Force detection device

• US 8,408,075 B2
• Filed: 03/18/2010
• Issued: 04/02/2013
• Est. Priority Date: 07/08/2009
• Status: Active Grant

• Current Assignee: WACOH-TECH Inc.
• Original Assignee: Wacoh Company
• Inventors: Okada, Kazuhiro
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): DAVIS HOLLINGTON, OCTAVIA L
• Application Number:
  US12/726,471
• Publication Number:
  US 20110005338A1
• Time in Patent Office: 1,111 Days
• Field of Search: 73862041-862046
• US Class Current: 73/862.043
• CPC Class Codes: G01L 5/0061 Force sensors associated with industrial machines or actuators for the specific machine or actuator involved see relevant class, e.g. F01, F04, F16, B66, E21
• CPC Class Codes: G01L 5/165 using variations in capacitance

Abstract

Between an upper substrate 10 and a lower substrate 20 parallel to the XY plane, a first columnar member P1 and a second columnar member P2 are disposed. The upper end of each columnar member P1 or P2 is connected to the upper substrate 10 via an upper film portion 11 or 12, and the lower end is connected to the lower substrate 20 via a conductive lower film portion 21 or 22. The columnar members P1 and P2 are inclined mutually opposite with respect to vertical reference axes R1 and R2. When a rightward force +Fx is applied to the upper substrate 10 and the upper substrate 10 slides rightward, the columnar member P1 incline in a laying-down direction and the lower film portion 21 is deformed upward, and the columnar member P2 inclines in a rising direction and the lower film portion 22 is deformed downward. Based on a difference in capacitance value between a capacitance element consisting of the lower film portion 21 and an electrode E5 and a capacitance element consisting of the lower film portion 22 and an electrode E6, the force Fx in the X-axis direction is detected. By summing the capacitance values, a force Fz in the Z-axis direction can also be detected.

Claims

1. A force detection device which detects a force applied in a predetermined direction in an XYZ three-dimensional coordinate system, comprising:

an upper substrate having a substrate surface parallel to an XY plane;

a lower substrate having a substrate surface parallel to the XY plane and disposed below the upper substrate;

a first columnar member having an upper end directly or indirectly joined to a lower surface of the upper substrate, and a lower end directly or indirectly joined to an upper surface of the lower substrate;

a second columnar member having an upper end directly or indirectly joined to the lower surface of the upper substrate, and a lower end directly or indirectly joined to the upper surface of the lower substrate; and

a detector which outputs an electric signal showing an applied force based on displacements of the first columnar member and the second columnar member, wherein

a vicinity of a joined portion to which the lower end of the first columnar member is joined with the lower substrate constitutes a first lower film portion with flexibility;

a vicinity of a joined portion to which the lower end of the second columnar member is joined with the lower substrate constitutes a second lower film portion with flexibility;

a projection image obtained by orthogonally projecting a central axis of the first columnar member onto an XZ plane is inclined in a first direction with respect to a Z-axis, and a projection image obtained by orthogonally projecting a central axis of the second columnar member onto the XZ plane is inclined in a second direction opposite to the first direction with respect to the Z-axis; and

the detector includes a first sensor which detects a displacement in the Z-axis direction of the first lower film portion and a second sensor which detects a displacement in the Z-axis direction of the second lower film portion, and outputs an electric signal showing a difference between a detection value of the first sensor and a detection value of the second sensor as a detection value of a force Fx in an X-axis direction applied to the upper substrate in a state where the lower substrate is fixed.

2. The force detection device according to claim 1, wherein

the detector further outputs an electric signal showing a sum of a detection value of the first sensor and a detection value of the second sensor as a detection value of a force Fz in the Z-axis direction applied to the upper substrate in the state where the lower substrate is fixed.

3. The force detection device according to claim 1, wherein

a first lower groove and a second lower groove are formed on an upper surface or a lower surface of the lower substrate, a first lower film portion is formed by a bottom portion of the first lower groove, and a second lower film portion is formed by a bottom portion of the second lower groove.

4. The force detection device according to claim 3, wherein

each lower groove is formed on the upper surface of the lower substrate, a projection extending upward from a bottom surface of each lower groove to a substrate surface position is provided inside the lower groove, and the lower end of each columnar member is joined to the lower film portion via the projection.

5. The force detection device according to claim 1, wherein

the lower substrate is formed of a flexible substrate, the first lower film portion is formed by a part of the flexible substrate, and the second lower film portion is formed by another part of the flexible substrate.

6. The force detection device according to claim 1, wherein

a vicinity of a joined portion to which the upper end of the first columnar member is joined with the upper substrate constitutes a first upper film portion with flexibility, and

a vicinity of a joined portion to which the upper end of the second columnar member is joined with the upper substrate constitutes a second upper film portion with flexibility.

7. The force detection device according to claim 6, wherein

a first upper groove and a second upper groove are formed on an upper surface or a lower surface of the upper substrate, and a first upper film portion is formed by a bottom portion of the first upper groove, and a second upper film portion is formed by a bottom portion of the second upper groove.

