×

Water cooled gas injector

  • US 8,409,353 B2
  • Filed: 10/20/2011
  • Issued: 04/02/2013
  • Est. Priority Date: 04/05/2005
  • Status: Expired due to Fees
First Claim
Patent Images

1. A fluid cooled gas injector configured to inject gas from a distal end of the injector along an injector axis through a sidewall of a processing chamber, comprising:

  • a gas channel formed in an integral member and extending along and surrounding said injector axis and first and second fluid-cooling channels both formed in the integral member and extending along and surrounding respective first and second channel axes which respectively are parallel to and offset from said injector axis and are outside of the gas channel,wherein each of the fluid-cooling channels and of the gas channel does not surround any other of the fluid-cooling channels and of the gas channel,wherein the first and second fluid-cooling channels provide for flows of a cooling fluid along the first and second channel axes respectively and are in continuous thermal contact with the gas channel through the integral member in directions perpendicular to the injector axis along at least central lengths of the first and second fluid cooling channels, andwherein the first and second fluid-cooling channels are connected through a transverse passage formed at least partially in the integral member adjacent the distal end of the injector and have respective external fluid connections at ends thereof opposite the distal end of the injector to allow recirculation of the cooling fluid through the first and second fluid-cooling channels and the transverse passage,wherein the first and second fluid-cooling channels are connected to at least one arc-shaped portion formed in the integral member about the injector axis adjacent the distal end of the injector and provide fluid communication between the first and second fluid-cooling channels,wherein a nozzle is formed in a distal end of the gas channel; and

    further comprising a washer having a central aperture fixed to the injector outside of the gas channel and an outer periphery fixed to a distal end of the integral member radially outside of the fluid-cooling channels, wherein the transverse passage is formed between the integral member and the washer.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×