Parts manipulation, inspection, and replacement

• US 8,408,379 B2
• Filed: 10/04/2012
• Issued: 04/02/2013
• Est. Priority Date: 07/08/1998
• Status: Expired due to Fees

• Current Assignee: Charles A. Lemaire
• Original Assignee: Charles A. Lemaire
• Inventors: Malek, Arye, Ulrich, Franz W., Hackney, Joshua J.
• Primary Examiner(s): Deuble, Mark A
• Application Number:
  US13/645,500
• Publication Number:
  US 20130028504A1
• Time in Patent Office: 180 Days
• Field of Search: 198/403, 209/542, 209/922, 209/562, 209/563, 209/564, 209/587
• US Class Current: 198/403
• CPC Class Codes: B07C 5/3404 according to properties of containers or receptacles, e.g. rigidity, leaks, fill-level control devices for cigarette or cigar packaging B65B19/28; investigation of fluid-tightness of structures G01M3/00
• CPC Class Codes: B07C 5/3422 using video scanning devices, e.g. TV-cameras
• CPC Class Codes: G01N 2021/845 Objects on a conveyor
• CPC Class Codes: G01N 21/8901 Optical details; Scanning details per se G02B
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 21/95684 Patterns showing highly reflecting parts, e.g. metallic elements
• CPC Class Codes: G01N 2201/0635 Structured illumination, e.g. with grating
• CPC Class Codes: G02B 13/22 Telecentric objectives or lens systems
• CPC Class Codes: Y10S 209/922 Miscellaneous feed conveyors

Abstract

Manufacturing lines include inspection systems for monitoring the quality of parts produced. Manufacturing lines for making semiconductor devices generally inspect each fabricated part. The information obtained is used to fix manufacturing problems in the semiconductor fab plant. A machine-vision system for inspecting devices includes a flipper mechanism. After being inspected at a first station, a tray-transfer device moves the tray from the first inspection station to a flipper mechanism. The flipper mechanism includes two jaws, a mover, and a rotator. The flipper mechanism turns the devices over and places the devices in a second tray so that another surface of the device can be inspected. A second tray-transfer device moves the second tray from the flipper to a second inspection station. The mover of the flipper mechanism removes the tray from the first inspection surface and places a tray at the second inspection surface.

Claims

1. A machine-vision system for inspecting devices in trays, each tray populated with a plurality of devices, the system comprising:

a first input station having a first input elevator configured to hold a plurality of trays, wherein the plurality of trays includes a first tray held at an inspection position of the first input elevator that is above all other ones of the plurality of trays held by the first input elevator, and wherein each one of the plurality of trays has a first plurality of that tray'"'"'s devices that are yet to be inspected;

a first output station having a first output elevator for holding a plurality of trays; and

a first machine-vision imager that performs a first machine-vision inspection of the first plurality of devices in the first tray held at the inspection position of the first input station and wherein, upon completion of the first machine-vision inspection, the system operates to then move the first tray, which has the first plurality of that tray'"'"'s devices that have been inspected by the first machine-vision imager, off the inspection position of the first input elevator and eventually to the first output elevator, and to successively raise the other ones of the plurality of trays to the inspection position of the first input elevator to be inspected by the first machine-vision imager.

2. The system of claim 1, wherein the system further comprises:

a second machine-vision inspection station that inspects a second side of each of the first plurality of devices, wherein the first inspection station inspects a first side of each of the plurality of devices in the first tray, and wherein the system moves the first tray to the second inspection station after the completion of the inspection at the first inspection station and before the system moves the first tray to the first output elevator.

3. The system of claim 2, further comprising:

a device-inverting mechanism that operates to invert the plurality of devices from the first tray to an inverted position, and wherein the device-inverting mechanism is configured to place the plurality of devices back into the first tray in the inverted position such that the plurality of devices are in the first tray in the inverted position when they are inspected in the second inspection station.

4. The system of claim 2, further comprising:

a device-inverting mechanism that operates to invert the plurality of devices from the first tray to an inverted position, and wherein the device-inverting mechanism is configured to place the plurality of devices into a second tray in the inverted position such that the plurality of devices are in the second tray in the inverted position when they are inspected in the second inspection station.

