Radiation source, lithographic apparatus and device manufacturing method

• US 8,416,391 B2
• Filed: 12/19/2008
• Issued: 04/09/2013
• Est. Priority Date: 12/19/2007
• Status: Expired due to Fees

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Banine, Vadim Yevgenyevich, Van Herpen, Maarten Marinus Johannes Wilhelmus, Soer, Wouter Anthon
• Primary Examiner(s): Kim, Peter B
• Application Number:
  US12/809,427
• Publication Number:
  US 20110134405A1
• Time in Patent Office: 1,572 Days
• Field of Search: 355/67, 355/53, 250/504
• US Class Current: 355/67
• CPC Class Codes: H05G 2/003 being produced from a liquid or gas
• CPC Class Codes: H05G 2/005 containing a metal as principal radiation generating component

Abstract

A radiation source is configured to generate radiation. The radiation source includes a first electrode and a second electrode configured to produce an electrical discharge during use to generate radiation-emitting plasma from a plasma fuel. The radiation source also includes a fuel supply configured to supply a plasma fuel to a fuel release area that is associated with the first electrode and the second electrode, and a fuel release configured to induce release of fuel, supplied by the fuel supply, from the fuel release area. The fuel release area is spaced-apart from the first electrode and from the second electrode.

Claims

1. A radiation source configured to generate radiation, comprising:

a first electrode and a second electrode configured to produce an electrical discharge during use to generate radiation-emitting plasma from a plasma fuel;

a fuel supply configured to supply a plasma fuel to a fuel release area that is associated with the first electrode and the second electrode; and

a fuel release configured to induce release of fuel, supplied by the fuel supply, from the fuel release area, the fuel release area being spaced-apart from the first electrode and from the second electrode, wherein the first electrode and the second electrode form anodes and the fuel supply is an electrical discharge cathode, or wherein the first electrode and the second electrode form cathodes and the fuel supply is an electrical discharge anode.

2. The source according to claim 1, further comprising a drive configured to rotate the first electrode or the second electrode or the fuel supply, or any combination thereof.

3. The source according to claim 2, wherein the drive is configured to rotate the first electrode and the second electrode.

4. The source according to claim 1, wherein the fuel supply comprises or is part of a fuel transport system configured to transport fuel from a fuel reservoir to the fuel release area.

5. The source according to claim 4, wherein the fuel transport system is configured to transport fuel from the fuel reservoir to the fuel release by way of rotation.

6. The source according to claim 1, wherein the fuel supply is not part of the first electrode or the second electrode, wherein the fuel supply is preferably not part of any of the first electrode and the second electrode.

7. The source according to claim 6, wherein the fuel supply is configured to position the fuel release area in a symmetrical relationship with respect to the electrical discharge area of the first electrode and the second electrode.

8. The source according to claim 1, further comprising a first cooling bath to cool the first electrode or the second electrode or the fuel supply, or any combination thereof.

9. The source according to claim 1, wherein the fuel supply is a rotating wheel, or is a rotationally symmetrical or cylindrical fuel supplying unit, or is connected to a high voltage electrical power source, or any combination thereof.

10. A method to generate radiation, comprising:

providing a first electrode and a second electrode;

transporting fuel to a fuel release area that is spaced-apart from the first electrode and the second electrode with a fuel supply;

inducing release of the fuel from the fuel release area towards an electrical discharge path associated with the first electrode and the second electrode; and

generating an electrical discharge to generate radiation-emitting plasma from fuel that has been released from the fuel release area, wherein the fuel supply is a third electrode, wherein electrical discharges are evoked between each of the first and second electrode on one hand and the third electrode on the other hand.

11. The method according to claim 10, wherein the electrical discharge is being generated between the first and second electrode, and not via the fuel supply.

12. The method according to claim 10, including positioning the electrodes relative to each other so that, in use, discharge paths extending between the electrodes are substantially curved so as to create a force that compresses the radiation-emitting plasma.

13. The method according to claim 10, including positioning the electrodes relative to each other so that, in use, discharge paths extending between the electrodes are substantially along a straight line.

14. The method according to claim 10, wherein at least part of at least one of the electrodes is rotating or continuously moving through a heat removing medium.

15. The method according to claim 10, wherein the fuel supply is rotating or continuously moving through a heat removing medium.

16. A lithographic apparatus comprising:

a radiation source configured to generate radiation, the radiation source comprising

a first electrode and a second electrode configured to produce an electrical discharge during use to generate radiation-emitting plasma from a plasma fuel,

a fuel supply configured to supply a plasma fuel to a fuel release area that is associated with the first electrode and the second electrode, and

a fuel release configured to induce release of fuel, supplied by the fuel supply, from the fuel release area, the fuel release area being spaced-apart from the first electrode and from the second electrode, wherein the first electrode and the second electrode form anodes and the fuel supply is an electrical discharge cathode, or wherein the first electrode and the second electrode form cathodes and the fuel supply is an electrical discharge anode;

a patterning device configured to pattern the radiation; and

a projection system configured to project the patterned radiation onto a target portion of a substrate.