Masking jig, substrate heating device, and coating method
First Claim
1. A coating method for forming a coating on a front surface of a substrate including a back surface connected to a radiator and constituting a power module by spraying material powder in solid state from a spray device onto the front surface of the substrate, the method comprising the steps of:
- placing a masking jig in contact with the front surface of the substrate, the masking jig being formed with an opening for specifying a coating region in which the coating is to be formed, the masking jig internally including a heat generating device to heat the vicinity of the opening;
causing the heat generating device to heat the vicinity of the opening; and
causing the spray device to spray the material powder onto the front surface of the heated substrate.
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Accused Products
Abstract
A masking jig for specifying a coating region on which a coating is formed by spraying copper powder onto a front surface of an insulating substrate from a cold spray device. This masking jig includes a metal member formed with an opening for specifying the coating region and placed in contact with the front surface of the insulating substrate. The metal member internally includes a heating wire is provided to heat the vicinity of the opening. A cooler is connected to a back surface of the insulating substrate.
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Citations
7 Claims
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1. A coating method for forming a coating on a front surface of a substrate including a back surface connected to a radiator and constituting a power module by spraying material powder in solid state from a spray device onto the front surface of the substrate, the method comprising the steps of:
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placing a masking jig in contact with the front surface of the substrate, the masking jig being formed with an opening for specifying a coating region in which the coating is to be formed, the masking jig internally including a heat generating device to heat the vicinity of the opening; causing the heat generating device to heat the vicinity of the opening; and causing the spray device to spray the material powder onto the front surface of the heated substrate. - View Dependent Claims (2)
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3. A masking jig for specifying a coating region on a front surface of a substrate including a back surface connected to a radiator and constituting a power module, when a coating is to be formed in the coating region by spraying material powder in solid state from a spray device onto the surface, the masking jig comprising:
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a contact member formed with an opening to specify the coating region, the contact member being to be placed in contact with the front surface of the substrate, and the contact member internally including a heat generating device for heating the vicinity of the opening, wherein the contact member is formed with a plurality of the openings in correspondence with a plurality of the substrates connected to the single radiator, and the heat generating device is located to heat the vicinity of each opening. - View Dependent Claims (4, 5, 6)
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7. A substrate heating device for heating a substrate including a back surface connected to a radiator and constituting a power module when a coating is to be formed on a front surface of the substrate by spraying material powder in solid state from a spray device onto the surface, the heating device comprising:
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a masking jig includes a contact member formed with an opening for specify a coating region in which the coating is to be formed, the contact member being placed in contact with the front surface of the substrate, and a heating wire placed internally in the contact member to heat the vicinity of the opening; a power source for supplying current to the heating wire; and a control device for controlling the power source, wherein the contact member is formed with a plurality of the openings in correspondence with a plurality of the substrates connected to the single radiator, and the heat generating device is located to heat the vicinity of each opening.
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Specification