Semiconductor devices with graded dopant regions

• US 8,421,195 B2
• Filed: 01/12/2007
• Issued: 04/16/2013
• Est. Priority Date: 09/03/2004
• Status: Active Grant

• Current Assignee: Greenthread, LLC
• Original Assignee: G. R. Mohan Rao
• Inventors: Rao, G. R. Mohan
• Primary Examiner(s): ARORA, AJAY
• Application Number:
  US11/622,496
• Publication Number:
  US 20070158790A1
• Time in Patent Office: 2,286 Days
• Field of Search: 257/655, 257/269
• US Class Current: 257/655
• CPC Class Codes: H01L 27/0214 for internal polarisation, e.g. I2L
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers
• CPC Class Codes: H01L 29/1095 Body region, i.e. base region, of DMOS transistors or IGBTs cell layout H01L29/0696
• CPC Class Codes: H01L 29/36 characterised by the concentration or distribution of impurities in the bulk material within semiconductor regions H01L29/06
• CPC Class Codes: H01L 29/7395 Vertical transistors, e.g. vertical IGBT
• CPC Class Codes: H10B 12/01 Manufacture or treatment
• CPC Class Codes: H10B 41/30 characterised by the memory core region
• CPC Class Codes: H10B 41/35 with a cell select transistor, e.g. NAND

Abstract

Most semiconductor devices manufactured today, have uniform dopant concentration, either in the lateral or vertical device active (and isolation) regions. By grading the dopant concentration, the performance in various semiconductor devices can be significantly improved. Performance improvements can be obtained in application specific areas like increase in frequency of operation for digital logic, various power MOSFET and IGBT ICS, improvement in refresh time for DRAM'"'"'s, decrease in programming time for nonvolatile memory, better visual quality including pixel resolution and color sensitivity for imaging ICs, better sensitivity for varactors in tunable filters, higher drive capabilities for JFET'"'"'s, and a host of other applications.

Claims

1. A CMOS Semiconductor device comprising:

a surface layer;

a substrate;

an active region including a source and a drain, disposed on one surface of said surface layer;

a single drift layer disposed between the other surface of said surface layer and said substrate, said drift layer having a graded concentration of dopants extending between said surface layer and said substrate, said drift layer further having a first static unidirectional electric drift field to aid the movement of minority carriers from said surface layer to said substrate; and

at least one well region disposed in said single drift layer, said well region having a graded concentration of dopants and a second static unidirectional electric drift field to aid the movement of minority carriers from said surface layer to said substrate.

2. The CMOS Semiconductor device of claim 1, wherein the said drift layer is a deeply-implanted layer.

3. The CMOS Semiconductor device of claim 1, wherein said drift layer is an epitaxial layer.

4. The CMOS Semiconductor device of claim 1, wherein said graded concentration follows a linear gradient.

5. The CMOS Semiconductor device of claim 1, wherein said graded concentration follows a quasi-linear gradient.

6. The CMOS Semiconductor device of claim 1, wherein said graded concentration follows an exponential gradient.

7. The CMOS Semiconductor device of claim 1, wherein said graded concentration follows a complimentary error function gradient.

8. A CMOS Semiconductor device comprising:

a surface layer;

a substrate;

an active region including a source and a drain, disposed on one surface of said surface layer,

a single drift layer disposed between the other surface of said surface layer and said substrate, said drift layer having a graded concentration of dopants extending between said surface layer and said substrate, said drift layer further having a first static unidirectional electric drift field to aid the movement of minority carriers from said substrate to said surface layer; and

at least one well region disposed in said single drift layer, said well region having a graded concentration of dopants and a second static unidirectional electric drift field to aid the movement of minority carriers from said substrate TO SAID SURFACE LAYER.

9. The CMOS Semiconductor device of claim 8, wherein said drift layer is deeply-implanted layer.

10. The CMOS Semiconductor device of claim 8, wherein said drift layer is an epitaxial layer.

11. The CMOS Semiconductor device of claim 8, wherein said graded concentration follows a linear gradient.

12. The CMOS Semiconductor device of claim 8, wherein said graded concentration follows a quasi-linear gradient.

13. The CMOS Semiconductor device of claim 8, wherein said graded concentration follows a exponential gradient.

14. The CMOS Semiconductor device of claim 8, wherein said graded concentration follows a complimentary error function gradient.