Elastic wave measurement apparatus and method

• US 8,413,516 B2
• Filed: 03/17/2010
• Issued: 04/09/2013
• Est. Priority Date: 09/19/2007
• Status: Expired due to Fees

• Current Assignee: Toppan Printing Co., Ltd. (TOPPAN Holdings, Inc.)
• Original Assignee: Toppan Printing Co., Ltd. (TOPPAN Holdings, Inc.)
• Inventors: Noguchi, Kazuhiro, Nakaso, Noritaka
• Primary Examiner(s): Macchiarolo, Peter J
• Assistant Examiner(s): MILLER, ROSE MARY
• Application Number:
  US12/659,701
• Publication Number:
  US 20100170345A1
• Time in Patent Office: 1,119 Days
• Field of Search: 736/25, 736/26, 736/28, 736/41
• US Class Current: 73/641
• CPC Class Codes: G01N 2291/0423 Surface waves, e.g. Rayleigh waves, Love waves
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/2462 Probes with waveguides, e.g. SAW devices
• CPC Class Codes: G01N 29/343 pulse waves, e.g. particular sequence of pulses, bursts
• CPC Class Codes: G01N 29/348 with frequency characteristics, e.g. single frequency signals, chirp signals measuring frequency of mechanical vibrations or acoustic waves in general G01H1/06, G01H3/04; measuring frequency or analysing frequency spectra G01R23/00

Abstract

The elastic wave measurement apparatus, when a high-frequency burst signal is input to the first ball SAW device, an input destination of the high-frequency burst signal is switched in sequence to another one of the ball SAW devices before a detection time at which an output signal from the first ball SAW device is detected, and at and after the detection time, output signals of the response characteristics of those ball SAW devices from the first ball SAW device to the last ball SAW device are detected in sequence.

Claims

1. An elastic wave measurement apparatus configured to measure response characteristics from a plurality of elastic wave devices, the apparatus comprising:

a high-frequency signal generator that generates a high-frequency signal that is input to an elastic wave device among the plurality of elastic wave devices based on an input destination;

a switch that sequentially switches the input destination of the high-frequency signal among the plurality of elastic wave devices, from the elastic wave device to which the high-frequency signal is being input to another elastic wave device among the plurality of elastic wave devices, before a detection time at which an output signal from the elastic wave device is detected;

a plurality of detectors each associated with a corresponding elastic wave device among the plurality of elastic wave devices, that each detect an output signal of the corresponding elastic wave device at a time that is

after a detection time of the corresponding elastic wave device,

different for each of the corresponding elastic wave devices, and

based on a predetermined number of circuits for the corresponding elastic wave device;

an analog to digital converter that sequentially receives the detected output signals from the plurality of detectors at the different times; and

a measurement device that measures elastic waves excited at each of the elastic wave devices, based on an output from the analog to digital converter.

2. The elastic wave measurement apparatus according to claim 1, wherein the measurement device measures a phase of the elastic wave excited at each of the elastic wave devices.

3. The elastic wave measurement apparatus according to claim 1, wherein the measurement device measures an intensity of the elastic wave excited at each of the elastic wave devices.

4. The elastic wave measurement apparatus according to claim 1, wherein the measurement device simultaneously measures a phase and an intensity of the elastic wave excited at each of the elastic wave devices.

5. The elastic wave measurement apparatus according to claim 1, wherein the measurement device measures a delay time of the elastic wave excited at each of the elastic wave devices for a reference time.

6. The elastic wave measurement apparatus according to claim 1, further comprising:

an averaging unit that averages successive output signals of an elastic wave device to which the high-frequency signal is repetitively input a predetermined number of times.

7. The elastic wave measurement apparatus according to claim 1, wherein when an output signal from an elastic wave device is an analog signal, the associated detector detects the output signal after converting the analog signal into a digital signal.

8. The elastic wave measurement apparatus according to claim 1, wherein the switch switches the input destination of the high-frequency signal from the elastic wave device to the another elastic wave device at predetermined time intervals.

9. The elastic wave measurement apparatus according to claim 1, wherein when a time at which the input destination of the high-frequency signal is switched from the elastic wave device to the another elastic wave device coincides with a time at which the output signal from the another elastic wave devices is detected, the switch stands by to input the high-frequency signal.

10. The elastic wave measurement apparatus according to claim 1, wherein each of the elastic wave devices comprises a surface acoustic wave device in which a surface acoustic wave is excited on a surface of a piezoelectric substance.