8. The force detection device according to claim 7, wherein

each upper groove is formed on the lower surface of the upper substrate, a projection extending downward from a bottom surface of each upper groove to a substrate surface position is provided inside the upper groove, and the upper end of each columnar member is joined to the upper film portion via the projection.

9. The force detection device according to claim 6, wherein

the upper substrate is formed of a flexible substrate, a first upper film portion is formed by a part of the flexible substrate, and a second upper film portion is formed by another part of the flexible substrate.

10. The force detection device according to claim 1, wherein

a central axis of the first columnar member and a central axis of the second columnar member are disposed on the XZ plane or a plane parallel to the XZ plane, and the first columnar member and the second columnar member are symmetrical about a YZ plane.

11. The force detection device according to claim 1, wherein

a first sensor consists of a first capacitance element including:

a first displacement electrode formed on the first lower film portion; and

a first fixed electrode fixed to a position opposed to the first displacement electrode, and

a second sensor consists of a second capacitance element including;

a second displacement electrode formed on the second lower film portion; and

a second fixed electrode fixed to a position opposed to the second displacement electrode.

12. The force detection device according to claim 11, wherein

the lower substrate is made of a conductive material, the first lower film portion itself functions as a first displacement electrode, and the second lower film portion itself functions as a second displacement electrode.

13. The force detection device according to claim 11, further comprising:

an auxiliary substrate fixed to the lower surface of the lower substrate, wherein

a first auxiliary groove is formed at a position below the first lower film portion on an upper surface of the auxiliary substrate,

a second auxiliary groove is formed at a position below the second lower film portion on the upper surface of the auxiliary substrate, and

a first fixed electrode is formed on a bottom surface of the first auxiliary groove, and a second fixed electrode is formed on a bottom surface of the second auxiliary groove.

14. The force detection device according to claim 1, wherein

a part or the whole of the columnar member is provided having flexibility so that the columnar member is deformed when an external force is applied.

15. The force detection device according to claim 14, wherein

a constricted portion having flexibility is formed on a part of the columnar member so that the columnar member bends according to deformation of the constricted portion when an external force is applied.

16. The force detection device according to claim 14, wherein

the entire columnar member is made of a material having flexibility so that the entire columnar member is deformed when an external force is applied.

17. A force detection device which detects a force applied in a predetermined direction in an XYZ three-dimensional coordinate system, comprising:

a first columnar member and a second columnar member disposed so as to incline in predetermined directions with respect to a Z-axis defined in an up-down direction;

an upper structural body disposed above the first columnar member and the second columnar member;

a lower structural body disposed below the first columnar member and the second columnar member; and

a detector which outputs an electric signal showing an applied force based on displacements of the first columnar member and the second columnar member, wherein

an upper end of the first columnar member is directly or indirectly joined to a lower surface of the upper structural body, and a lower end of the first columnar member is directly or indirectly joined to an upper surface of the lower structural body;

an upper end of the second columnar member is directly or indirectly joined to a lower surface of the upper structural body, and a lower end of the second columnar member is directly or indirectly joined to an upper surface of the lower structural body;

a projection image obtained by orthogonally projecting a central axis of the first columnar member onto an XZ plane is inclined in a first direction with respect to the Z-axis, and a projection image obtained by orthogonally projecting a central axis of the second columnar member onto the XZ plane is inclined in a second direction opposite to the first direction with respect to the Z-axis;

at least a part of “

the lower structural body” and

at least a part of “

the upper structural body, the first columnar member, the second columnar member, and their mutual connection portions”

have flexibility so as to change the inclination state of the first columnar member and the second columnar member and allow the upper structural body to be displaced when an external force is applied to the upper structural body in a state where the lower structural body is fixed to a predetermined position; and

the detector includes a first sensor which detects a displacement in the Z-axis direction of the lower end of the first columnar member and a second sensor which detects a displacement in the Z-axis direction of the lower end of the second columnar member, and outputs an electric signal showing a difference between a detection value of the first sensor and a detection value of the second sensor as a detection value of a force Fx in an X-axis direction applied to the upper structural body in the state where the lower structural body is fixed to the predetermined position.

18. The force detection device according to claim 17, wherein

the detector further outputs an electric signal showing a sum of a detection value of the first sensor and a detection value of the second sensor as a detection value of a force Fz in the Z-axis direction applied to the upper structural body in the state where the lower structural body is fixed to a predetermined position.

19. The force detection device according to claim 17, wherein

a central axis of the first columnar member and a central axis of the second columnar member are disposed on the XZ plane or a plane parallel to the XZ plane, and the first columnar member and the second columnar member are symmetrical about a YZ plane.

