Pattern forming method, pattern forming apparatus, and device manufacturing method

• US 8,411,271 B2
• Filed: 12/28/2006
• Issued: 04/02/2013
• Est. Priority Date: 12/28/2005
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shibazaki, Yuichi
• Primary Examiner(s): STOCK JR, GORDON J
• Application Number:
  US11/646,559
• Publication Number:
  US 20070159632A1
• Time in Patent Office: 2,287 Days
• Field of Search: None
• US Class Current: 356/401
• CPC Class Codes: G03F 7/70733 Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
• CPC Class Codes: G03F 9/7003 Alignment type or strategy, e.g. leveling, global alignment

Abstract

A plurality of wafer marks on a wafer is detected while a wafer stage moves from a loading position where a wafer is delivered onto the wafer stage to an exposure starting position where exposure of a wafer begins, with a part of an alignment system also moving, using the alignment system. Accordingly, the time required for mark detection can be reduced, therefore, it becomes possible to increase the throughput of the entire exposure process.

Claims

1. A pattern forming method of forming a pattern on a plurality of divided areas of an object, the method comprising:

a first process of detecting a mark associated with one of the divided areas on the object while the object is being moved; and

a second process of forming a pattern in the divided areas on the object using the detection results of the associated mark,

wherein, in the first process, a movement of at least a part of a mark detection system by an image processing method is controlled so that the associated mark is detected by the mark detection system while the object is being moved, and a first part of marks necessary for forming a pattern on all divided areas subject to pattern forming on the object are detected prior to performing the second process.

2. The pattern forming method of claim 1 wherein

in the first process, a plurality of marks is detected while changing a position relation between the object and the mark detection system.

3. The pattern forming method of claim 1 wherein

in the first process, after a mark detection, at least a part of the mark detection system moves in a direction different from a movement direction of the object until a next mark is detected.

4. The pattern forming method of claim 1 further comprising:

a third process of detecting a second part of marks necessary for forming a pattern on all the divided areas subject to pattern forming, which are not included in the first part of marks, the third process being performed in parallel with the second process where a pattern is formed on a divided area on which a pattern can be formed, based on the detection results of the marks in the first process.

5. The pattern forming method of claim 1 wherein

on the pattern forming, positional information of the mark detection system and positional information of the object are used.

6. The pattern forming method of claim 1 wherein

positional information of the associated mark is detected based on positional information of the mark detection system and positional information of the object.

7. The pattern forming method of claim 1 wherein

on the pattern forming, rotational information of the mark detection system is used.

8. The pattern forming method of claim 1 wherein

positional information of the associated mark is detected based on positional information and rotational information of the mark detection system and positional information of the object.

9. The pattern forming method of claim 1 wherein

in the first process, a plurality of the marks is detected using a plurality of mark detection systems.

10. The pattern forming method of claim 1 wherein

in the first process, the associated mark is detected in a state where the object and the mark detection system are relatively stationary.

11. A device manufacturing method including a process of forming a pattern on a sensitive object using the pattern forming method of claim 1.

12. The pattern forming method of claim 1 wherein

the object is moved by moving a moving section that holds the object.

13. The pattern forming method of claim 1 wherein

the first process is performed at least after the beginning of pattern forming with respect to the object.

14. The pattern forming method of claim 1 wherein

information related to a surface shape of the object is detected while the object is being moved by a detection system different from the mark detection system, and the detection results of the surface shape are used in the pattern forming.

15. The pattern forming method of claim 1 wherein

a pattern is formed by exposing the object.

16. The pattern forming method of claim 1 wherein

in the first process, the associated mark is maintained in a detection area of the mark detection system during the detection of the associated mark.

17. The pattern forming method of claim 12 wherein

the first process is performed while the moving section moves at least from a loading position where the object is held by the moving section to a position where the pattern forming with respect to the object begins.

18. The pattern forming method of claim 13 wherein

the first process is performed also before the beginning of pattern forming with respect to the object.

19. The pattern forming method of claim 14 wherein

at least a part of the detection operation of the information related to the surface shape is performed in parallel with a detection operation of the associated mark.

20. The pattern forming method of claim 15 wherein

liquid immersion exposure is performed on the object.

