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Tri-axis accelerometer having a single proof mass and fully differential output signals

  • US 8,418,559 B2
  • Filed: 06/28/2010
  • Issued: 04/16/2013
  • Est. Priority Date: 08/30/2006
  • Status: Active Grant
First Claim
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1. A method of fabricating a tri-axis accelerometer, comprising:

  • providing a substrate layer;

    providing an intermediate layer on a first side of the substrate layer;

    providing a top layer on the intermediate layer;

    providing a sensing material on the top layer;

    patterning the top layer to form at least two pairs of sensing structure elements underneath the sensing material, and a first proof mass arranged between the at least two pairs of sensing structure elements, the at least two pairs of sensing structure elements being arranged along at least two axial directions that are perpendicular to one another;

    removing a portion of the intermediate layer underneath the sensing structure elements; and

    removing a portion of the intermediate layer underneath at least a part of the first proof mass.

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