20. The force detection device according to claim 17, further comprising:

an auxiliary substrate fixed below the lower structural body via a predetermined space, wherein

the first sensor consists of a first capacitance element including;

a first displacement electrode formed at a position to which the lower end of the first columnar member is joined with the lower structural body; and

a first fixed electrode fixed to a position opposed to the first displacement electrode on an upper surface of the auxiliary substrate, and

the second sensor consists of a second capacitance element including;

a second displacement electrode formed at a position to which the lower end of the second columnar member is joined with the lower structural body; and

a second fixed electrode fixed to a position opposed to the second displacement electrode on an upper surface of the auxiliary substrate.

21. The force detection device according to claim 20, wherein

the lower structural body is made of a conductive material, a portion to which the lower end of the first columnar member is joined with the lower structural body functions as a first displacement electrode, and a portion to which the lower end of the second columnar member is joined with the lower structural body functions as a second displacement electrode.

22. A force detection device which detects forces applied in predetermined directions in an XYZ three-dimensional coordinate system, comprising:

an upper substrate having a substrate surface parallel to an XY plane;

a lower substrate having a substrate surface parallel to the XY plane and disposed below the upper substrate;

first to fourth X-axis columnar members having upper ends directly or indirectly joined to a lower surface of the upper substrate, and lower ends directly or indirectly joined to an upper surface of the lower substrate;

first to fourth Y-axis columnar members having upper ends directly or indirectly joined to the lower surface of the upper substrate, and lower ends directly or indirectly joined to the upper surface of the lower substrate; and

a detector which outputs electric signals showing applied forces based on displacements of the first to fourth X-axis columnar members and the first to fourth Y-axis columnar members, wherein

vicinities of joined portions to which the lower ends of the first to fourth X-axis columnar members are joined with the lower substrate constitute first to fourth X-axis lower film portions with flexibility;

vicinities of joined portions to which the lower ends of the first to fourth Y-axis columnar members are joined with the lower substrate constitute first to fourth Y-axis lower film portions with flexibility;

a central axis of the first X-axis columnar member and a central axis of the second X-axis columnar member are included in an X-axis positive side orthogonal plane orthogonal to an X-axis in a positive region of the X-axis, and are inclined mutually opposite with respect to an XZ plane;

a central axis of the third X-axis columnar member and a central axis of the fourth X-axis columnar member are included in an X-axis negative side orthogonal plane orthogonal to the X-axis in a negative region of the X-axis, and are inclined mutually opposite with respect to the XZ plane;

a central axis of the first Y-axis columnar member and a central axis of the second Y-axis columnar member are included in a Y-axis positive side orthogonal plane orthogonal to the Y-axis in the positive region of the Y-axis, and are inclined mutually opposite with respect to the YZ plane;

a central axis of the third Y-axis columnar member and a central axis of the fourth Y-axis columnar member are included in a Y-axis negative side orthogonal plane orthogonal to the Y-axis in the negative region of the Y-axis, and are inclined mutually opposite with respect to the YZ plane; and

the detector includes;

a first X-axis sensor which detects a displacement in the Z-axis direction of the first X-axis lower film portion;

a second X-axis sensor which detects a displacement in the Z-axis direction of the second X-axis lower film portion;

a third X-axis sensor which detects a displacement in the Z-axis direction of the third X-axis lower film portion;

a fourth X-axis sensor which detects a displacement in the Z-axis direction of the fourth X-axis lower film portion;

a first Y-axis sensor which detects a displacement in the Z-axis direction of the first Y-axis lower film portion;

a second Y-axis sensor which detects a displacement in the Z-axis direction of the second Y-axis lower film portion;

a third Y-axis sensor which detects a displacement in the Z-axis direction of the third Y-axis lower film portion; and

a fourth Y-axis sensor which detects a displacement in the Z-axis direction of the fourth Y-axis lower film portion, and outputs electric signals obtained based on detection values of the sensors as detection values of forces applied to the upper substrate in the state where the lower substrate is fixed.

23. The force detection device according to claim 22, wherein

first to fourth X-axis lower grooves and first to fourth Y-axis lower grooves are formed on an upper surface or a lower surface of the lower substrate, bottom portions of the first to fourth X-axis lower grooves form first to fourth X-axis lower film portions, and bottom portions of the first to fourth Y-axis lower grooves form first to fourth lower film portions.

24. The force detection device according to claim 23, wherein

each lower groove or the lower annular groove is formed on the upper surface of the lower substrate, a projection extending upward from a bottom surface of each lower groove or the lower annular groove to a substrate surface position is provided inside each lower groove or the lower annular groove, and the lower end of each columnar member is joined to the lower film portion via the projection.

25. The force detection device according to claim 22, wherein

a lower annular groove is formed on the upper surface or the lower surface of the lower substrate, and portions of a bottom of the lower annular groove form first to fourth X-axis lower film portions and first to fourth Y-axis lower film portions.

26. The force detection device according to claim 22, wherein

the lower substrate is formed of a flexible substrate, and portions of the flexible substrate form the first to fourth X-axis lower film portions and the first to fourth Y-axis lower film portions.