11. The elastic wave measurement apparatus according to claim 10, wherein in each of the elastic wave devices, the piezoelectric substance is provided with a cylindrical surface and includes a circular path along which the surface acoustic wave excited on the cylindrical surface loops.

12. The elastic wave measurement apparatus according to claim 10, wherein each of the elastic wave devices comprises a spherical surface acoustic wave device in which a piezoelectric substance is formed into a spherical shape and includes a circular path along which the excited surface acoustic wave loops.

13. The elastic wave measurement apparatus according to claim 11, wherein an input device inputs the high-frequency signal to each of the elastic wave devices in such a manner that the surface acoustic wave becomes shorter than the time in which the surface acoustic wave makes a circuit along the circular path.

14. The elastic wave measurement apparatus according to claim 12, wherein an input device inputs the high-frequency signal to each of the elastic wave devices in such a manner that the surface acoustic wave becomes shorter than the time in which the surface acoustic wave makes a circuit along the circular path.

15. An elastic wave measurement method used for an elastic wave measurement apparatus comprising a plurality of elastic wave devices configured to output response characteristics of elastic waves in accordance with input of a high-frequency signal, a high-frequency signal generator configured to generate the high-frequency signal, and a switch configured to input the high-frequency signal generated by the high-frequency signal generator to each of the elastic wave devices by sequentially switching the input to each of the elastic wave devices, the method comprising:

inputting the high-frequency signal to an elastic wave device among the plurality of elastic wave devices;

switching the high-frequency signal to among the plurality of elastic wave devices, from the elastic wave device the high-frequency signal is being input, to another elastic wave device among the plurality of elastic wave devices, before a detection time at which an output signal from the first elastic wave device is detected;

detecting an output signal of each of the plurality of elastic wave devices at a time that is

after a respective detection time of each of the elastic wave devices,

different for each of the elastic wave devices, and

based on a predetermined number of circuits for each of the elastic wave devices;

providing the detected output signal to an analog to digital converter that sequentially receives the detected output signals;

measuring elastic waves excited at each of the elastic wave devices based on an output from the analog to digital converter.

16. The elastic wave measurement method according to claim 15, wherein detecting the output signal comprises measuring a phase of the elastic wave excited at each of the elastic wave devices.

17. The elastic wave measurement method according to claim 15, wherein measuring the elastic waves comprises measuring an intensity of the elastic wave excited at each of the elastic wave devices.

18. The elastic wave measurement method according to claim 15, wherein measuring the elastic waves comprises simultaneously measuring a phase and an intensity of the elastic wave excited at each of the elastic wave devices.

19. The elastic wave measurement method according to claim 15, wherein in measuring the elastic waves comprises measuring a delay time of the elastic wave excited at each of the elastic wave devices for a reference time.

20. The elastic wave measurement method according to claim 15, further comprising:

averaging successive output signals of an elastic wave device to which the high frequency signal is repetitively input a predetermined number of times.

21. The elastic wave measurement method according to claim 15, wherein when the detected output signal is an analog signal, the output signal is detected after the analog signal is converted into a digital signal.

22. The elastic wave measurement method according to claim 15, wherein the high-frequency signal being input to the elastic wave devices is switched from the elastic wave device to the another elastic wave device at predetermined time intervals.

23. The elastic wave measurement method according to claim 15, wherein when a time at which the high-frequency signal is switched from the elastic wave device to the another elastic wave device coincides with a time at which the output signal from the another elastic wave device is detected, input of the high-frequency signal is made on standby.

24. The elastic wave measurement method according to claim 15, wherein each of the elastic wave devices is a surface acoustic wave device in which a surface acoustic wave is excited on a surface of a piezoelectric substance.

25. The elastic wave measurement method according to claim 24, wherein in each of the elastic wave devices, the piezoelectric substance is provided with a cylindrical surface and includes a circular path along which the surface acoustic wave excited on the cylindrical surface loops.

26. The elastic wave measurement method according to claim 24, wherein each of the elastic wave devices comprises a spherical surface acoustic wave device in which a piezoelectric substance is formed into a spherical shape and includes a circular path along which the excited surface acoustic wave loops.

27. The elastic wave measurement method according to claim 25, wherein the high-frequency signal is input to each of the elastic wave devices in such a manner that the surface acoustic wave becomes shorter than the time in which the surface acoustic wave makes a circuit along the circular path.

28. The elastic wave measurement method according to claim 26, wherein the high-frequency signal is input to each of the elastic wave devices in such a manner that the surface acoustic wave becomes shorter than the time in which the surface acoustic wave makes a circuit along the circular path.