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Top layers of metal for high performance IC's

  • US 8,415,800 B2
  • Filed: 08/27/2007
  • Issued: 04/09/2013
  • Est. Priority Date: 12/21/1998
  • Status: Active Grant
First Claim
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1. An integrated circuit chip comprising:

  • a silicon substrate;

    multiple devices in and on said silicon substrate, wherein said multiple devices comprise a transistor;

    a first dielectric layer over said silicon substrate;

    a metallization structure over said first dielectric layer, wherein said metallization structure comprises a first metal layer and a second metal layer over said first metal layer, wherein said metallization structure comprises aluminum;

    a second dielectric layer between said first and second metal layers;

    a passivation layer over said metallization structure and said first and second dielectric layers, wherein a first opening in said passivation layer is over a first contact point of a first metal interconnect of said metallization structure, and said first contact point is at a bottom of said first opening, wherein a second opening in said passivation layer is over a second contact point of a second metal interconnect of said metallization structure, and said second contact point is at a bottom of said second opening, and wherein a third opening in said passivation layer is over a third contact point of a third metal interconnect of said metallization structure, and said third contact point is at a bottom of said third opening, wherein said second metal interconnect has a portion spaced apart from said first metal interconnect and from said third metal interconnect, wherein said passivation layer comprises a nitride layer;

    a polymer layer on said passivation layer, wherein a fourth opening in said polymer layer is over said first contact point, wherein a fifth opening in said polymer layer is over said second contact point, and wherein a sixth opening in said polymer layer is over said third contact point, wherein said polymer layer has a thickness between 2 micrometers and 30 micrometers and greater than that of said passivation layer; and

    a power distribution structure on said polymer layer and said first, second and third contact points, wherein said power distribution structure comprises electroplated copper, wherein said first contact point is connected to said second contact point through said power distribution structure, wherein said first contact point is connect to said third contact point through said power distribution structure, and wherein said second contact point is connected to said third contact point through said power distribution structure.

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