Microelectronic sensor device for optical examinations on a wetted surface
First Claim
1. A microelectronic sensor device for optical examinations in an investigation region of a carrier, the microelectronic sensor device comprisinga light source for emitting an input light beam;
- a contact surface for receiving the input light beam and reflecting an output light beam;
a light detector for determining a characteristic parameter of the output light beam reflected from the contact surface;
an evaluation unit for when the characteristic parameter indicates wetness, detecting a wetting grade of the investigation region based on the characteristic parameter, the wetting grade indicating an amount of the contact surface by a fluid.
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Accused Products
Abstract
A method and a microelectronic sensor device for making optical examinations in an investigation region at the contact surface of a carrier, wherein an input light beam is sent from a light source towards the investigation region, and wherein an output light beam coming from the investigation region is detected by a light detector. An evaluation unit that is coupled to the light detector is adapted to determine the wetting grade of the investigation region based on a characteristic parameter of the output light beam. The evaluation unit may be adapted to determine a change in the light intensity caused by a liquid contacting the contact surface. The wetting grade may be detected in a test region that is located adjacent to the investigation region and that has a higher roughness than the investigation region.
38 Citations
16 Claims
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1. A microelectronic sensor device for optical examinations in an investigation region of a carrier, the microelectronic sensor device comprising
a light source for emitting an input light beam; -
a contact surface for receiving the input light beam and reflecting an output light beam; a light detector for determining a characteristic parameter of the output light beam reflected from the contact surface; an evaluation unit for when the characteristic parameter indicates wetness, detecting a wetting grade of the investigation region based on the characteristic parameter, the wetting grade indicating an amount of the contact surface by a fluid. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 16)
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15. A method for making optical examinations in an investigation region at the contact surface of a carrier, the method comprising acts of:
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emitting an input light beam towards the contact surface; determining a characteristic parameter of an output light beam that comes from the contact surface; detecting a wetting grade of the investigation region based on the characteristic parameter when the characteristic parameter indicates wetness, the wetting grade indicating an amount of the contact surface contacted by a fluid.
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Specification