27. The force detection device according to claim 22, wherein

vicinities of joined portions to which the upper ends of the first to fourth X-axis columnar members are joined with the upper substrate constitute first to fourth X-axis upper film portions with flexibility, and

vicinities of joined portions to which the upper ends of the first to fourth Y-axis columnar members are joined with the upper substrate constitute first to fourth Y-axis upper film portions with flexibility.

28. The force detection device according to claim 27, wherein

first to fourth X-axis upper grooves and first to fourth Y-axis upper grooves are formed on an upper surface or a lower surface of the upper substrate, bottom portions of the first to fourth X-axis upper grooves form first to fourth X-axis upper film portions, and bottom portions of the first to fourth Y-axis upper grooves form first to fourth Y-axis upper film portions.

29. The force detection device according to claim 28, wherein

each upper groove or the upper annular groove is formed on the lower surface of the upper substrate, a projection extending downward from a bottom surface of each upper groove or the upper annular groove to a substrate surface position is provided inside each upper groove or the upper annular groove, and the upper end of each columnar member is joined to the upper film portion via the projection.

30. The force detection device according to claim 27, wherein

an upper annular groove is formed on an upper surface or a lower surface of the upper substrate, and portions of bottom of the upper annular groove form first to fourth X-axis upper film portions and first to fourth Y-axis upper film portions.

31. The force detection device according to claim 27, wherein

the upper substrate is formed of a flexible substrate, and portions of the flexible substrate form first to fourth X-axis upper film portions and first to fourth Y-axis upper film portions.

32. The force detection device according to claim 31, wherein a coupling member is firmly fixed to a predetermined position on the upper surface of the upper substrate except for the first to fourth X-axis upper film portions and the first to fourth Y-axis upper film portions, and above the coupling member, a force receiver for receiving a force as a detection target is joined.

33. The force detection device according to claim 26, 31, or 32, wherein

when four regions of a region including the first X-axis upper/lower film portion and the second X-axis upper/lower film portion, a region including the third X-axis upper/lower film portion and the fourth X-axis upper/lower film portion, a region including the first Y-axis upper/lower film portion and the second Y-axis upper/lower film portion, and a region including the third Y-axis upper/lower film portion and the fourth Y-axis upper/lower film portion, are defined on the flexible substrate, along boundaries of these four regions, slits are formed from an outer peripheral toward a central portion of the flexible substrate.

34. The force detection device according to claim 22, wherein

an orthogonal projection image of the first X-axis columnar member onto an XY plane and an orthogonal projection image of the first Y-axis columnar member onto the XY plane are positioned in a first quadrant of an XY coordinate system,

an orthogonal projection image of the third X-axis columnar member onto the XY plane and an orthogonal projection image of the second Y-axis columnar member onto the XY plane are positioned in a second quadrant of the XY coordinate system,

an orthogonal projection image of the fourth X-axis columnar member onto the XY plane and an orthogonal projection image of the fourth Y-axis columnar member onto the XY plane are positioned in a third quadrant of the XY coordinate system, and

an orthogonal projection image of the second X-axis columnar member onto the XY plane and an orthogonal projection image of the third Y-axis columnar member onto the XY plane are positioned in a fourth quadrant of the XY coordinate system.

35. The force detection device according to claim 34, wherein

a main structural body constituted by “

first to fourth X-axis columnar members,”

“

first to fourth Y-axis columnar members,”

“

upper substrate or upper structural member,” and

“

lower substrate or lower structural body”

is symmetrical about an XZ plane, and is also symmetrical about a YZ plane.

36. The force detection device according to claim 35, wherein

the detector outputs:

a signal value V(Fx)* corresponding to a sum of “

a difference between a detection value of the first Y-axis sensor and a detection value of the second Y-axis sensor” and

“

a difference between a detection value of the third Y-axis sensor and a detection value of the fourth Y-axis sensor”

as a detection value of an applied force Fx in an X-axis direction; and

a signal value V(Fy)* corresponding to a sum of “

a difference between a detection value of the first X-axis sensor and a detection value of the second X-axis sensor” and

“

a difference between a detection value of the third X-axis sensor and a detection value of the fourth X-axis sensor”

as a detection value of an applied force Fy in a Y-axis direction.

37. The force detection device according to claim 36, wherein

the detector further outputs:

a signal value V(Mx) corresponding to a difference between “

a sum of a detection value of the third Y-axis sensor and a detection value of the fourth Y-axis sensor” and

“

a sum of a detection value of the first Y-axis sensor and a detection value of the second Y-axis sensor”

as a detection value of an applied moment Mx around the X-axis; and

a signal value V(My) corresponding to a difference between “

a sum of a detection value of the first X-axis sensor and a detection value of the second X-axis sensor” and

“

a sum of a detection value of the third X-axis sensor and a detection value of the fourth X-axis sensor”

as a detection value of an applied moment My around the Y-axis.