5. The system of claim 1, further comprising:

a sorter that obtains a known-good device that has previously passed inspection and uses the obtained known-good device to replace a device from the first plurality of devices in the first tray that has not passed inspection, wherein the sorter obtains the good device from a second tray that holds devices some of which are known-good devices that have each previously passed inspection.

6. The system of claim 1, further comprising:

a sorter that obtains a known-good device that has previously passed inspection and uses the obtained known-good device to replace a device from the first plurality of devices in the first tray that has not passed inspection, wherein the sorter obtains the good device from a second tray that holds devices some of which are known-good devices that have each previously passed inspection; and

a second output station having a second output elevator configured to hold a plurality of trays each of which has a plurality of devices that have not passed the machine-vision inspection, wherein the second tray is above all other trays, if any, at the second output station and is used to hold a supply of known-good devices, wherein devices, if any, that have not passed the machine-vision inspection, after removal from the first tray, are placed in the second tray, and once all the known-good devices from the second tray have been used as replacements and the second tray holds only devices that have not passed inspection, the second elevator lowers the second tray.

7. The system of claim 1, further comprising:

a second machine-vision inspection station that inspects each of the first plurality of devices in the first tray, and that includes a third elevator below an imaged area of the second inspection station, wherein the third elevator holds a plurality of trays each holding a plurality of devices; and

a device-inverting mechanism between the second inspection station and the first inspection station that operates to invert the plurality of devices such that a different side of each of the plurality of devices is inspected in the first station as was inspected in the second inspection station.

8. A machine-vision method for inspecting devices in trays, each tray populated with a plurality of devices, the method comprising:

holding a first plurality of trays in a first input stack of trays, wherein the first plurality of trays in the first input stack of trays includes a first tray in a first inspection position above all other ones of the first plurality of trays in the first input stack of trays, wherein each tray of the first plurality of trays in the first input stack of trays has a plurality of devices that are to be inspected;

performing a first machine-vision inspection of the plurality of devices in the first tray held at the first input stack of trays;

automatically moving the first tray off the first input stack of trays and eventually to a top position of a first output stack of trays; and

successively raising the other ones of the first plurality of trays in the first stack of trays to the first inspection position and then repeating the performing of the first machine-vision inspection.

9. The method of claim 8, wherein the performing of the first machine-vision inspection includes performing a first-side machine-vision inspection of a first side of the first plurality of devices in the first tray, the method further comprising:

performing a second machine-vision inspection of a second side of each of the first plurality of devices, wherein the second machine-vision inspection is of a second side of the first plurality of devices.

10. The method of claim 8, wherein the performing of the first machine-vision inspection includes performing a first-side machine-vision inspection of a first side of devices in a first tray, the method further comprising:

performing a device-inverting operation on the plurality of devices that were inspected in the first-side machine-vision inspection and placing the inverted devices back into the first tray; and

performing a second machine-vision inspection of the plurality of devices in the first tray held at the top position of the first output stack of trays, wherein the second machine-vision inspection is of a second side of the devices in the first tray and is performed after the device-inverting operation.

11. The method of claim 8, wherein the performing of the first machine-vision inspection includes performing a first-side machine-vision inspection of a first side of devices in a first tray, the method further comprising:

performing a device-inverting operation on the plurality of devices that were inspected in the first-side machine-vision inspection and placing the inverted devices into a second tray; and

performing a second machine-vision inspection of the plurality of devices in the second tray held at the top position of the first output stack of trays, wherein the second machine-vision inspection is of a second side of the devices in the second tray and is performed after the device-inverting operation.

12. The method of claim 8, further comprising:

obtaining a known-good device that has previously passed inspection from a second tray that holds devices including some known-good devices that have each previously passed inspection; and

using the obtained known-good device to replace a device from the first plurality of devices in the first tray that has not passed inspection.

13. The method of claim 8, further comprising:

obtaining a known-good device that has previously passed inspection from a second tray that holds devices including some known-good devices that have each previously passed inspection;

using the obtained known-good device to replace a device from the first plurality of devices in the first tray that has not passed inspection;

holding a second plurality of trays in a second output stack of trays, wherein the second plurality of trays includes a second tray, wherein each of the second plurality of trays has a plurality of devices that have not passed the machine-vision inspection, wherein the second tray is a top tray of the second output stack of trays and is used to hold a supply of known-good devices, wherein devices that have not passed the machine-vision inspection, after removal from the first tray, are placed in the second tray; and

once all the known-good devices from the second tray have been used as replacements and the second tray holds only devices that have not passed inspection, lowering the second plurality of trays holding devices that have not passed inspection.

