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Piezoelectric transducers and inertial sensors using piezoelectric transducers

  • US 8,408,060 B2
  • Filed: 05/02/2012
  • Issued: 04/02/2013
  • Est. Priority Date: 09/11/2008
  • Status: Active Grant
First Claim
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1. A method for modifying an oscillation of a resonator in an inertial sensor, the inertial sensor comprising driving piezoelectric transducers for enabling an oscillation of the resonator and sensing piezoelectric transducers for enabling a detection of a movement of the inertial sensor, the inertial sensor further comprising piezoelectric compensating elements disposed substantially equidistantly among the driving and the sensing piezoelectric transducers, the compensating elements and the resonator forming corresponding capacitors having capacitive gaps, the method comprising:

  • using the driving piezoelectric transducers to cause oscillation of the resonator; and

    modifying the electrostatic charges stored in the capacitors so as to modify the oscillation of the resonator.

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