21. The pattern forming method of claim 16 wherein

in the first process, the associated mark is substantially static in the detection area of the mark detection system during the detection of the associated mark.

22. A pattern forming method of forming a pattern on a plurality of divided areas of an object, the method comprising:

a first process of detecting a mark associated with one of the divided areas on the object while the object is being moved; and

a second process of forming a pattern in the divided areas on the object using the detection results of the associated mark,

wherein, in the first process, a movement of a detection area of a mark detection system by an image processing method is controlled so that the associated mark is detected by the mark detection system while the object is being moved, and a first part of marks necessary for forming a pattern on all divided areas subject to pattern forming on the object are detected prior to performing the second process.

23. The pattern forming method of claim 22 wherein

in the second process, detection results of a rest of the marks necessary for forming a pattern on all the divided areas detected by the mark detection system after a beginning of pattern forming with respect to the object are also used.

24. A device manufacturing method including a process of forming a pattern on a sensitive object using the pattern forming method of claim 22.

25. The pattern forming method of claim 22 wherein

information related to a surface shape of the object is detected while the object is being moved by a detection system different from the mark detection system, and detection results of the surface shape are used in the pattern forming.

26. The pattern forming method of claim 22 wherein

a pattern is formed by exposing the object.

27. The pattern forming method of claim 22 wherein

in the first process, the associated mark is maintained in the detection area of the mark detection system during the detection of the associated mark.

28. The pattern forming method of claim 22 wherein

in the first process, the object is moved in a first direction in which the plurality of divided areas on which a pattern is to be formed is disposed on the object.

29. The pattern forming method of claim 25 wherein

at least a part of a detection operation of the information related to the surface shape is performed in parallel with a detection operation of the associated mark.

30. The pattern forming method of claim 26 wherein

liquid immersion exposure is performed on the object.

31. The pattern forming method of claim 27 wherein

in the first process, the associated mark is substantially static in the detection area of the mark detection system during the detection of the associated mark.

32. The pattern forming method of claim 28 wherein

in the first process, a plurality of marks is detected whose position in the first direction is different on the object.

33. The pattern forming method of claim 28 wherein

in the first process, marks on the object are detected by a plurality of mark detection systems that have detection areas of different positions in a second direction orthogonal to the first direction.

34. The pattern forming method of claim 33 wherein

in the first process, marks of different positions in the second direction on the object are detected by changing a distance of the detection areas in the second direction.

35. A pattern forming method of forming a pattern on an object wherein

a first mark on the object is detected by a mark detection system, and pattern forming with respect to the object begins using the detection results of the first mark detected before a beginning of pattern forming, whereby

a second mark on the object is detected by the mark detection system even after the beginning of pattern forming, and the detection results of the second mark detected after the beginning of pattern forming are used in the pattern forming,

wherein a pattern is formed in each of a plurality of divided areas on the object, and among the plurality of divided areas, in a first group of divided areas including a divided area on which the pattern is formed first, detection results of the first mark detected before the beginning of pattern forming are used, and in a second group of divided areas different from the first group of divided areas, detection results of the second mark detected after the beginning of pattern forming are used.

36. The pattern forming method of claim 35 wherein

in the second group of divided areas, detection results of the first mark detected before the beginning of pattern forming are also used.

37. The pattern forming method of claim 35 wherein

the pattern forming on the second group of divided areas is performed later than the pattern forming of the first group of divided areas.

38. A device manufacturing method including a process of forming a pattern on a sensitive object using the pattern forming method of claim 35.

39. The pattern forming method of claim 35 wherein

a pattern is formed by exposing the object.

40. The pattern forming method of claim 35 wherein

detection of the first and second marks is performed with a detection area being moved while the object is being moved.

41. The pattern forming method of claim 35 wherein

before the beginning of pattern forming, the object is moved in a first direction and a plurality of marks of different positions in the first direction is detected.

42. The pattern forming method of claim 35 wherein

before the beginning of pattern forming, the object is moved in a first direction in which a plurality of divided areas on which a pattern is to be formed are disposed on the object, and a plurality of marks of different positions in the first direction is detected.

43. The pattern forming method of claim 39 wherein

liquid immersion exposure is performed on the object.