14. The method of claim 8, wherein the method further comprises:

performing a device-inverting operation on the plurality of devices that were inspected in the first-side machine-vision inspection and placing the inverted devices into a second tray; and

performing a second machine-vision inspection of the plurality of devices in the second tray held at the top position of the first output stack of trays, wherein the second machine-vision inspection is of a second side of the devices in the second tray and is performed after the device-inverting operation;

holding a third stack of trays, wherein the third stack of trays includes a third tray in a top position, the third tray having some known-good devices that have each previously passed inspection;

obtaining one of the known-good devices that has previously passed inspection from the third tray;

removing a device from the first plurality of devices in the first tray that has not passed inspection; and

replacing the removed device from the first plurality of devices in the first tray with the obtained known-good device.

15. A machine-vision apparatus for inspecting devices in trays, each tray populated with a plurality of devices, the apparatus comprising:

first means for holding a first plurality of trays in a first stack of trays, wherein the first plurality of trays includes a first tray in a first inspection position above all other ones of the first plurality of trays in the first stack of trays, wherein each tray of the first plurality of trays in the first stack of trays has a plurality of devices that are to be inspected;

means for performing a first machine-vision inspection of the plurality of devices in the first tray held at the first inspection position;

means for holding trays in a first output stack of trays;

means for automatically moving the first tray off the first stack of trays and eventually to a top position of the means for holding trays in the first output stack of trays; and

means for successively raising the other ones of the first plurality of trays in the first stack of trays to the first inspection position and for repeating performing the first machine-vision inspection.

16. The apparatus of claim 15, wherein the means for performing the first machine-vision inspection includes means for performing a first-side machine-vision inspection of a first side of the first plurality of devices in the first tray, the apparatus further including:

means for inverting the devices that were inspected by the means for performing the first-side machine-vision inspection and for placing the inverted devices back into the first tray; and

means for machine-vision inspecting a second side of the first plurality of devices in the first tray.

17. The apparatus of claim 15, wherein the means for performing a first machine-vision inspection includes means for performing a first-side machine-vision inspection of a first side of the first plurality of devices in the first tray, the apparatus further including:

means for inverting the devices that were inspected by the means for performing the first-side machine-vision inspection and for placing the inverted devices back into a second tray; and

means for machine-vision inspecting a second side of the first plurality of devices in the second tray.

18. The apparatus of claim 15, further comprising:

means for obtaining a known-good device that has previously passed inspection from a second tray that holds devices including some known-good devices that have each previously passed inspection; and

means for using the obtained known-good device to replace a device from the first plurality of devices in the first tray that has not passed inspection.

19. The apparatus of claim 15, further comprising:

means for obtaining a known-good device that has previously passed inspection from a second tray that holds devices including some known-good devices that have each previously passed inspection;

means for using the obtained known-good device to replace a device from the first plurality of devices in the first tray that has not passed inspection; and

means for holding a second plurality of trays in a second output stack of trays, wherein the second plurality of trays includes a second tray, wherein each of the second plurality of trays has a plurality of devices that have not passed the machine-vision inspection, wherein the second tray is a top tray of the second output stack of trays and is used to hold a supply of known-good devices, wherein devices that have not passed the machine-vision inspection, after removal from the first tray, are placed in the second tray, and once all the known-good devices from the second tray have been used as replacements and the second tray holds only devices that have not passed inspection, the second means for holding a second plurality of trays in a second output stack of trays lowers the second plurality of trays holding devices that have not passed inspection.

20. The apparatus of claim 15, further comprising:

means for performing a device-inverting operation on the plurality of devices that were inspected in the first-side machine-vision inspection and placing the inverted devices into a second tray;

means for performing a second machine-vision inspection of the plurality of devices in the second tray held at the top position of the first output stack of trays, wherein the second machine-vision inspection is of a second side of the devices in the second tray and is performed after the device-inverting operation;

means for holding a third stack of trays, wherein the third stack of trays includes a third tray in a top position, the third tray having some known-good devices that have each previously passed inspection;

means for obtaining one of the known-good devices that has previously passed inspection from the third tray; and

means for replacing a device from the first plurality of devices in the first tray that has not passed inspection with the obtained known-good device.