Scanned source oriented nanofiber formation

• US 8,413,603 B2
• Filed: 05/21/2009
• Issued: 04/09/2013
• Est. Priority Date: 09/26/2003
• Status: Expired due to Fees

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Craighead, Harold G., Kameoka, Jun
• Primary Examiner(s): Yuan, Dah-Wei
• Assistant Examiner(s): KITT, STEPHEN A
• Application Number:
  US12/470,327
• Publication Number:
  US 20090280300A1
• Time in Patent Office: 1,419 Days
• Field of Search: 118/621
• US Class Current: 118/621
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: C23F 17/00 Multi-step processes for surface treatment of metallic material involving at least one process provided for in class C23 and at least one process covered by subclass C21D or C22F or class C25 coating for obtaining at least two superposed coatings either by methods not provided for in a single one of main groups C23C2/00 - C23C26/00, or by combinations of methods providedfor in subclasses C23C and C25D, C23C28/00
• CPC Class Codes: D01D 5/0069 characterised by the spinning section, e.g. capillary tube, protrusion or pin
• CPC Class Codes: D01F 6/64 from polycarbonates
• CPC Class Codes: D01F 6/66 from polyethers
• CPC Class Codes: Y10S 977/856 including etching/cutting
• CPC Class Codes: Y10S 977/888 Shaping or removal of materials, e.g. etching
• CPC Class Codes: Y10T 428/24562 Interlaminar spaces

Abstract

Nanofibers are formed using electrospray deposition from microfluidic source. The source is brought close to a surface, and scanned in one embodiment to form oriented or patterned fibers. In one embodiment, the surface has features, such as trenches on a silicon wafer. In further embodiments, the surface is rotated to form patterned nanofibers, such as polymer nanofibers. The nanofibers may be used as a mask to create features, and as a sacrificial layer to create nanochannels.

Claims

1. A device for forming nanofibers on a substrate, the device comprising:

a chip having at least one microchannel extending to an edge of the chip;

an emitter film or films having one or more polygonal emitter tips coupled to the chip and to one or more respective microchannels such that the one or more polygonal tips extend from the edge of the chip;

a fluid source coupled to the at least one microchannel;

a counter electrode for supporting the substrate positioned a distance from the tip or tips of the emitter film or films; and

conductors coupled to the counter electrode and the chip to apply a potential between the chip and the counter electrode, wherein the chip and the substrate are configured to move relative to one another while fluid is flowing to the one or more tips and the potential is applied to form laterally deposited nanofibers on the substrate.

2. The device of claim 1 wherein the chip further comprises a plurality of merging channels coupled between the fluid source and the one or more microchannels.

3. The device of claim 2 wherein the fluid source provides one or more fluids to the chip.

4. The device of claim 3 wherein the merging channels merge at a junction.

5. The device of claim 4 wherein the merging channels are adapted to provide for mixing of fluids.

6. The device of claim 5 wherein the merging channels are adapted to provide for reaction of fluids that are mixed.

7. The device of claim 1 wherein the emitter tips operate in a manner to form substantially parallel sets of straight nanofibers.

8. The device of claim 1 and further comprising a valve operable to control the flow of fluid in the one or more microchannels.

9. The device of claim 1 wherein the chip and substrate are adapted to create lateral movement between the substrate and the emitter to create nanofibers on the substrate.