38. The force detection device according to claim 35, wherein

the detector outputs:

a signal value V(Mx) corresponding to a difference between “

a sum of a detection value of the third Y-axis sensor and a detection value of the fourth Y-axis sensor” and

“

a sum of a detection value of the first Y-axis sensor and a detection value of the second Y-axis sensor”

as a detection value of an applied moment Mx around an X-axis; and

a signal value V(My) corresponding to a difference between “

a sum of a detection value of the first X-axis sensor and a detection value of the second X-axis sensor” and

“

a sum of a detection value of the third X-axis sensor and a detection value of the fourth X-axis sensor”

as a detection value of an applied moment My around a Y-axis.

39. The force detection device according to claim 38, wherein

the detector further calculates:

a signal value V(Fx)* corresponding to a sum of “

a difference between a detection value of the first Y-axis sensor and a detection value of the second Y-axis sensor” and

“

a difference between a detection value of the third Y-axis sensor and a detection value of the fourth Y-axis sensor” and

a signal value V(Fy)* corresponding to a sum of “

a difference between a detection value of the first X-axis sensor and a detection value of the second X-axis sensor” and

“

a difference between a detection value of the third X-axis sensor and a detection value of the fourth X-axis sensor,” and

outputs;

a signal value V(Fx) corresponding to a value obtained according to an expression of “

V(Fx)*−

k2/k1·

V (My)”

as a detection value of an applied force Fx in the X-axis direction; and

a signal value V(Fy) corresponding to a value obtained according to an expression of “

V(Fy)*−

k4/k3·

V (Mx)”

as a detection value of an applied force Fy in the Y-axis direction,

by using predetermined coefficients k1 to k4.

40. The force detection device according to claim 37 or 39, wherein

the detector further outputs:

a signal value V(Fz) corresponding to “

a sum of detection values of the first to fourth X-axis sensors,”

“

a sum of detection values of first to fourth Y-axis sensors,”

or “

a total of a sum of detection values of the first to fourth X-axis sensors and a sum of detection values of the first to fourth Y-axis sensors”

as a detection value of an applied force Fz in a Z-axis direction.

41. The force detection device according to claim 37 or 39, wherein

the detector further outputs:

a signal value V(Mz) corresponding to a sum of “

a difference between a detection value of the first X-axis sensor and a detection value of the second X-axis sensor,”

“

a difference between a detection value of the fourth X-axis sensor and a detection value of the third X-axis sensor,”

“

a difference between a detection value of the second Y-axis sensor and a detection value of the first Y-axis sensor,” and

“

a difference between a detection value of the third Y-axis sensor and a detection value of the fourth Y-axis sensor”

as a detection value of an applied moment Mz around a Z-axis.

42. The force detection device according to claim 22, wherein

each sensor consists of a capacitance element including:

a displacement electrode formed on the lower film portion or the lower structural body; and

a fixed electrode fixed to a position opposed to the displacement electrode.

43. The force detection device according to claim 22, wherein

the first X-axis sensor consists of a first X-axis capacitance element including:

a first X-axis displacement electrode formed on the first X-axis lower film portion; and

a first X-axis fixed electrode fixed to a position opposed to the first X-axis displacement electrode,

the second X-axis sensor consists of a second X-axis capacitance element including;

a second X-axis displacement electrode formed on the second X-axis lower film portion; and

a second X-axis fixed electrode fixed to a position opposed to the second X-axis displacement electrode,

the third X-axis sensor consists of a third X-axis capacitance element including;

a third X-axis displacement electrode formed on the third X-axis lower film portion; and

a third X-axis fixed electrode fixed to a position opposed to the third X-axis displacement electrode,

the fourth X-axis sensor consists of a fourth X-axis capacitance element including;

a fourth X-axis displacement electrode formed on the fourth X-axis lower film portion; and

a fourth X-axis fixed electrode fixed to a position opposed to the fourth X-axis displacement electrode,

the first Y-axis sensor consists of a first Y-axis capacitance element including;

a first Y-axis displacement electrode formed on the first Y-axis lower film portion; and

a first Y-axis fixed electrode fixed to a position opposed to the first Y-axis displacement electrode,

the second Y-axis sensor consists of a second Y-axis capacitance element including;

a second Y-axis displacement electrode formed on the second Y-axis lower film portion; and

a second Y-axis fixed electrode fixed to a position opposed to the second Y-axis displacement electrode,

the third Y-axis sensor consists of a third Y-axis capacitance element including;

a third Y-axis displacement electrode formed on the third Y-axis lower film portion; and

a third Y-axis fixed electrode fixed to a position opposed to the third Y-axis displacement electrode,

the fourth Y-axis sensor consists of a fourth Y-axis capacitance element including;

a fourth Y-axis displacement electrode formed on the fourth Y-axis lower film portion; and

a fourth Y-axis fixed electrode fixed to a position opposed to the fourth Y-axis displacement electrode, and

the detector outputs electric signals obtained based on a static capacitance fluctuation value Cx1 of the first X-axis capacitance element, a static capacitance fluctuation value Cx2 of the second X-axis capacitance element, a static capacitance fluctuation value Cx3 of the third X-axis capacitance element, a static capacitance fluctuation value Cx4 of the fourth X-axis capacitance element, a static capacitance fluctuation value Cy1 of the first Y-axis capacitance element, a static capacitance fluctuation value Cy2 of the second Y-axis capacitance element, a static capacitance fluctuation value Cy3 of the third Y-axis capacitance element, a static capacitance fluctuation value Cy4 of the fourth Y-axis capacitance element, as detection values.