44. The pattern forming method of claim 40 wherein

information related to a surface shape of the object is detected while the object is being moved by a detection system different from the mark detection system, and detection results of the surface shape are used in the pattern forming.

45. The pattern forming method of claim 44 wherein

at least a part of a detection operation of the information related to the surface shape is performed in parallel with a detection operation of the first and second marks.

46. The pattern forming method of claim 41 wherein

marks on the object are detected by a plurality of mark detection systems that have detection areas of different positions in a second direction orthogonal to the first direction.

47. The pattern forming method claim 41 wherein

information related to a surface shape of the object is detected while the object is being moved by a detection system different from the mark detection system, and detection results of the surface shape are used in the pattern forming.

48. The pattern forming method of claim 46 wherein

marks of different positions in the second direction on the object are detected by changing a distance of the detection areas in the second direction.

49. The pattern forming method of claim 47 wherein

at least a part of a detection operation of the information related to the surface shape is performed in parallel with a detection operation of the plurality of marks of different positions.

50. The pattern forming method of claim 42 wherein

at least one of the first mark, the second mark and the plurality of marks on the object are detected by a plurality of mark detection systems that have detection areas of different positions in a second direction orthogonal to the first direction.

51. The pattern forming method of claim 42 wherein

information related to a surface shape of the object is detected while the object is being moved by a detection system different from the mark detection system, and detection results of the surface shape are used in the pattern forming.

52. The pattern forming method of claim 50 wherein

marks of different positions in the second direction on the object are detected by changing a distance of the detection areas in the second direction.

53. The pattern forming method of claim 51 wherein

at least a part of a detection operation of the information related to the surface shape is performed in parallel with a detection operation of the plurality of marks of different positions.

54. A pattern forming apparatus that forms a pattern on an object held by a moving section, the apparatus comprising:

a mark detection system that can have at least a part of the mark detection system moved; and

a control unit that moves the at least the part of the mark detection system configured to detect a mark on the object while the moving section is being moved,

the control unit detecting a part of marks necessary for forming a pattern on all divided areas subject to pattern forming on the object, and detecting a rest of the marks necessary for forming a pattern on all the divided areas subject to pattern forming, in parallel with forming a pattern on a divided area on which a pattern can be formed based on detection results of the part of the marks necessary for forming the pattern.

55. The pattern forming apparatus of claim 54 wherein

a pattern is formed on the object using detection results of at least one of the part of the marks necessary for forming the pattern and the rest of the marks necessary for forming the pattern.

56. The pattern forming apparatus of claim 54 wherein

the control unit controls a movement of the at least the part of the mark detection system so that detection of the mark on the object is performed while the moving section is being moved at least from a loading position where the moving section holds the object to a position where pattern forming with respect to the object begins.

57. The pattern forming apparatus of claim 54 wherein

the control unit controls a movement of the at least the part of the mark detection system so that the at least the part of the mark detection system follows the movement of the moving section when detecting the mark on the object.

58. The pattern forming apparatus of claim 54 wherein

the control unit detects a plurality of marks on the object while changing a positional relation between the object and the mark detection system.

59. The pattern forming apparatus of claim 54 wherein

the control unit moves at least a part of the mark detection system in a direction different from a movement direction of the moving section after a mark detection until a next mark detection.

60. The pattern forming apparatus of claim 54 wherein

the mark detection system has a photodetection element and a cooling mechanism for cooling the photodetection element.

61. The pattern forming apparatus of claim 54, the apparatus further comprising:

a measurement moving section that can move independently from the moving section, and performs measurement necessary for the pattern forming while the object on the moving section is exchanged.

62. The pattern forming apparatus of claim 54, the apparatus further comprising:

a separate moving section that can move independently from the moving section, and holds the object on which detection of the at least one of the part of the marks necessary for forming the pattern and the rest of the marks necessary for forming the pattern is performed by the mark detection system while pattern forming is performed with respect to the object held by the moving section.

63. The pattern forming apparatus of claim 54, the apparatus further comprising:

an optical system that irradiates an illumination light on the object, whereby

a pattern is formed by exposing the object with the illumination light.

64. A device manufacturing method including a process of forming a pattern on a sensitive object using the pattern forming apparatus of claim 54.

