Replaceable coupon for a probing apparatus

• US 8,410,806 B2
• Filed: 11/20/2009
• Issued: 04/02/2013
• Est. Priority Date: 11/21/2008
• Status: Active Grant

• Current Assignee: FormFactor Incorporated
• Original Assignee: Cascade Microtech Incorporated (FormFactor Incorporated)
• Inventors: Smith, Kenneth R.
• Primary Examiner(s): NGUYEN, VINH P
• Application Number:
  US12/592,186
• Publication Number:
  US 20100127725A1
• Time in Patent Office: 1,229 Days
• Field of Search: None
• US Class Current: 324/755.01
• CPC Class Codes: B32B 38/10 Removing layers, or parts of layers, mechanically or chemically
• CPC Class Codes: G01R 1/06711 Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
• CPC Class Codes: G01R 1/06772 High frequency probes
• CPC Class Codes: G01R 1/0735 arranged on a flexible frame or film
• CPC Class Codes: G01R 31/2891 related to sensing or controlling of force, position, temperature G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05
• CPC Class Codes: G01R 35/00 Testing or calibrating of apparatus covered by the other groups of this subclass
• CPC Class Codes: Y10T 29/49126 Assembling bases
• CPC Class Codes: Y10T 29/49208 by assembling plural parts

Abstract

The contacts of a probing apparatus are elastically supported on a replaceable coupon and electrically interconnected with conductors on a membrane or a space transformer.

Claims

1. A coupon for a probing apparatus including a dielectric support having a support surface including surface portions exposing a support conductor, said coupon comprising:

(a) a first coupon surface detachably adhered to said support surface;

(b) a second coupon surface elastically separated from said first coupon surface;

(c) a contact including a contact tip arranged to engage a device surface, said device surface located nearer said second coupon surface than said first coupon surface; and

(d) a post having a first end substantially flush with said second coupon surface and a second end substantially flush with said first coupon surface.

2. The coupon of claim 1 wherein said contact further comprises a rigid, elongate contact beam affixed to said second coupon surface, said contact tip affixed to said contact beam nearer a first end of said contact beam than a second end of said contact beam.

3. The coupon of claim 2 wherein said contact further comprises said post, wherein said post is affixed to said contact beam nearer said second end of said contact beam than said first end of said contact beam, said post having an end portion arranged to contact said support conductor at a location nearer said first coupon surface than said second coupon surface.

4. The coupon of claim 1 wherein said coupon is detachably adhered to said support surface by an adhesive.

5. A probing apparatus comprising:

(a) a support conductor;

(b) a dielectric support including a support surface having surface portions exposing said support conductor;

(c) a coupon having a first coupon surface detachably adhered to said support surface and a second coupon surface elastically separated from said first coupon surface;

(d) a contact including a contact tip arranged to engage a device surface, said device surface located nearer said second coupon surface than said first coupon surface; and

(e) a post having a first end substantially flush with said second coupon surface and a second end substantially flush with said first coupon surface.

6. The probing apparatus of claim 5 wherein said contact further comprises a rigid, elongate contact beam affixed to said second coupon surface, said contact tip affixed to said contact beam nearer a first end of said contact beam than a second end of said contact beam.

7. The probing apparatus of claim 6 wherein said contact further comprises said post, wherein said post is affixed to said contact beam nearer said second end of said contact beam than said first end of said contact beam, said post having an end portion arranged to contact said support conductor at a location nearer said first coupon surface than said second coupon surface.

8. The probing apparatus of claim 5 wherein said coupon is detachably adhered to said support surface by an adhesive.

9. The probing apparatus of claim 5 wherein said dielectric support comprises a flexible membrane including a membrane surface supported by a substantially rigid membrane support.

10. The probing apparatus of claim 9 wherein said contact further comprises a rigid, elongate contact beam affixed to said second coupon surface, said contact tip affixed to said contact beam nearer a first end of said contact beam than a second end of said contact beam.

11. The probing apparatus of claim 10 wherein said contact further comprises said post, wherein said post is affixed to said contact beam nearer said second end of said contact beam than said first end of said contact beam, said post having an end portion arranged to contact said support conductor at a location nearer said first coupon surface than said second coupon surface.

12. The probing apparatus of claim 9 wherein said coupon is detachably adhered to said support surface by an adhesive.

13. The probing apparatus of claim 5 wherein said dielectric support comprises a space transformer.

14. The probing apparatus of claim 13 wherein said contact further comprises a rigid, elongate contact beam affixed to said second coupon surface, said contact tip affixed to said contact beam nearer a first end of said contact beam than a second end of said contact beam.

15. The probing apparatus of claim 14 wherein said contact further comprises said post, wherein said post is affixed to said contact beam nearer said second end of said contact beam than said first end of said contact beam, said post having an end portion arranged to contact said support conductor at a location nearer said first coupon surface than said second coupon surface.

16. The probing apparatus of claim 14 wherein said coupon is detachably adhered to said support surface by an adhesive.