44. The force detection device according to claim 43, wherein

the lower substrate is made of a conductive material, and the first to fourth X-axis lower film portions themselves, respectively, function as first to fourth X-axis displacement electrodes, and the first to fourth Y-axis lower film portions themselves, respectively, function as first to fourth Y-axis displacement electrodes.

45. The force detection device according to claim 43, further comprising:

an auxiliary substrate firmly fixed to a lower surface of the lower substrate, wherein

first to fourth X-axis auxiliary grooves are formed at positions below the first to fourth X-axis lower film portions on an upper surface of the auxiliary substrate, and first to fourth Y-axis auxiliary grooves are formed at positions below the first to fourth Y-axis lower film portions on the upper surface of the auxiliary substrate, and

first to fourth X-axis fixed electrodes are formed on bottom surfaces of the first to fourth X-axis auxiliary grooves, and first to fourth Y-axis fixed electrodes are formed on bottom surfaces of the first to fourth Y-axis auxiliary grooves.

46. The force detection device according to claim 43, further comprising:

an auxiliary substrate firmly fixed to a lower surface of the lower substrate, wherein

an annular auxiliary groove which couples positions below the first to fourth X-axis lower film portions and positions below the first to fourth Y-axis lower film portions on an upper surface of the auxiliary substrate is formed, and first to fourth X-axis fixed electrodes and first to fourth Y-axis fixed electrodes are formed on a bottom surface of the annular auxiliary groove.

47. The force detection device according to claim 43, wherein

a spacer member is firmly fixed to a predetermined position on a lower surface of the lower substrate except for the first to fourth X-axis lower film portions and the first to fourth Y-axis lower film portions, an auxiliary substrate is firmly fixed below the spacer member, and first to fourth X-axis fixed electrodes and first to fourth Y-axis fixed electrodes are formed on an upper surface of the auxiliary substrate.

48. The force detection device according to claim 43, wherein

an orthogonal projection image of the first X-axis columnar member onto the XY plane and an orthogonal projection image of the first Y-axis columnar member onto the XY plane are positioned in a first quadrant of an XY coordinate system,

an orthogonal projection image of the third X-axis columnar member onto the XY plane and an orthogonal projection image of the second Y-axis columnar member onto the XY plane are positioned in a second quadrant of the XY coordinate system,

an orthogonal projection image of the fourth X-axis columnar member onto the XY plane and an orthogonal projection image of the fourth Y-axis columnar member onto the XY plane are positioned in a third quadrant of the XY coordinate system, and

an orthogonal projection image of the second X-axis columnar member onto the XY plane and an orthogonal projection image of the third Y-axis columnar member onto the XY plane are positioned in a fourth quadrant of the XY coordinate system,

the first to fourth X-axis columnar members are inclined so that the upper ends become closer to the XZ plane than the lower ends,

the first to fourth Y-axis columnar members are inclined so that the upper ends become closer to the YZ plane than the lower ends, and

a main structural body constituted by “

the first to fourth X-axis columnar members,”

“

the first to fourth Y-axis columnar members,”

“

the upper substrate or the upper structural body,” and

“

the lower substrate or the lower structural body”

is symmetrical about the XZ plane, and is also symmetrical about the YZ plane.

49. The force detection device according to claim 48, wherein

the detector outputs:

a signal value V(Fx)* corresponding to a value obtained according to an expression of “

(Cy1−

Cy2)+(Cy3−

Cy4)”

as a detection value of an applied force Fx in an X-axis direction; and

a signal value V(Fy)* corresponding to a value obtained according to an expression of “

(Cx1−

Cx2)+(Cx3−

Cx4)”

as a detection value of an applied force Fy in a Y-axis direction.

50. The force detection device according to claim 49, wherein

the detector further outputs:

a signal value V(Mx) corresponding to a value obtained according to an expression of “

(Cy3+Cy4)−

(Cy1+Cy2)”

as a detection value of an applied moment Mx around the X-axis; and

a signal value V(My) corresponding to a value obtained according to an expression of “

(Cx1+Cx2)−

(Cx3+Cx4)”

as a detection value of an applied moment My around the Y-axis.

51. The detection device according to claim 48, wherein

the detector outputs:

a signal value V(Mx) corresponding to a value obtained according to an expression of “

(Cy3+Cy4)−

(Cy1+Cy2)”

as a detection value of an applied moment Mx around an X-axis; and

a signal value V(My) corresponding to a value obtained according to an expression of “

(Cx1+Cx2)−

(Cx3+Cx4)”

as a detection value of an applied moment My around a Y-axis.