65. The pattern forming apparatus of claim 54 wherein

the control unit controls a movement of the at least the part of the mark detection system so that detection of the mark on the object is performed at least after pattern forming has begun on the object.

66. The pattern forming apparatus of claim 54, the apparatus further comprising:

a detection unit that detects positional information of the object in a direction perpendicular to a predetermined plane on which the object moves at each of a plurality of measurement positions disposed between a loading position where the moving section holds the object and a pattern forming starting position with respect to the object.

67. The pattern forming apparatus of claim 54, the apparatus further comprising:

a sensor that detects positional information of the mark detection system, whereby

the positional information of the mark detection system and positional information of the object are used on pattern forming.

68. The pattern forming apparatus of claim 63, the apparatus further comprising:

a liquid supply mechanism that supplies liquid in a space between the optical system and the object, whereby

the object is exposed with the illumination light via the optical system and the liquid.

69. The pattern forming apparatus of claim 65 wherein

the control unit controls a movement of the at least the part of the mark detection system so that detection of the mark on the object is performed also before a beginning of pattern forming with respect to the object.

70. The pattern forming apparatus of claim 66 wherein

the control unit computes information related to a surface shape of the object based on detection results of the detection unit.

71. The pattern forming apparatus of claim 66 wherein

the control unit performs at least a part of a detection operation by the detection unit in parallel with a detection operation of at least one of the part of the marks necessary for forming the pattern and the rest of the marks necessary for forming the pattern.

72. The pattern forming apparatus of claim 67 wherein

positional information of the mark on the object is detected based on the positional information of the mark detection system detected by the sensor and the positional information of the object.

73. The pattern forming apparatus of claim 67 wherein

the sensor also detects rotational information of the mark detection system, whereby

the rotational information of the mark detection system is used on pattern forming.

74. The pattern forming apparatus of claim 67 wherein

the sensor includes an interferometer.

75. The pattern forming apparatus of claim 73 wherein

positional information of at least one of the part of the marks necessary for forming the pattern and the rest of the marks necessary for forming the pattern is detected based on the positional information and the rotational information of the mark detection system detected by the sensor and the positional information of the object.

76. The pattern forming apparatus of claim 63 wherein

the mark detection system is separated in a vibrating manner from a body that supports the optical system.

77. The pattern forming apparatus of claim 63 wherein

the optical system includes a projection optical system that projects a pattern on the object, and at least the projection optical system is supported by a body.

78. The pattern forming apparatus of claim 73, the apparatus further comprising:

a sensor that detects positional information of the mark detection system with the body serving as a reference.

79. The pattern forming apparatus of claim 78 wherein

the sensor includes an interferometer, and

of the interferometer, at least a branching optical system that branches light into a reference beam and a measurement beam moves with at least a part of the mark detection system, and a reflection surface on which the measurement beam is incident is arranged on the body.

80. The pattern forming apparatus of claim 77, the apparatus further comprising:

a sensor that detects positional information of the mark detection system with the body serving as a reference.

81. The pattern forming apparatus of claim 80 wherein

the sensor includes an interferometer, and

of the interferometer, at least a branching optical system that branches light into a reference beam and a measurement beam moves with at least a part of the mark detection system, and a reflection surface on which the measurement beam is incident is arranged on the body.

82. A pattern forming apparatus that forms a pattern on an object held by a moving section, the apparatus comprising:

a mark detection system having a movable member; and

a control unit that controls a translational movement of the movable member in a predetermined direction to cause a detection area of the mark detection system to move and thereby detect a mark on the object while the moving section is being moved.

83. The pattern forming apparatus of claim 82, the apparatus further comprising:

a measurement moving section that can move independently from the moving section, and performs measurement necessary for the pattern forming while the object on the moving section is exchanged.

84. The pattern forming apparatus of claim 82, the apparatus further comprising:

a separate moving section that can move independently from the moving section, and holds the object on which detection of the mark is performed by the mark detection system while pattern forming is performed with respect to the object held by the moving section.

85. A device manufacturing method including a process of forming a pattern on a sensitive object using the pattern forming apparatus of claim 82.

