Gate valve and substrate processing system using same

• US 8,419,337 B2
• Filed: 08/03/2010
• Issued: 04/16/2013
• Est. Priority Date: 08/04/2009
• Status: Expired due to Fees

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Tateshita, Koichi, Mochizuki, Tetsuya
• Primary Examiner(s): Rodriguez, Saul
• Assistant Examiner(s): SNELTING, JONATHAN D
• Application Number:
  US12/849,465
• Publication Number:
  US 20110033266A1
• Time in Patent Office: 987 Days
• Field of Search: 414/217, 251/326, 251/329
• US Class Current: 414/217
• CPC Class Codes: F16K 3/186 by means of cams of wedge from
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A gate valve includes a valve body to be pressed against a peripheral surface around opening through which a processing target object is loaded and unloaded, pressed members arranged on a surface of the valve body around the opening, a main slider which slides in a direction parallel to the peripheral surface around the opening and pressing mechanisms, provided at the main slider, for pressing the respective pressed members. Each of the pressing mechanisms includes a cam having a protrusion for pressing the valve body against the peripheral surface around the opening and an inclined portion sloping downward from the protrusion. The pressing mechanisms serve to press the valve body in a direction substantially perpendicular to the peripheral surface around the opening in a state that the valve body is positioned to face the opening, so that the valve body is pressed against the peripheral surface around the opening.

Claims

1. A gate valve comprising:

a valve body to be pressed against a peripheral surface around opening through which a processing target object is loaded and unloaded;

pressed members arranged on a surface of the valve body;

a main slider which slides in a direction parallel to the peripheral surface around the opening; and

pressing mechanisms, provided at the main slider, for pressing the respective pressed members,

wherein each of the pressing mechanisms includes a cam having a protrusion for pressing the valve body against the peripheral surface around the opening and an inclined portion sloping downward from the protrusion;

wherein the pressing mechanisms serve to press the valve body in a direction substantially perpendicular to the peripheral surface around the opening in a state that the valve body is positioned to face the opening, so that the valve body is pressed against the peripheral surface around the opening;

wherein the gate valve further comprises a sub-slider provided between the valve body and the main slider to support the valve body;

wherein the sub-slider is slidable in a direction substantially parallel to the peripheral surface around the opening;

wherein the sub-slider includes a support and guide mechanism for supporting the valve body and defining a pressing direction and a separation direction of the valve body to the direction substantially perpendicular to the peripheral surface around the opening;

wherein the gate valve further comprises a stopper which stops sliding movement of the sub-slider;

wherein after the sliding movement of the sub-slider is stopped by the stopper, the main slider further slides in an identical direction to that of the sliding movement of the sub-slider so that the protrusions of the pressing mechanisms press against the valve body;

wherein guide rails are provided on a surface of the sub-slider facing the main slider, and connection members are provided on a surface of the main slider facing the sub-slider; and

wherein the sub-slider is slidably connected with the main slider via the guide rails and the connection members.

2. The gate valve of claim 1, further comprising a separation mechanism for moving the valve body away from the peripheral surface around the opening,

wherein the separation mechanism includes an extensible/contractible body;

and

the extensible/contractible body is contracted when the valve body is pressed against the peripheral surface around the opening, and the extensible/contractible body is extended to separate the valve body from the peripheral surface around the opening.

3. The gate valve of claim 2, wherein the separation mechanism is provided at the sub-slider, and the support and guide mechanism has a shaft extending through the sub-slider, and the extensible/contractible body of the separation member is positioned between a facing surface of the sub-slider facing the main slider and a flange provided at a leading end of the shaft.

4. The gate valve of claim 3, wherein the flange compresses the extensible/contractible body when the valve body is pressed against the peripheral surface around the opening, and an extension force is applied to the flange from the contracted extensible/contractible body to separate the valve body from the peripheral surface around the opening.

5. The gate valve of claim 1, wherein the main slider has an engagement member to be engaged with the sub slider, and the engagement member is engaged with the sub slider stopped by the stopper when the main slider slides, thus allowing the sub-slider and the valve body to slide together.

6. The gate valve of claim 5, wherein when the main slider slides up while the engagement member is engaged with the sub-slider, the main slider, the sub-slider and the valve body moves in unison.

7. The gate valve of claim 1, wherein the pressed members of the valve body pressed by the pressing mechanism are arranged in an area corresponding to an inner side of the opening.

8. The gate valve of claim 7, wherein at least one of the pressed members is disposed at a central portion of the valve body corresponding to a central portion of the opening.

9. The gate valve of claim 1, further comprising a screen member provided on a side of the main slider opposite to a side thereof facing the valve body to confine elastic deformation of the main slider.

10. The gate valve of claim 1, wherein the main slider has an engagement member engageable with the sub-slider stopped by the stopper when the main slider slides, thus allowing the sub-slider and the valve body to slide together when the sub-slider is engaged with the engagement member.

11. The gate valve of claim 10, wherein when the main slider slides up while the engagement member is engaged with the sub-slider, the main slider, the sub-slider and the valve body moves in unison.

12. The gate valve of claim 1, wherein the main slider has an engagement member which is engaged with the sub-slider stopped by the stopper when the main slider slides up, thus allowing the sub-slider and the valve body to slide together.

13. The gate valve of claim 12, wherein when the main slider slides up while the engagement member is engaged with the sub-slider, the main slider, the sub-slider and the valve body moves in unison.

14. A substrate processing system comprising:

a processing chamber having an opening through which a processing target object is loaded and unloaded, for performing a process on the target object while maintaining the target object in a vacuum state;

a load lock chamber having an opening through which the target object is loaded and unloaded, wherein the atmospheric state and the vacuum state are maintained in the load lock chamber alternately; and

a transfer chamber having an opening through which the target object is loaded and unloaded, for performing a transfer of the target object between the load lock chamber and the processing chamber,

wherein the gate valve of claim 1 is used to open and close the opening of at least one of the processing chamber, the load lock chamber and the transfer chamber.

15. The substrate processing system of claim 14, wherein the main slider has an engagement member to be engaged with the sub-slider, and the engagement member is engaged with the sub-slider stopped by the stopper when the main slider slides, thus allowing the sub-slider and the valve body to slide together.

16. The substrate processing system of claim 15, wherein when the main slider slides up while the engagement member is engaged with the sub-slider, the main slider, the sub-slider and the valve body moves in unison.

17. The substrate processing system of claim 14, wherein the main slider has an engagement member engageable with the sub-slider stopped by the stopper when the main slider slides, thus allowing the sub-slider and the valve body to slide together when the sub-slider is engaged with the engagement member.

18. The substrate processing system of claim 17, wherein when the main slider slides up while the engagement member is engaged with the sub-slider, the main slider, the sub-slider and the valve body moves in unison.

19. The substrate processing system of claim 14, wherein the main slider has an engagement member which is engaged with the sub-slider stopped by the stopper when the main slider slides up, thus allowing the sub-slider and the valve body to slide together.

20. The substrate processing system of claim 19, wherein when the main slider slides up while the engagement member is engaged with the sub-slider, the main slider, the sub-slider and the valve body moves in unison.