubber brush assembly;

providing aligned openings on the sleeve and mandrel such that a fluid may be jetted through the openings in the mandrel to the scrubber brush; and

extending the scrubber brush through the openings on the sleeve.

2. The method of claim 1, further comprising:

providing coupling features on an exterior surface of the sleeve adapted to prevent rotation of the sleeve relative to the scrubber brush.

3. The method of claim 1, further comprising:

providing mating coupling features on the sleeve and the mandrel adapted to prevent rotation of the mandrel relative to the sleeve.

4. A scrubber brush assembly comprising:

a cylindrical brush including exterior and interior surfaces;

a sleeve having an exterior surface coupled to the interior surface of the brush and an interior surface, the exterior surface of the sleeve including first coupling features adapted to prevent rotation of the sleeve relative to the brush, the sleeve further including a plurality of openings into which the brush extends; and

a mandrel coupled to the interior surface of the sleeve;

wherein the mandrel includes a plurality of openings aligned with the plurality of openings of the sleeve so as to enable delivery of fluid from the plurality of openings in the mandrel to the brush.

5. The scrubber brush assembly of claim 4, wherein the first coupling features comprise a plurality of ribs that protrude from the exterior surface of the sleeve and extend longitudinally along a length of the sleeve.

6. The scrubber brush assembly of claim 5, wherein the plurality of ribs includes four ribs equally spaced apart on the exterior surface of the sleeve.

7. The scrubber brush assembly of claim 4, wherein the interior surface of the sleeve includes second coupling features adapted to prevent rotation of the sleeve relative to the mandrel.

8. The scrubber brush assembly of claim 7, wherein the second coupling features comprise a plurality of ribs that protrude from the interior surface of the sleeve and extend longitudinally along a length of the sleeve.

9. A sleeve for use in a scrubber brush assembly comprising:

a cylindrical body having an exterior surface adapted to couple to a scrubber brush and an interior surface adapted to couple to a mandrel;

first coupling features positioned on the exterior surface adapted to prevent rotation of the sleeve relative to the scrubber brush;

and a plurality of openings into which the brush extends;

wherein the plurality of openings are adapted to align with a plurality of openings in a mandrel so as to enable delivery of fluid from the plurality of openings in the mandrel to the brush.

10. The sleeve of claim 9, wherein the first coupling features comprise a plurality of ribs that protrude from the exterior surface of the sleeve and extend longitudinally along a length of the sleeve.

11. The sleeve of claim 10, wherein the plurality of ribs includes four ribs equally spaced apart on the exterior surface of the sleeve.

12. The sleeve of claim 9, further comprising:

second coupling features positioned on the interior surface adapted to prevent rotation of the sleeve relative to the mandrel.

13. The sleeve of claim 12, wherein the second coupling features comprise a plurality of ribs that protrude from the interior surface of the sleeve and extend longitudinally along a length of the sleeve.

14. The sleeve of claim 13, wherein the plurality of ribs include sloping sidewalls extending inward from the interior surface of the sleeve.

15. A mandrel for use in a scrubber brush assembly having a scrubber brush formed on a sleeve comprising:

a cylindrical body having first and second ends and an exterior surface adapted to couple to an interior surface of the sleeve;

a drive-shaft coupling feature positioned at the first end of the cylindrical body adapted to couple the mandrel to a drive shaft and to provide a space between the drive shaft and the sleeve;

a plurality of openings adapted to align with a plurality of openings of the sleeve so as to enable delivery of fluid from the plurality of openings in the mandrel to the scrubber brush; and

a plurality of grooves and raised regions positioned on the exterior surface of the cylindrical body.

16. The mandrel of claim 15, wherein the grooves are adapted to mate with corresponding coupling features on the interior surface of the sleeve.

17. The mandrel of claim 15, wherein the second end of the cylindrical body has a lip adapted to prevent the mandrel from sliding off of the interior surface of the sleeve in a longitudinal direction.