86. The pattern forming apparatus of claim 82 wherein

the control unit forms a pattern on the object using detection results of the mark.

87. The pattern forming apparatus of claim 82, the apparatus further comprising:

a detection unit that detects positional information of the object in a direction perpendicular to a predetermined plane on which the object moves at each of a plurality of measurement positions disposed between a loading position where the moving section holds the object and a pattern forming starting position with respect to the object.

88. The pattern forming apparatus of claim 82 wherein

the control unit moves the moving section in a first direction where a plurality of divided areas on which a pattern is to be formed is disposed on the object, in parallel with moving the detection area of the mark detection system.

89. The pattern forming apparatus of claim 82, the apparatus further comprising:

an optical system that irradiates an illumination light on the object, wherein

a pattern is formed by exposing the object with the illumination light.

90. The pattern forming apparatus of claim 86 wherein

the control unit uses the detection results of the mark on the object by the mark detection system after a beginning of pattern forming with respect to the object.

91. The pattern forming apparatus of claim 87 wherein

the control unit computes information related to a surface shape of the object based on detection results of the detection unit.

92. The pattern forming apparatus of claim 87 wherein

the control unit performs at least a part of a detection operation by the detection unit in parallel with a detection operation of the mark.

93. The pattern forming apparatus of claim 88 wherein

the mark detection system detects a plurality of marks of different positions in the first direction.

94. The pattern forming apparatus of claim 88, the apparatus comprising:

a plurality of mark detection systems, wherein

each of the plurality of mark detection systems has a detection area at a different position in a second direction orthogonal to the first direction.

95. The pattern forming apparatus of claim 94 wherein

the control unit detects marks of different positions in the second direction on the object by changing a distance of the detection areas in the second direction on detection of the marks on the object with the mark detection systems while the moving section is being moved.

96. The pattern forming apparatus of claim 89, the apparatus further comprising:

a liquid supply mechanism that supplies liquid in a space between the optical system and the object, wherein

the object is exposed with the illumination light via the optical system and the liquid.

97. The pattern forming apparatus of claim 89 wherein

the mark detection system is separated in a vibrating manner from a body that supports the optical system.

98. The pattern forming apparatus of claim 89 wherein

the optical system includes a projection optical system that projects the pattern on the object, and at least the projection optical system is supported by a body.

99. The pattern forming apparatus of claim 97, the apparatus further comprising:

a sensor that detects positional information of the mark detection system with the body serving as a reference.

100. The pattern forming apparatus of claim 99 wherein

the sensor includes an interferometer, and

the interferometer has at least a branching optical system, wherein the branching optical system that branches light into a reference beam and a measurement beam moves with at least a part of the mark detection system, and a reflection surface on which the measurement beam is incident is arranged on the body.

101. The pattern forming apparatus of claim 98, the apparatus further comprising:

a sensor that detects positional information of the mark detection system with the body serving as a reference.

102. The pattern forming apparatus of claim 101 wherein

the sensor includes an interferometer, and

the interferometer has at least a branching optical system, wherein the branching optical system that branches light into a reference beam and a measurement beam moves with at least a part of the mark detection system, and a reflection surface on which the measurement beam is incident is arranged on the body.

103. A pattern forming apparatus that forms a pattern on an object held by a moving section, the apparatus comprising:

a mark detection system that detects a mark on the object; and

a control unit that controls detection of the mark on the object using the mark detection system and pattern forming with respect to the object, wherein

the control unit detects the mark on the object with the mark detection system and begins pattern forming with respect to the object using the detection results, and after a beginning of pattern forming, continues to detect the mark on the object with the mark detection system and uses the detection results in the pattern forming,

the object has a plurality of divided areas in which a pattern is formed,

the control unit uses;

detection results of the mark detected before the beginning of pattern forming when forming a pattern with respect to a first group of divided areas including a divided area on which the pattern is formed first among the plurality of divided areas, and

detection results of the mark detected after the beginning of pattern forming when forming a pattern with respect to a second group of divided areas different from the first group of divided areas.

104. The pattern forming apparatus of claim 103 wherein

the control unit also uses detection results of a mark detected before the beginning of pattern forming when forming a pattern with respect to the second group of divided areas.