52. The force detection device according to claim 51, wherein

the detector further outputs:

a signal value V(Fx) corresponding to a value obtained according to an expression of “

(Cy1−

Cy2)+(Cy3−

Cy4)−

k2/k1·

V(My)”

as a detection value of an applied force Fx in the X-axis direction; and

a signal value V(Fy) corresponding to a value obtained according to an expression of “

(Cx1−

Cx2)+(Cx3−

Cx4)−

k4/k3·

V(Mx)”

as a detection value of an applied force Fy in the Y-axis direction,

by using predetermined coefficients k1 to k4.

53. The force detection device according to claim 49 or 51, wherein

the detector further outputs a signal value V(Fz) corresponding to a value obtained according to an expression of:

“

−

(Cx1+Cx2+Cx3+Cx4+Cy1+Cy2+Cy3+Cy4)”

or

“

−

(Cx1+Cx2+Cx3+Cx4)”

or

“

−

(Cy1+Cy2+Cy3+Cy4)”

as a detection value of an applied force Fz in the Z-axis direction.

54. The force detection device according to claim 49 or 51, wherein

the detector further outputs:

a signal value V(Mz) corresponding to a value obtained according to an expression of;

“

(Cx1−

Cx2)+(Cx4−

Cx3)+(Cy2−

Cy1)+(Cy3−

Cy4)”

as a detection value of an applied moment Mz around the Z-axis direction.

55. A force detection device which detects forces applied in predetermined directions in an XYZ three-dimensional coordinate system, comprising:

an upper structural body expanding on a plane parallel to an XY plane;

a lower structural body expanding on a plane parallel to the XY plane and disposed below the upper structural body;

first to fourth X-axis columnar members having upper ends directly or indirectly joined to a lower surface of the upper structural body, and lower ends directly or indirectly joined to an upper surface of the lower structural body;

first to fourth Y-axis columnar members having upper ends directly or indirectly joined to a lower surface of the upper structural body, and lower ends directly or indirectly joined to an upper surface of the lower structural body; and

a detector which outputs electric signals showing applied forces based on displacements of the first to fourth X-axis columnar members and the first to fourth Y-axis columnar members, wherein

a central axis of the first X-axis columnar member and a central axis of the second X-axis columnar member are included in an X-axis positive side orthogonal plane orthogonal to an X-axis in a positive region of the X-axis, and are inclined mutually opposite with respect to an XZ plane;

a central axis of the third X-axis columnar member and a central axis of the fourth X-axis columnar member are included in an X-axis negative side orthogonal plane orthogonal to the X-axis in a negative region of the X-axis, and are inclined mutually opposite with respect to the XZ plane;

a central axis of the first Y-axis columnar member and a central axis of the second Y-axis columnar member are included in a Y-axis positive side orthogonal plane orthogonal to a Y-axis in a positive region of the Y-axis, and are inclined mutually opposite with respect to a YZ plane;

a central axis of the third Y-axis columnar member and a central axis of the fourth Y-axis columnar member are included in a Y-axis negative side orthogonal plane orthogonal to the Y-axis in a negative region of the Y-axis, and are inclined mutually opposite with respect to the YZ plane; and

the detector includes;

a first X-axis sensor which detects a displacement in a Z-axis direction of the lower end of the first X-axis columnar member;

a second X-axis sensor which detects a displacement in the Z-axis direction of the lower end of the second X-axis columnar member;

a third X-axis sensor which detects a displacement in the Z-axis direction of the lower end of the third X-axis columnar member;

a fourth X-axis sensor which detects a displacement in the Z-axis direction of the lower end of the fourth X-axis columnar member;

a first Y-axis sensor which detects a displacement in the Z-axis direction of the lower end of the first Y-axis columnar member;

a second Y-axis sensor which detects a displacement in the Z-axis direction of the lower end of the second Y-axis columnar member;

a third Y-axis sensor which detects a displacement in the Z-axis direction of the lower end of the third Y-axis columnar member; and

a fourth Y-axis sensor which detects a displacement in the Z-axis direction of the lower end of the fourth Y-axis columnar member, and outputs electric signals obtained based on detection values of the sensors as detection values of forces applied to the upper structural body in a state where the lower structural body is fixed to a predetermined position.

56. The force detection device according to claim 55, wherein

the lower structural body includes a central portion positioned on the Z-axis, and eight branch portions having flexibility extending from a central portion to connection positions to the lower ends of the first to fourth X-axis columnar members and connection positions to the lower ends of the first to fourth Y-axis columnar members, respectively.

