Glass or glass-ceramic substrate with scratch-resistant coating and method for the production thereof
First Claim
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1. A glass article with a scratch-resistant coating, comprising:
- a glass or glass-ceramic substrate,a silicon oxynitride layer deposited on the substrate as a scratch-resistant layer, wherein the silicon oxynitride layer has a ratio of atomic percentages of oxygen to nitrogen of more than 1 as measured with secondary-ion mass spectrometry and etching of the layer by means of a cesium ion beam, andwherein the silicon oxynitride layer has a layer thickness of at least 500 nanometers, andwherein the silicon oxynitride layer comprises several first layer parts and several second layer parts following one another, the first layer parts having a higher oxygen content than the second layer parts.
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Abstract
The invention in general relates to glass or glass-ceramic products. In order to protect the surface of such products against scratching, a silicon oxynitride coating with special composition is provided.
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Citations
19 Claims
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1. A glass article with a scratch-resistant coating, comprising:
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a glass or glass-ceramic substrate, a silicon oxynitride layer deposited on the substrate as a scratch-resistant layer, wherein the silicon oxynitride layer has a ratio of atomic percentages of oxygen to nitrogen of more than 1 as measured with secondary-ion mass spectrometry and etching of the layer by means of a cesium ion beam, and wherein the silicon oxynitride layer has a layer thickness of at least 500 nanometers, and wherein the silicon oxynitride layer comprises several first layer parts and several second layer parts following one another, the first layer parts having a higher oxygen content than the second layer parts. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A glass article with a scratch-resistant coating, comprising:
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a glass or glass-ceramic substrate, a silicon oxynitride layer deposited on the substrate as a scratch-resistant layer, wherein the silicon oxynitride layer has a ratio of atomic percentages of oxygen to nitrogen of more than 1 as measured with secondary-ion mass spectrometry and etching of the layer by means of a cesium ion beam, wherein the silicon oxynitride layer has a layer thickness of at least 500 nanometers, and wherein the substrate comprises a volume-colored glass ceramic.
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19. A glass article with a scratch-resistant coating, comprising:
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a glass or glass-ceramic substrate, a silicon oxynitride layer deposited on the substrate as a scratch-resistant layer, wherein the silicon oxynitride layer has a ratio of atomic percentages of oxygen to nitrogen of more than 1 as measured with secondary-ion mass spectrometry and etching of the layer by means of a cesium ion beam, and wherein the silicon oxynitride layer has a layer thickness of at least 500 nanometers, wherein the scratch-resistant layer comprises a scratch-resistant coating having multiple layer parts with at least one layer comprising the silicon oxynitride layer, and wherein the multiple layer parts of the scratch-resistant coating comprise an alternating layer system of at least one layer comprising the silicon oxynitride layer and at least one layer comprising a silicon nitride layer.
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Specification