105. The pattern forming apparatus of claim 103 wherein

the control unit performs the pattern forming on the second group of divided areas later than the pattern forming of the first group of divided areas.

106. The pattern forming apparatus of claim 103 wherein

the control unit performs detection of the mark moving a detection area while the object is being moved.

107. The pattern forming apparatus of claim 106 wherein

the control unit performs at least a part of a detection operation by a detection unit in parallel with a detection operation of the mark.

108. The pattern forming apparatus of claim 103, the apparatus further comprising:

a measurement moving section that can move independently from the moving section, and performs measurement necessary for the pattern forming while the object on the moving section is exchanged.

109. The pattern forming apparatus of claim 103, the apparatus further comprising:

a separate moving section that can move independently from the moving section, and holds the object on which detection of the mark is performed by the mark detection system while pattern forming is performed with respect to the object held by the moving section.

110. A device manufacturing method including a process of forming a pattern on a sensitive object using the pattern forming apparatus of claim 103.

111. The pattern forming apparatus of claim 103 wherein

the control unit moves the moving section in a first direction before the beginning of pattern forming, and detects a plurality of marks of different positions in the first direction on the object.

112. The pattern forming apparatus of claim 103 wherein

the control unit moves the moving section in a first direction in which a plurality of divided areas on which a pattern is to be formed are disposed on the object before the beginning of pattern forming, and detects a plurality of marks of different positions in the first direction.

113. The pattern forming apparatus of claim 103, the apparatus further comprising:

a detection unit that detects positional information of the object in a direction perpendicular to a predetermined plane on which the object moves at each of a plurality of measurement positions disposed between a loading position where the moving section holds the object and a pattern forming starting position with respect to the object.

114. The pattern forming apparatus of claim 103, the apparatus further comprising:

an optical system that irradiates an illumination light on the object, whereby

a pattern is formed by exposing the object with the illumination light.

115. The pattern forming apparatus of claim 111, the apparatus comprising:

a plurality of mark detection systems, wherein

each of the plurality of the mark detection systems has a detection area at a different position in a second direction orthogonal to the first direction.

116. The pattern forming apparatus of claim 115 wherein

the control unit detects marks of different positions in the second direction on the object by changing a distance of the detection areas in the second direction.

117. The pattern forming apparatus of claim 112, the apparatus comprising:

a plurality of the mark detection systems, wherein

each of the plurality of mark detection systems has a detection area at a different position in a second direction orthogonal to the first direction.

118. The pattern forming apparatus of claim 117 wherein

the control unit detects marks of different positions in the second direction on the object by changing a distance of the detection areas in the second direction.

119. The pattern forming apparatus of claim 113 wherein

the control unit computes information related to a surface shape of the object based on detection results of the detection unit.

120. The pattern forming apparatus of claim 113 wherein

the control unit performs at least a part of a detection operation by the detection unit in parallel with a detection operation of the mark.

121. The pattern forming apparatus of claim 114 wherein

the mark detection system is separated in a vibrating manner from a body that supports the optical system.

122. The pattern forming apparatus of claim 114, the apparatus further comprising:

a liquid supply mechanism that supplies liquid in a space between the optical system and the object, whereby

the object is exposed with the illumination light via the optical system and the liquid.

123. The pattern forming apparatus of claim 121, the apparatus further comprising:

a sensor that detects positional information of the mark detection system with the body serving as a reference.

124. The pattern forming apparatus of claim 121 wherein

the optical system includes a projection optical system that projects a pattern on the object, and at least the projection optical system is supported by the body.

125. The pattern forming apparatus of claim 123 wherein

the sensor includes an interferometer, and

of the interferometer, at least a branching optical system that branches light into a reference beam and a measurement beam moves with at least a part of the mark detection system, and a reflection surface on which the measurement beam is incident is arranged on the body.

126. The pattern forming apparatus of claim 124, the apparatus further comprising:

a sensor that detects positional information of the mark detection system with the body serving as a reference.

127. The pattern forming apparatus of claim 126 wherein

the sensor includes an interferometer, and

of the interferometer, at least a branching optical system that branches light into a reference beam and a measurement beam moves with at least a part of the mark detection system, and a reflection surface on which the measurement beam is incident is arranged on the body.