57. The force detection device according to claim 56, further comprising:

an auxiliary substrate fixed below the lower structural body via a predetermined space, wherein

the first X-axis sensor consists of a first X-axis capacitance element including;

a first X-axis displacement electrode formed on a branch portion extending to a connection position to the lower end of the first X-axis columnar member; and

a first X-axis fixed electrode fixed to a position opposed to the first X-axis displacement electrode on an upper surface of the auxiliary substrate,

the second X-axis sensor consists of a second X-axis capacitance element including;

a second X-axis displacement electrode formed on a branch portion extending to a connection position to the lower end of the second X-axis columnar member; and

a second X-axis fixed electrode fixed to a position opposed to the second X-axis displacement electrode on the upper surface of the auxiliary substrate,

the third X-axis sensor consists of a third X-axis capacitance element including;

a third X-axis displacement electrode formed on a branch portion extending to a connection position to the lower end of the third X-axis columnar member; and

a third X-axis fixed electrode fixed to a position opposed to the third X-axis displacement electrode on the upper surface of the auxiliary substrate,

the fourth X-axis sensor consists of a fourth X-axis capacitance element including;

a fourth X-axis displacement electrode formed on a branch portion extending to a connection position to the lower end of the fourth X-axis columnar member; and

a fourth X-axis fixed electrode fixed to a position opposed to the fourth X-axis displacement electrode on the upper surface of the auxiliary substrate,

the first Y-axis sensor consists of a first Y-axis capacitance element including;

a first Y-axis displacement electrode formed on a branch portion extending to a connection position to the lower end of the first Y-axis columnar member; and

a first Y-axis fixed electrode fixed to a position opposed to the first Y-axis displacement electrode on the upper surface of the auxiliary substrate,

the second Y-axis sensor consists of a second Y-axis capacitance element including;

a second Y-axis displacement electrode formed on a branch portion extending to a connection position to the lower end of the second Y-axis columnar member; and

a second Y-axis fixed electrode fixed to a position opposed to the second Y-axis displacement electrode on the upper surface of the auxiliary substrate,

the third Y-axis sensor consists of a third Y-axis capacitance element including;

a third Y-axis displacement electrode formed on a branch portion extending to a connection position to the lower end of the third Y-axis columnar member; and

a third Y-axis fixed electrode fixed to a position opposed to the third Y-axis displacement electrode on the upper surface of the auxiliary substrate,

the fourth Y-axis sensor consists of a fourth Y-axis capacitance element including;

a fourth Y-axis displacement electrode formed on a branch portion extending to a connection position to the lower end of the fourth Y-axis columnar member; and

a fourth Y-axis fixed electrode fixed to a position opposed to the fourth Y-axis displacement electrode on the upper surface of the auxiliary substrate, and

the detector outputs electric signals obtained based on a static capacitance fluctuation value Cx1 of the first X-axis capacitance element, a static capacitance fluctuation value Cx2 of the second X-axis capacitance element, a static capacitance fluctuation value Cx3 of the third X-axis capacitance element, a static capacitance fluctuation value Cx4 of the fourth X-axis capacitance element, a static capacitance fluctuation value Cy1 of the first Y-axis capacitance element, a static capacitance fluctuation value Cy2 of the second Y-axis capacitance element, a static capacitance fluctuation value Cy3 of the third Y-axis capacitance element, a static capacitance fluctuation value Cy4 of the fourth Y-axis capacitance element, as detection values.

58. The force detection device according to claim 57, wherein

the lower structural body is made of a conductive material, and the branch portions themselves, respectively, function as first to fourth X-axis displacement electrodes and first to fourth Y-axis displacement electrodes.

59. The force detection device according to claim 58, wherein

contact determining electrodes electrically insulated from the fixed electrodes are provided at positions opposed to tip end portions of the branch portions on the upper surface of the auxiliary surface so as to determine whether the tip end portions of the branch portions and the contact determining electrodes have come into physical contact with each other based on electric continuity states between these.

60. The force detection device according to claim 59, wherein

a pair of contact determining electrodes insulated from each other is provided at a position opposed to the tip end portion of a branch portion so as to determine whether the tip end portion of the branch portion and the pair of contact determining electrodes have come into physical contact with each other based on an electric continuity state between the pair of contact determining electrodes.

61. The force detection device according to claim 58, wherein

in an annular region which couples positions opposed to tip end portions of the branch portions on the upper surface of the auxiliary substrate, a contact determining annular electrode electrically insulated from the fixed electrodes is provided so as to determine whether the tip end portions of the branch portions and the contact determining annular electrode have come into physical contact with each other based on electric continuity states between these.

62. The force detection device according to claim 61, wherein

in the annular region, a pair of contact determining annular electrodes which are insulated from each other and are concentric with each other are provided so as to determine whether the tip end portions of the branch portions and the pair of contact determining annular electrodes have come into physical contact with each other based on an electric continuity state between the pair of contact determining annular electrodes.

63. The force detection device according to any of claims 59 to 62, wherein

a conduction path formed by physical contact between the contact determining electrode or the contact determining annular electrode and the branch portion constitutes a wiring path which electrically connects each displacement electrode and the detector.